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AU2002219847A1 - Optical method and apparatus for inspecting large area planar objects - Google Patents

Optical method and apparatus for inspecting large area planar objects

Info

Publication number
AU2002219847A1
AU2002219847A1 AU2002219847A AU1984702A AU2002219847A1 AU 2002219847 A1 AU2002219847 A1 AU 2002219847A1 AU 2002219847 A AU2002219847 A AU 2002219847A AU 1984702 A AU1984702 A AU 1984702A AU 2002219847 A1 AU2002219847 A1 AU 2002219847A1
Authority
AU
Australia
Prior art keywords
large area
optical method
planar objects
area planar
inspecting large
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002219847A
Inventor
Patrick D. Kinney
Nagaraja P. Rao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Real Time Metrology Inc
Original Assignee
Real Time Metrology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Real Time Metrology Inc filed Critical Real Time Metrology Inc
Publication of AU2002219847A1 publication Critical patent/AU2002219847A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU2002219847A 2000-11-15 2001-11-14 Optical method and apparatus for inspecting large area planar objects Abandoned AU2002219847A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24900000P 2000-11-15 2000-11-15
US60249000 2000-11-15
US29766001P 2001-06-12 2001-06-12
US60297660 2001-06-12
PCT/US2001/043997 WO2002040970A1 (en) 2000-11-15 2001-11-14 Optical method and apparatus for inspecting large area planar objects

Publications (1)

Publication Number Publication Date
AU2002219847A1 true AU2002219847A1 (en) 2002-05-27

Family

ID=26939743

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002219847A Abandoned AU2002219847A1 (en) 2000-11-15 2001-11-14 Optical method and apparatus for inspecting large area planar objects

Country Status (3)

Country Link
US (1) US6630996B2 (en)
AU (1) AU2002219847A1 (en)
WO (1) WO2002040970A1 (en)

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