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AU2002302396A1 - Microvalve - Google Patents

Microvalve

Info

Publication number
AU2002302396A1
AU2002302396A1 AU2002302396A AU2002302396A AU2002302396A1 AU 2002302396 A1 AU2002302396 A1 AU 2002302396A1 AU 2002302396 A AU2002302396 A AU 2002302396A AU 2002302396 A AU2002302396 A AU 2002302396A AU 2002302396 A1 AU2002302396 A1 AU 2002302396A1
Authority
AU
Australia
Prior art keywords
microvalve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002302396A
Inventor
Frank Doffing
Michael Klaus
Friedhelm Schonfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Mikrotechnik Mainz GmbH
Original Assignee
Institut fuer Mikrotechnik Mainz GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Mikrotechnik Mainz GmbH filed Critical Institut fuer Mikrotechnik Mainz GmbH
Publication of AU2002302396A1 publication Critical patent/AU2002302396A1/en
Abandoned legal-status Critical Current

Links

AU2002302396A 2001-03-07 2002-03-06 Microvalve Abandoned AU2002302396A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/274,022 2001-03-07

Publications (1)

Publication Number Publication Date
AU2002302396A1 true AU2002302396A1 (en) 2002-09-19

Family

ID=

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