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AU2002259294A1 - Method for fabricating waveguides - Google Patents

Method for fabricating waveguides

Info

Publication number
AU2002259294A1
AU2002259294A1 AU2002259294A AU2002259294A AU2002259294A1 AU 2002259294 A1 AU2002259294 A1 AU 2002259294A1 AU 2002259294 A AU2002259294 A AU 2002259294A AU 2002259294 A AU2002259294 A AU 2002259294A AU 2002259294 A1 AU2002259294 A1 AU 2002259294A1
Authority
AU
Australia
Prior art keywords
fabricating waveguides
waveguides
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002259294A
Inventor
Dan Maydan
Arkadii V. Samoilov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2002259294A1 publication Critical patent/AU2002259294A1/en
Abandoned legal-status Critical Current

Links

AU2002259294A 2001-05-24 2002-05-24 Method for fabricating waveguides Abandoned AU2002259294A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/866,172 2001-05-24

Publications (1)

Publication Number Publication Date
AU2002259294A1 true AU2002259294A1 (en) 2002-12-03

Family

ID=

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