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AU2002220701A1 - Method and device for measuring properties of a sample - Google Patents

Method and device for measuring properties of a sample

Info

Publication number
AU2002220701A1
AU2002220701A1 AU2002220701A AU2070102A AU2002220701A1 AU 2002220701 A1 AU2002220701 A1 AU 2002220701A1 AU 2002220701 A AU2002220701 A AU 2002220701A AU 2070102 A AU2070102 A AU 2070102A AU 2002220701 A1 AU2002220701 A1 AU 2002220701A1
Authority
AU
Australia
Prior art keywords
sample
measuring properties
properties
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220701A
Inventor
Stephan Ia Barre
Jorge Lacayo-Pineda
Benno Orschel
Patrik Varadinek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2000156770 external-priority patent/DE10056770A1/en
Priority claimed from DE2000156768 external-priority patent/DE10056768B4/en
Application filed by Individual filed Critical Individual
Publication of AU2002220701A1 publication Critical patent/AU2002220701A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU2002220701A 2000-11-14 2001-11-13 Method and device for measuring properties of a sample Abandoned AU2002220701A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10056768.1 2000-11-14
DE2000156770 DE10056770A1 (en) 2000-11-14 2000-11-14 Sample characteristics measuring method has parameter-dependent measuring signals obtained from sample modulated before detection using known modulation parameters
DE10056770.3 2000-11-14
DE2000156768 DE10056768B4 (en) 2000-11-14 2000-11-14 Method and device for measuring properties of a sample with measurement signal modulation
PCT/EP2001/013129 WO2002040973A2 (en) 2000-11-14 2001-11-13 Method and device for measuring properties of a sample

Publications (1)

Publication Number Publication Date
AU2002220701A1 true AU2002220701A1 (en) 2002-05-27

Family

ID=26007676

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002220701A Abandoned AU2002220701A1 (en) 2000-11-14 2001-11-13 Method and device for measuring properties of a sample

Country Status (2)

Country Link
AU (1) AU2002220701A1 (en)
WO (1) WO2002040973A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY157737A (en) 2005-10-11 2016-07-15 Bt Imaging Pty Ltd Method and system for inspecting indirect bandgap semiconductor structure
DE102013209104A1 (en) 2013-05-16 2014-11-20 Carl Zeiss Microscopy Gmbh Apparatus and method for spectroscopic analysis

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652757A (en) * 1985-08-02 1987-03-24 At&T Technologies, Inc. Method and apparatus for optically determining defects in a semiconductor material
WO1992013265A1 (en) * 1991-01-24 1992-08-06 The University Of Maryland Method and apparatus for multi-dimensional phase fluorescence lifetime imaging
AU7779500A (en) * 1999-09-21 2001-04-24 Stephan La Barre Method and device for measuring the properties of a sample

Also Published As

Publication number Publication date
WO2002040973A3 (en) 2002-10-03
WO2002040973A2 (en) 2002-05-23

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