AU2002358638A1 - Catadioptric reduction lens - Google Patents

Catadioptric reduction lens

Info

Publication number: AU2002358638A1
Authority: AU; Australia
Prior art keywords: reduction lens; catadioptric reduction; catadioptric; lens; reduction
Prior art date: 2001-12-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002358638A

Other versions

AU2002358638A8 (en

Inventor

Alexander Epple

David R. Shafer

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Carl Zeiss SMT GmbH

Original Assignee

Carl Zeiss SMT GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-12-18

Filing date

2002-12-07

Publication date

2003-06-30

2002-12-07 Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH

2003-06-30 Publication of AU2002358638A1 publication Critical patent/AU2002358638A1/en

2003-06-30 Publication of AU2002358638A8 publication Critical patent/AU2002358638A8/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0892—Catadioptric systems specially adapted for the UV
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Lenses (AREA)

AU2002358638A 2001-12-18 2002-12-07 Catadioptric reduction lens Abandoned AU2002358638A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US34027501P	2001-12-18	2001-12-18
US60/340,275		2001-12-18
PCT/EP2002/013887 WO2003052462A2 (en)	2001-12-18	2002-12-07	Catadioptric reduction lens

Publications (2)

Publication Number	Publication Date
AU2002358638A1 true AU2002358638A1 (en)	2003-06-30
AU2002358638A8 AU2002358638A8 (en)	2003-06-30

Family

ID=23332647

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002358638A Abandoned AU2002358638A1 (en)	2001-12-18	2002-12-07	Catadioptric reduction lens

Country Status (2)

Country	Link
AU (1)	AU2002358638A1 (en)
WO (1)	WO2003052462A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10127227A1 (en)	2001-05-22	2002-12-05	Zeiss Carl	Catadioptric reduction lens
US7190527B2 (en)	2002-03-01	2007-03-13	Carl Zeiss Smt Ag	Refractive projection objective
US8208198B2 (en)	2004-01-14	2012-06-26	Carl Zeiss Smt Gmbh	Catadioptric projection objective
US20080151364A1 (en)	2004-01-14	2008-06-26	Carl Zeiss Smt Ag	Catadioptric projection objective
KR101213831B1 (en)	2004-05-17	2012-12-24	칼 짜이스 에스엠티 게엠베하	Catadioptric projection objective with intermediate image
DE102008040819A1 (en)	2007-09-14	2009-03-26	Carl Zeiss Smt Ag	Method for manufacturing optical element, particularly lens for objective or for lighting system for projection illumination system of micro lithography, involves making available pre-product with optical surface
JP2010237356A (en) *	2009-03-31	2010-10-21	Sony Corp	Projection-type image display device and projection optical system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE69933973T2 (en) *	1998-07-29	2007-06-28	Carl Zeiss Smt Ag	CATADIOPRIC OPTICAL SYSTEM AND EQUIPPED EXPOSURE DEVICE
US7301605B2 (en) *	2000-03-03	2007-11-27	Nikon Corporation	Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices

2002
- 2002-12-07 AU AU2002358638A patent/AU2002358638A1/en not_active Abandoned
- 2002-12-07 WO PCT/EP2002/013887 patent/WO2003052462A2/en not_active Ceased

Also Published As

Publication number	Publication date
WO2003052462A2 (en)	2003-06-26
WO2003052462A3 (en)	2004-01-15
AU2002358638A8 (en)	2003-06-30

Publication	Publication Date	Title
AU2002361359A1 (en)	2003-03-18	Remouvable eyewear member
AU2002321250A1 (en)	2003-03-03	Projection arrangement
AU2002361916A1 (en)	2003-03-18	Iris-supported intraocular lenses
AU2002248648A1 (en)	2002-10-28	Projection systems
AU2002367148A1 (en)	2003-07-15	Intraocular lens
AU2003258519A1 (en)	2004-02-09	Catadioptric projection objective
AU2002358638A1 (en)	2003-06-30	Catadioptric reduction lens
AU2002317875A1 (en)	2003-06-23	Catadioptrical reduction lens
AU2003242756A1 (en)	2004-01-06	Catadioptric reduction objective
AU2002307341A1 (en)	2002-10-28	Intraocular lens system
AU2002351398A1 (en)	2003-06-30	Voice-bearing light
AU2001280213A1 (en)	2003-06-05	Ocular lens
AU2002233279A1 (en)	2002-07-01	Projector lens
AU2002303818A1 (en)	2002-12-03	Low surface-glare intraocular lenses
AU2002362614A1 (en)	2003-04-07	Catadioptric reduction lens
AUPR183600A0 (en)	2001-01-04	Lens assembly
AU2002308797A1 (en)	2002-10-21	Catadioptric system
AU2002246235A1 (en)	2002-10-03	Optical components
AU2002321645A1 (en)	2003-06-30	Photographic process0r
AU2002251890A1 (en)	2002-09-19	Intracorneal lens
AU2002247969A1 (en)	2002-09-19	Projector
AU2002226177A1 (en)	2002-07-30	Camera
AU2001263714A1 (en)	2003-01-08	Light fitting
AUPR502501A0 (en)	2001-06-07	Light fitting
TW468802U (en)	2001-12-11	Lens set

Legal Events

Date	Code	Title	Description
2004-09-02	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase