AU2002228897A1 - Semiconductor stripping composition containing 1,3-dicarbonyl compounds - Google Patents

Semiconductor stripping composition containing 1,3-dicarbonyl compounds

Info

Publication number: AU2002228897A1
Authority: AU; Australia
Prior art keywords: composition containing; stripping composition; dicarbonyl compounds; semiconductor; semiconductor stripping
Prior art date: 2000-12-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002228897A

Inventor

David Bernhard

Long Nguyen

Fatima Ma Seijo

William A. Wojtczak

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Advanced Technology Materials Inc

Original Assignee

Advanced Technology Materials Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-12-08

Filing date

2001-12-04

Publication date

2002-07-30

2001-12-04 Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc

2002-07-30 Publication of AU2002228897A1 publication Critical patent/AU2002228897A1/en

Status Abandoned legal-status Critical Current

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US09/732,370		2000-12-08

Publications (1)

Publication Number	Publication Date
AU2002228897A1 true AU2002228897A1 (en)	2002-07-30

Family

ID=

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