AU2002363479A1 - Electrochemical mechanical processing with advancible sweeper - Google Patents

Electrochemical mechanical processing with advancible sweeper

Info

Publication number: AU2002363479A1
Authority: AU; Australia
Prior art keywords: advancible; sweeper; mechanical processing; electrochemical mechanical; electrochemical
Prior art date: 2001-11-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002363479A

Inventor

Bulent M. Basol

Homayoun Talieh

Cyprian E. Uzoh

Halit N. Yakupoglu

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

ASM Nutool Inc

Original Assignee

ASM Nutool Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-11-02

Filing date

2002-11-04

Publication date

2003-05-19

2002-11-04 Application filed by ASM Nutool Inc filed Critical ASM Nutool Inc

2003-05-19 Publication of AU2002363479A1 publication Critical patent/AU2002363479A1/en

Status Abandoned legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/22—Electroplating combined with mechanical treatment during the deposition
- H10P14/47—
- H10P72/0428—
- H10W20/056—
- H10W20/062—

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Ceramic Engineering (AREA)
Inorganic Chemistry (AREA)
Electroplating Methods And Accessories (AREA)
Electrodes Of Semiconductors (AREA)
Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

AU2002363479A 2001-11-02 2002-11-04 Electrochemical mechanical processing with advancible sweeper Abandoned AU2002363479A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US35021401P	2001-11-02	2001-11-02
US60/350,214		2001-11-02
PCT/US2002/035398 WO2003041126A2 (en)	2001-11-02	2002-11-04	Electrochemical mechanical processing with advancible sweeper

Publications (1)

Publication Number	Publication Date
AU2002363479A1 true AU2002363479A1 (en)	2003-05-19

Family

ID=23375713

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002363479A Abandoned AU2002363479A1 (en)	2001-11-02	2002-11-04	Electrochemical mechanical processing with advancible sweeper

Country Status (7)

Country	Link
EP (1)	EP1439935A2 (en)
JP (1)	JP2005509092A (en)
KR (1)	KR20040064699A (en)
CN (1)	CN1646263A (en)
AU (1)	AU2002363479A1 (en)
TW (1)	TW593787B (en)
WO (1)	WO2003041126A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6838149B2 (en) *	2001-12-13	2005-01-04	3M Innovative Properties Company	Abrasive article for the deposition and polishing of a conductive material
KR100767047B1 (en) *	2006-05-20	2007-10-17	한국기계연구원	Electrolytic polishing jig and electrolytic polishing method of metal mask using same
CN101987429B (en) *	2009-08-07	2012-09-26	中芯国际集成电路制造(上海)有限公司	Grinding method and device by chemical machinery
CN109277655B (en) *	2018-09-12	2020-02-21	南京航空航天大学	Multi-pattern hollow sheet metal strip electrolytic spray processing device and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6176992B1 (en) *	1998-11-03	2001-01-23	Nutool, Inc.	Method and apparatus for electro-chemical mechanical deposition
US6610190B2 (en) *	2000-11-03	2003-08-26	Nutool, Inc.	Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate
US6241583B1 (en) *	1999-02-04	2001-06-05	Applied Materials, Inc.	Chemical mechanical polishing with a plurality of polishing sheets
US6464855B1 (en) *	2000-10-04	2002-10-15	Speedfam-Ipec Corporation	Method and apparatus for electrochemical planarization of a workpiece

2002
- 2002-11-04 AU AU2002363479A patent/AU2002363479A1/en not_active Abandoned
- 2002-11-04 JP JP2003543071A patent/JP2005509092A/en not_active Withdrawn
- 2002-11-04 CN CNA028264908A patent/CN1646263A/en active Pending
- 2002-11-04 EP EP02802846A patent/EP1439935A2/en not_active Ceased
- 2002-11-04 WO PCT/US2002/035398 patent/WO2003041126A2/en not_active Ceased
- 2002-11-04 TW TW091132514A patent/TW593787B/en not_active IP Right Cessation
- 2002-11-04 KR KR10-2004-7006513A patent/KR20040064699A/en not_active Withdrawn

Also Published As

Publication number	Publication date
TW593787B (en)	2004-06-21
JP2005509092A (en)	2005-04-07
WO2003041126A2 (en)	2003-05-15
CN1646263A (en)	2005-07-27
KR20040064699A (en)	2004-07-19
TW200300463A (en)	2003-06-01
EP1439935A2 (en)	2004-07-28
WO2003041126A3 (en)	2003-11-06

Publication	Publication Date	Title
AU2002331930A1 (en)	2003-03-24	Solid electrochemical sensor
AUPR459901A0 (en)	2001-05-24	Instant messaging
AU2002353750A1 (en)	2003-06-10	Electrochemical device
AU2003231488A1 (en)	2003-12-02	Electric demineralizer
AU2002356479A1 (en)	2003-06-10	Electrochemical sensor
AU2003292655A1 (en)	2004-07-29	Electric demineralizer
AU2002338574A1 (en)	2002-11-11	Compensation-data processing
AU2003302829A1 (en)	2004-06-30	Electric contact member
AU2002239190A1 (en)	2002-11-25	Ion sorces
AU2002320813A1 (en)	2003-05-15	Spirit level
AU2002252226A1 (en)	2002-09-24	Self-wringing flat mop
AU2002301354A1 (en)	2003-06-12	Improvements in Transmissometers
AU2002301358A1 (en)	2003-06-12	Improvements in Transmissometers
AU2002343106A1 (en)	2003-06-17	Contactors
AU2002363479A1 (en)	2003-05-19	Electrochemical mechanical processing with advancible sweeper
AU2002350537A1 (en)	2003-05-06	Electrochemical half element
AUPR360601A0 (en)	2001-04-05	Conductivity cell
AU2002353705A1 (en)	2003-06-30	Electrode
AU2002346175A1 (en)	2003-01-29	Battery
AU2002302458A1 (en)	2002-10-08	Paint-can with bruswiper
AU2002322063A1 (en)	2002-12-23	Contact bearing
AU2002227926A1 (en)	2003-05-26	Bearing
AU2001100522A4 (en)	2001-11-22	e-Trans
AU2001100532A4 (en)	2001-11-29	FonePark
AU2001100338A4 (en)	2001-10-04	Sunglove

Legal Events

Date	Code	Title	Description
2004-07-22	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase