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AU2002239320A1 - Two-level u-shaped groove and method of fabricating the same - Google Patents

Two-level u-shaped groove and method of fabricating the same

Info

Publication number
AU2002239320A1
AU2002239320A1 AU2002239320A AU3932002A AU2002239320A1 AU 2002239320 A1 AU2002239320 A1 AU 2002239320A1 AU 2002239320 A AU2002239320 A AU 2002239320A AU 3932002 A AU3932002 A AU 3932002A AU 2002239320 A1 AU2002239320 A1 AU 2002239320A1
Authority
AU
Australia
Prior art keywords
fabricating
level
same
shaped groove
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002239320A
Inventor
Lu Chen
Glenn E. Kohnke
Yuri Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cornell Research Foundation Inc
Corning Inc
Original Assignee
Cornell Research Foundation Inc
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cornell Research Foundation Inc, Corning Inc filed Critical Cornell Research Foundation Inc
Publication of AU2002239320A1 publication Critical patent/AU2002239320A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
AU2002239320A 2000-11-20 2001-11-15 Two-level u-shaped groove and method of fabricating the same Abandoned AU2002239320A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US71803700A 2000-11-20 2000-11-20
US09/718,037 2000-11-20
PCT/US2001/043881 WO2002041507A2 (en) 2000-11-20 2001-11-15 Two-level u-shaped groove and method of fabricating the same

Publications (1)

Publication Number Publication Date
AU2002239320A1 true AU2002239320A1 (en) 2002-05-27

Family

ID=24884554

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002239320A Abandoned AU2002239320A1 (en) 2000-11-20 2001-11-15 Two-level u-shaped groove and method of fabricating the same

Country Status (2)

Country Link
AU (1) AU2002239320A1 (en)
WO (1) WO2002041507A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11262506B1 (en) * 2020-08-07 2022-03-01 Advanced Semiconductor Engineering, Inc. Recessed portion in a substrate and method of forming the same
US12130470B2 (en) 2021-10-25 2024-10-29 Globalfoundries U.S. Inc. PIC die and package with multiple level and multiple depth connections of fibers to on-chip optical components
US11774689B2 (en) 2021-10-25 2023-10-03 Globalfoundries U.S. Inc. Photonics chips and semiconductor products having angled optical fibers
US11650381B1 (en) 2022-02-12 2023-05-16 Globalfoundries U.S. Inc. PIC die and package with cover for multiple level and multiple depth connections of fibers to on-chip optical components

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2659148B1 (en) * 1990-03-01 1993-04-16 Commissariat Energie Atomique METHOD FOR CONNECTING BETWEEN AN OPTICAL FIBER AND AN OPTICAL MICROGUIDE.
EP0631159A1 (en) * 1993-06-18 1994-12-28 Siemens Aktiengesellschaft Coupling between a planar optical waveguide and an optical fibre and fabrication method for an appropiate planar waveguide
US5357593A (en) * 1993-10-12 1994-10-18 Alliedsignal Inc. Method of attaching optical fibers to opto-electronic integrated circuits on silicon substrates

Also Published As

Publication number Publication date
WO2002041507A2 (en) 2002-05-23
WO2002041507A3 (en) 2002-08-22

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