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AU2002358704A1 - Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and method for the production of such a gas sensor - Google Patents

Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and method for the production of such a gas sensor

Info

Publication number
AU2002358704A1
AU2002358704A1 AU2002358704A AU2002358704A AU2002358704A1 AU 2002358704 A1 AU2002358704 A1 AU 2002358704A1 AU 2002358704 A AU2002358704 A AU 2002358704A AU 2002358704 A AU2002358704 A AU 2002358704A AU 2002358704 A1 AU2002358704 A1 AU 2002358704A1
Authority
AU
Australia
Prior art keywords
gas sensor
principle
detection
production
work function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002358704A
Inventor
Ignaz Eisele
Martin Zimmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VOIGT WOLFGANG M
Original Assignee
VOIGT WOLFGANG M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7709052&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AU2002358704(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by VOIGT WOLFGANG M filed Critical VOIGT WOLFGANG M
Publication of AU2002358704A1 publication Critical patent/AU2002358704A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G01N27/4143Air gap between gate and channel, i.e. suspended gate [SG] FETs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0044Sulphides, e.g. H2S
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005H2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
AU2002358704A 2001-12-13 2002-12-13 Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and method for the production of such a gas sensor Abandoned AU2002358704A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2001161214 DE10161214B4 (en) 2001-12-13 2001-12-13 Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and a method for producing such a gas sensor
DE10161214.1 2001-12-13
PCT/EP2002/014232 WO2003050526A2 (en) 2001-12-13 2002-12-13 Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and method for the production of such a gas sensor

Publications (1)

Publication Number Publication Date
AU2002358704A1 true AU2002358704A1 (en) 2003-06-23

Family

ID=7709052

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002358704A Abandoned AU2002358704A1 (en) 2001-12-13 2002-12-13 Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and method for the production of such a gas sensor

Country Status (3)

Country Link
AU (1) AU2002358704A1 (en)
DE (1) DE10161214B4 (en)
WO (1) WO2003050526A2 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10110471C2 (en) 2001-03-05 2003-12-18 Siemens Ag Alcohol sensor based on the principle of work function measurement
DE10335163B3 (en) * 2003-07-30 2005-03-03 Micronas Gmbh gas sensor
DE10346071A1 (en) * 2003-10-04 2005-04-28 Daimler Chrysler Ag Exhaust gas sensor and sensor-based emission control method
CN100587485C (en) * 2004-01-27 2010-02-03 H2Scan公司 Gas sensor with integrated reference device
DE102004013678A1 (en) 2004-03-18 2005-10-20 Micronas Gmbh Device for detecting a gas or gas mixture
DE102004019639A1 (en) * 2004-04-22 2005-11-17 Siemens Ag FET-based gas sensor
DE102004019641B4 (en) 2004-04-22 2009-10-01 Micronas Gmbh FET-based gas sensor
DE102004019640A1 (en) 2004-04-22 2005-11-17 Siemens Ag Method for increasing the selectivity of FET-based gas sensors
DE102004019604A1 (en) 2004-04-22 2005-11-17 Siemens Ag Method for minimizing cross sensitivities in FET based gas sensors
US7772617B2 (en) 2005-03-31 2010-08-10 Micronas Gmbh Gas sensitive field-effect-transistor
EP1707951A1 (en) * 2005-03-31 2006-10-04 Micronas GmbH Gas-sensitive field effect transistor for detecting hydrogen sulphide
EP1707952A1 (en) 2005-03-31 2006-10-04 Micronas GmbH Gas sensitive field effect transistor comprising air gap and manufacturing thereof
EP2006668B1 (en) 2007-06-22 2014-05-07 Micronas GmbH Gas sensor
DE102007034331A1 (en) * 2007-07-24 2009-01-29 Robert Bosch Gmbh Apparatus and method for detecting substances
DE102007034330A1 (en) * 2007-07-24 2009-01-29 Robert Bosch Gmbh Apparatus and method for detecting substances
DE102007042265A1 (en) * 2007-09-06 2009-03-12 Micronas Gmbh Circuit arrangement with a CC-FET gas sensor and method for its control
EP2141491A1 (en) * 2008-07-02 2010-01-06 Micronas GmbH Gas sensor
DE102008042859A1 (en) 2008-10-15 2010-04-22 Robert Bosch Gmbh Electronic component
DE102009018364A1 (en) * 2009-04-23 2010-11-25 Micronas Gmbh Device for detecting a gas or gas mixture and method for producing such
DE102012210137B4 (en) 2012-06-15 2025-03-20 Bayerische Motoren Werke Aktiengesellschaft Warning system in a motor vehicle with a hydrogen storage device
DE112018004562A5 (en) 2017-09-27 2020-06-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. FLUID SENSOR
WO2024236431A1 (en) * 2023-05-12 2024-11-21 Vocai Medical Ltd. System and method for sensing of analyte concentrations

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4671852A (en) * 1986-05-07 1987-06-09 The Standard Oil Company Method of forming suspended gate, chemically sensitive field-effect transistor
DE4239319C2 (en) * 1992-11-23 1996-10-02 Ignaz Prof Dr Eisele Process for the spacer-free, hybrid construction of air gap and gate of suspended gate field effect transistors (SGFET) as well as components manufactured according to the process
DE4333875C2 (en) * 1993-10-05 1995-08-17 Zenko Dipl Ing Gergintschew Semiconductor gas sensor based on a capacitive controlled field effect transistor (CCFET)
DE19814857C2 (en) * 1998-04-02 2000-09-28 Siemens Ag Gas sensor based on the principle of work function measurement
ATE255723T1 (en) * 1998-04-02 2003-12-15 Siemens Ag GAS SENSOR FOR DETECTING CARBON DIOXIDE BY MEASURING THE WORK WORK OF CARBONATES OR PHOSPHATES
DE19849932A1 (en) * 1998-10-29 2000-05-11 Siemens Ag Gas detection based on the principle of measuring work functions
DE19956744C2 (en) * 1999-11-25 2002-02-21 Siemens Ag gas sensor
DE10032062C2 (en) * 2000-07-01 2002-06-27 Eads Deutschland Gmbh Gas sensor and use of a field effect transistor as a gas sensor

Also Published As

Publication number Publication date
WO2003050526A3 (en) 2004-03-04
DE10161214A1 (en) 2003-07-03
DE10161214B4 (en) 2004-02-19
WO2003050526A2 (en) 2003-06-19

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase