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AU2002220066A1 - Electrostatic/pneumatic actuators for active surfaces - Google Patents

Electrostatic/pneumatic actuators for active surfaces

Info

Publication number
AU2002220066A1
AU2002220066A1 AU2002220066A AU2006602A AU2002220066A1 AU 2002220066 A1 AU2002220066 A1 AU 2002220066A1 AU 2002220066 A AU2002220066 A AU 2002220066A AU 2006602 A AU2006602 A AU 2006602A AU 2002220066 A1 AU2002220066 A1 AU 2002220066A1
Authority
AU
Australia
Prior art keywords
film portion
post
flexible surface
electrodes
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220066A
Inventor
Cleopatra Cabuz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of AU2002220066A1 publication Critical patent/AU2002220066A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C13/00—Control systems or transmitting systems for actuating flying-control surfaces, lift-increasing flaps, air brakes, or spoilers
    • B64C13/24—Transmitting means
    • B64C13/38—Transmitting means with power amplification
    • B64C13/40—Transmitting means with power amplification using fluid pressure
    • B64C13/48—Transmitting means with power amplification using fluid pressure characterised by the fluid being gaseous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C21/00—Influencing air flow over aircraft surfaces by affecting boundary layer flow
    • B64C21/10—Influencing air flow over aircraft surfaces by affecting boundary layer flow using other surface properties, e.g. roughness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
    • B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C3/00—Wings
    • B64C3/38—Adjustment of complete wings or parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C3/00—Wings
    • B64C3/38—Adjustment of complete wings or parts thereof
    • B64C3/44—Varying camber
    • B64C3/46—Varying camber by inflatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
    • F15B15/103—Characterised by the construction of the motor unit the motor being of diaphragm type using inflatable bodies that contract when fluid pressure is applied, e.g. pneumatic artificial muscles or McKibben-type actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/10—Influencing flow of fluids around bodies of solid material
    • F15D1/12—Influencing flow of fluids around bodies of solid material by influencing the boundary layer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/10—Drag reduction

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Micromachines (AREA)
  • Actuator (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Lock And Its Accessories (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

An actuator device controlling the shape of a flexible surface having a quasi-continuum in a plurality of locations. The device includes a plurality of individual cells arranged in an array for contact with the flexible surface. The cells comprise a cell body having an upper film portion and a lower film portion and an open central portion. The upper film portion is in contact with the flexible surface. A post is mounted in the open central portion and fixedly attached to the upper film portion and the lower film portion, the post defining a vertical axis of movement. The upper and lower film portions have electrodes mounted thereon respectively, positioned on the face of the upper and lower film portions and facing each other. A central diaphragm has electrodes on its outer surfaces and an open central portion surrounding the post A power supply operably connected to the electrodes for causing selective cooperative electrostatic activation between them to move the post along the vertical axis to cause the upper film portion to move that portion of the flexible surface in which the upper film portion is in contact. In a preferred embodiment, the cell body has a circular cross section so that the post moves vertically upward and downward to raise or lower the portion of the flexible surface in contact with the upper film portion upon application of electrostatic potential between the electrodes.
AU2002220066A 2000-11-03 2001-11-01 Electrostatic/pneumatic actuators for active surfaces Abandoned AU2002220066A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/706,051 US6358021B1 (en) 1998-12-29 2000-11-03 Electrostatic actuators for active surfaces
US09706051 2000-11-03
PCT/US2001/045473 WO2002037661A1 (en) 2000-11-03 2001-11-01 Electrostatic/pneumatic actuators for active surfaces

Publications (1)

Publication Number Publication Date
AU2002220066A1 true AU2002220066A1 (en) 2002-05-15

Family

ID=24836024

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002220066A Abandoned AU2002220066A1 (en) 2000-11-03 2001-11-01 Electrostatic/pneumatic actuators for active surfaces

Country Status (7)

Country Link
US (1) US6358021B1 (en)
EP (1) EP1332547B1 (en)
AT (1) ATE319219T1 (en)
AU (1) AU2002220066A1 (en)
CA (1) CA2427822A1 (en)
DE (1) DE60117611T2 (en)
WO (1) WO2002037661A1 (en)

Families Citing this family (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7123216B1 (en) * 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6545384B1 (en) * 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (en) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interference modulator and its manufacturing method
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
WO2001063738A2 (en) * 2000-02-23 2001-08-30 Sri International Electroactive polymer thermal electric generators
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US6794119B2 (en) * 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7008193B2 (en) * 2002-05-13 2006-03-07 The Regents Of The University Of Michigan Micropump assembly for a microgas chromatograph and the like
US6679611B2 (en) 2002-06-14 2004-01-20 Lockheed Martin Corporation Adaptive, aluminized Mylar mirror
US6938310B2 (en) * 2002-08-26 2005-09-06 Eastman Kodak Company Method of making a multi-layer micro-electromechanical electrostatic actuator for producing drop-on-demand liquid emission devices
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US20070042154A1 (en) * 2003-04-08 2007-02-22 Seagate Technology Llc Self-assembled monolayer enhanced DLC coatings
US7746600B2 (en) * 2003-04-08 2010-06-29 Seagate Technology Llc Encapsulant for a disc drive component
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
US20050067919A1 (en) * 2003-09-30 2005-03-31 Horning Robert D. Polymer actuator having a circular unit cell
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7154362B2 (en) * 2003-11-12 2006-12-26 Honeywell International, Inc. Robotic member
DE102004011030B4 (en) * 2004-03-04 2006-04-13 Siemens Ag Cover with integrated polymer actuator for deformation of the same
US7476327B2 (en) * 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
TWI233916B (en) * 2004-07-09 2005-06-11 Prime View Int Co Ltd A structure of a micro electro mechanical system
EP1779173A1 (en) * 2004-07-29 2007-05-02 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7554714B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7630119B2 (en) * 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7564612B2 (en) * 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7936497B2 (en) * 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7321456B2 (en) * 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7527995B2 (en) * 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7302157B2 (en) * 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7719500B2 (en) * 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7304784B2 (en) * 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
BRPI0612997A2 (en) * 2005-07-22 2010-12-14 Qualcomm Inc MEM devices and their manufacturing methods
KR20080040715A (en) * 2005-07-22 2008-05-08 콸콤 인코포레이티드 Supporting structures for MEMS devices and methods thereof
WO2007013939A1 (en) 2005-07-22 2007-02-01 Qualcomm Incorporated Support structure for mems device and methods therefor
US7438030B1 (en) 2005-08-26 2008-10-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actuator operated microvalves
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
DE102005052930B4 (en) * 2005-11-03 2018-05-30 Airbus Defence and Space GmbH Method and device for influencing the flow
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US20070188582A1 (en) * 2006-02-15 2007-08-16 Honeywell International Inc. Electrostatic actuator with charge control surface
US20070196673A1 (en) * 2006-02-17 2007-08-23 Seagate Technology Llc Lubricative and protective thin film
US7550810B2 (en) * 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) * 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7385744B2 (en) * 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7527998B2 (en) * 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US20080043315A1 (en) * 2006-08-15 2008-02-21 Cummings William J High profile contacts for microelectromechanical systems
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US20080180783A1 (en) * 2007-01-25 2008-07-31 Li-Ming Wang Critical dimension control for photolithography for microelectromechanical systems devices
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
JP5602626B2 (en) 2007-06-29 2014-10-08 アーティフィシャル マッスル，インク． Electroactive polymer transducer for sensory feedback applications
US8068268B2 (en) * 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
DE102008017963B4 (en) * 2008-04-08 2016-10-06 Airbus Defence and Space GmbH Flow control device
EP2239793A1 (en) 2009-04-11 2010-10-13 Bayer MaterialScience AG Electrically switchable polymer film structure and use thereof
EP2556403A1 (en) 2010-04-09 2013-02-13 Qualcomm Mems Technologies, Inc. Mechanical layer of an electromechanical device and methods of forming the same
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
KR20140019801A (en) 2011-03-22 2014-02-17 바이엘 인텔렉쳐 프로퍼티 게엠베하 Electroactive polymer actuator lenticular system
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
EP2828901B1 (en) 2012-03-21 2017-01-04 Parker Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
WO2013192143A1 (en) 2012-06-18 2013-12-27 Bayer Intellectual Property Gmbh Stretch frame for stretching process
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
GB201420644D0 (en) * 2014-11-20 2015-01-07 Technion Res & Dev Foundation Solid-liquid composite structures
US9714057B2 (en) 2015-05-08 2017-07-25 Paccar Inc Pneumatically actuated air control devices and methods
GB2554470A (en) 2016-09-26 2018-04-04 Cirrus Logic Int Semiconductor Ltd MEMS device and process
FI20175691A1 (en) 2017-07-14 2019-01-15 Senseg Oy Electrostatic actuator structure
BR112020022990A2 (en) 2018-05-11 2021-02-02 Matthews International Corporation microvalve and blasting set
CN112368149B (en) 2018-05-11 2023-01-13 马修斯国际公司 System and method for sealing a microvalve used in a jetting assembly
US11794476B2 (en) 2018-05-11 2023-10-24 Matthews International Corporation Micro-valves for use in jetting assemblies
US11639057B2 (en) 2018-05-11 2023-05-02 Matthews International Corporation Methods of fabricating micro-valves and jetting assemblies including such micro-valves
WO2019215672A1 (en) 2018-05-11 2019-11-14 Matthews International Corporation Systems and methods for controlling operation of micro-valves for use in jetting assemblies
CN110726002B (en) * 2019-10-22 2021-08-06 中国计量大学 Microfluidic Negative Pressure Driven Normally Open Microvalve
AU2020376904A1 (en) 2019-11-01 2022-06-23 Matthews International Corporation Non-contact deposition systems including jetting assemblies
US11453482B2 (en) * 2020-06-10 2022-09-27 United States Of America As Represented By The Secretary Of The Navy Vehicle with surface array of transducers controlling drag
CN113232008B (en) * 2021-05-15 2023-03-14 吉林大学威海仿生研究院 Unrestraint hydraulic pressure enlargies static self-driven roll formula robot
US12296944B2 (en) * 2022-04-19 2025-05-13 The Texas A&M University System Systems and methods for producing traveling waves along surfaces exposed to supersonic fluid flows

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4119955C2 (en) * 1991-06-18 2000-05-31 Danfoss As Miniature actuator
US5901939A (en) * 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces

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CA2427822A1 (en) 2002-05-10
EP1332547A1 (en) 2003-08-06
WO2002037661A1 (en) 2002-05-10
ATE319219T1 (en) 2006-03-15
DE60117611T2 (en) 2006-12-21
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US6358021B1 (en) 2002-03-19
DE60117611D1 (en) 2006-04-27

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