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AU2002222968A1 - Silica zeolite low-k dielectric thin films - Google Patents

Silica zeolite low-k dielectric thin films

Info

Publication number
AU2002222968A1
AU2002222968A1 AU2002222968A AU2296802A AU2002222968A1 AU 2002222968 A1 AU2002222968 A1 AU 2002222968A1 AU 2002222968 A AU2002222968 A AU 2002222968A AU 2296802 A AU2296802 A AU 2296802A AU 2002222968 A1 AU2002222968 A1 AU 2002222968A1
Authority
AU
Australia
Prior art keywords
thin films
dielectric thin
silica zeolite
zeolite low
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002222968A
Inventor
Zhengbao Wang
Yushan Yan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
University of California Berkeley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California, University of California Berkeley filed Critical University of California
Publication of AU2002222968A1 publication Critical patent/AU2002222968A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P14/6922—
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B37/00—Compounds having molecular sieve properties but not having base-exchange properties
    • C01B37/02—Crystalline silica-polymorphs, e.g. silicalites dealuminated aluminosilicate zeolites
    • H10P14/6529—
    • H10P14/6536—
    • H10P14/6544—
    • H10P14/6342—
    • H10P14/665—
    • H10P14/6686—
    • H10W20/071—
    • H10W20/072—
    • H10W20/46—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
AU2002222968A 2000-07-13 2001-07-06 Silica zeolite low-k dielectric thin films Abandoned AU2002222968A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US21810200P 2000-07-13 2000-07-13
US60218102 2000-07-13
US28862601P 2001-05-03 2001-05-03
US60288626 2001-05-03
PCT/US2001/021439 WO2002007191A2 (en) 2000-07-13 2001-07-06 Silica zeolite low-k dielectric thin films

Publications (1)

Publication Number Publication Date
AU2002222968A1 true AU2002222968A1 (en) 2002-01-30

Family

ID=26912568

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002222968A Abandoned AU2002222968A1 (en) 2000-07-13 2001-07-06 Silica zeolite low-k dielectric thin films

Country Status (4)

Country Link
US (2) US6573131B2 (en)
JP (1) JP2004504716A (en)
AU (1) AU2002222968A1 (en)
WO (1) WO2002007191A2 (en)

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US7109130B2 (en) * 2004-05-04 2006-09-19 California Institute Of Technology Zeolite films for low k applications
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US7179547B2 (en) * 2004-10-29 2007-02-20 The Regents Of The University Of California High aluminum zeolite coatings on corrodible metal surfaces
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CN1219700C (en) 1998-12-23 2005-09-21 贝特勒纪念学院 Mesoporous silica film from a solution containing a surfactant and methods of making same

Also Published As

Publication number Publication date
WO2002007191A2 (en) 2002-01-24
US20020134995A1 (en) 2002-09-26
US20020060364A1 (en) 2002-05-23
US6630696B2 (en) 2003-10-07
WO2002007191A3 (en) 2002-04-18
JP2004504716A (en) 2004-02-12
US6573131B2 (en) 2003-06-03

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