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AU2002341208A1 - Method of forming a patterned metal layer - Google Patents

Method of forming a patterned metal layer

Info

Publication number
AU2002341208A1
AU2002341208A1 AU2002341208A AU2002341208A AU2002341208A1 AU 2002341208 A1 AU2002341208 A1 AU 2002341208A1 AU 2002341208 A AU2002341208 A AU 2002341208A AU 2002341208 A AU2002341208 A AU 2002341208A AU 2002341208 A1 AU2002341208 A1 AU 2002341208A1
Authority
AU
Australia
Prior art keywords
forming
metal layer
patterned metal
patterned
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002341208A
Inventor
Stephen Robert Burgess
James Francis O'sullivan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002341208A1 publication Critical patent/AU2002341208A1/en
Abandoned legal-status Critical Current

Links

AU2002341208A 2001-11-10 2002-11-08 Method of forming a patterned metal layer Abandoned AU2002341208A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0127075.0 2001-11-10
US60/391,971 2002-06-28

Publications (1)

Publication Number Publication Date
AU2002341208A1 true AU2002341208A1 (en) 2003-05-26

Family

ID=

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