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AU2002311155A1 - Dry-etcching method - Google Patents

Dry-etcching method

Info

Publication number
AU2002311155A1
AU2002311155A1 AU2002311155A AU2002311155A AU2002311155A1 AU 2002311155 A1 AU2002311155 A1 AU 2002311155A1 AU 2002311155 A AU2002311155 A AU 2002311155A AU 2002311155 A AU2002311155 A AU 2002311155A AU 2002311155 A1 AU2002311155 A1 AU 2002311155A1
Authority
AU
Australia
Prior art keywords
etcching
dry
etcching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002311155A
Inventor
Ethuo Iijima
Norikazu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002311155A1 publication Critical patent/AU2002311155A1/en
Abandoned legal-status Critical Current

Links

AU2002311155A 2001-06-15 2002-06-07 Dry-etcching method Abandoned AU2002311155A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-182193 2001-06-15
JP2001-319755 2001-10-17

Publications (1)

Publication Number Publication Date
AU2002311155A1 true AU2002311155A1 (en) 2003-01-02

Family

ID=

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