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AU2002306892A1 - Method and device for vibration control - Google Patents

Method and device for vibration control

Info

Publication number
AU2002306892A1
AU2002306892A1 AU2002306892A AU2002306892A AU2002306892A1 AU 2002306892 A1 AU2002306892 A1 AU 2002306892A1 AU 2002306892 A AU2002306892 A AU 2002306892A AU 2002306892 A AU2002306892 A AU 2002306892A AU 2002306892 A1 AU2002306892 A1 AU 2002306892A1
Authority
AU
Australia
Prior art keywords
vibration control
vibration
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002306892A
Inventor
Huckleberry B. Dorn
Mordechay Karpel
Leonard Lublin
Richard Perkins
Baruch Pletner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/968,180 external-priority patent/US20020099475A1/en
Priority claimed from US10/104,502 external-priority patent/US6690706B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of AU2002306892A1 publication Critical patent/AU2002306892A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45028—Lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Atmospheric Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AU2002306892A 2001-03-26 2002-03-25 Method and device for vibration control Abandoned AU2002306892A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US27881001P 2001-03-26 2001-03-26
US60/278,810 2001-03-26
US09/968,180 2001-10-01
US09/968,180 US20020099475A1 (en) 2000-12-01 2001-10-01 Method and device for vibration control
US10/104,502 2002-03-22
US10/104,502 US6690706B2 (en) 2000-06-09 2002-03-22 High rep-rate laser with improved electrodes
PCT/US2002/009394 WO2002077484A2 (en) 2001-03-26 2002-03-25 Method and device for vibration control

Publications (1)

Publication Number Publication Date
AU2002306892A1 true AU2002306892A1 (en) 2002-10-08

Family

ID=29255186

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002306892A Abandoned AU2002306892A1 (en) 2001-03-26 2002-03-25 Method and device for vibration control

Country Status (4)

Country Link
EP (1) EP1380000A2 (en)
JP (1) JP2004532517A (en)
AU (1) AU2002306892A1 (en)
WO (1) WO2002077484A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10301765A1 (en) * 2003-01-18 2004-07-29 Dr. Johannes Heidenhain Gmbh Controller structure for active damping of low-frequency vibrations on numerically controlled machine tools
US7576832B2 (en) * 2006-05-04 2009-08-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7630059B2 (en) * 2006-07-24 2009-12-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
ES2333194B1 (en) * 2008-04-21 2011-01-31 Arquimea Ingenieria, S.L. MATERIAL ACTUATOR WITH FORM MEMORY.
US20110094546A1 (en) * 2009-10-23 2011-04-28 John Valcore System and method for wafer carrier vibration reduction
US9665012B2 (en) 2012-11-06 2017-05-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
CN106227149B (en) * 2016-07-11 2018-10-19 广东工业大学 A kind of galvanometer motor motion planning method shortening idle stroke positioning time
RU187662U1 (en) * 2018-07-23 2019-03-14 Сергей Иванович Чижиков Piezoelectric Acoustic Damper
CN116021555B (en) * 2023-03-29 2023-07-07 之江实验室 Vibration absorption control method and device for a flexible joint manipulator
CN119714517B (en) * 2025-02-25 2025-06-27 青岛智腾微电子有限公司 Downhole drilling tool vibration monitoring and restraining system based on multi-chip assembly

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3065489B2 (en) * 1994-10-12 2000-07-17 捷夫 本田 Vibration resistant interferometer
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
JP3653827B2 (en) * 1995-10-20 2005-06-02 株式会社ニコン Interferometer
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus

Also Published As

Publication number Publication date
JP2004532517A (en) 2004-10-21
WO2002077484A3 (en) 2003-11-06
WO2002077484A2 (en) 2002-10-03
EP1380000A2 (en) 2004-01-14
WO2002077484A9 (en) 2004-06-03
WO2002077484A8 (en) 2003-02-13

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase