AU2002251666A1 - Micromachined torsional mirror unit for optical switching and fabrication method therefor - Google Patents

Micromachined torsional mirror unit for optical switching and fabrication method therefor

Info

Publication number: AU2002251666A1
Authority: AU; Australia
Prior art keywords: method therefor; fabrication method; mirror unit; optical switching; torsional mirror
Prior art date: 2002-03-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002251666A

Other versions

AU2002251666A8 (en

Inventor

Nicolaas F. De Rooij

Wilfried Noell

Xuechuan Shan

Zhenfeng Wang

Zhiping Wang

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Universite de Neuchatel

Singapore Institute of Manufacturing Technology

Original Assignee

Singapore Institute of Manufacturing Technology

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-03-30

Filing date

2002-03-30

Publication date

2003-10-27

2002-03-30 Application filed by Singapore Institute of Manufacturing Technology filed Critical Singapore Institute of Manufacturing Technology

2003-10-27 Publication of AU2002251666A1 publication Critical patent/AU2002251666A1/en

2003-10-27 Publication of AU2002251666A8 publication Critical patent/AU2002251666A8/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0054—For holding or placing an element in a given position
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/033—Comb drives
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/056—Rotation in a plane parallel to the substrate
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Micromachines (AREA)

AU2002251666A 2002-03-30 2002-03-30 Micromachined torsional mirror unit for optical switching and fabrication method therefor Abandoned AU2002251666A1 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/SG2002/000051 WO2003086954A1 (en)	2002-03-30	2002-03-30	Micromachined torsional mirror unit for optical switching and fabrication method therefor

Publications (2)

Publication Number	Publication Date
AU2002251666A1 true AU2002251666A1 (en)	2003-10-27
AU2002251666A8 AU2002251666A8 (en)	2003-10-27

Family

ID=29247022

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002251666A Abandoned AU2002251666A1 (en)	2002-03-30	2002-03-30	Micromachined torsional mirror unit for optical switching and fabrication method therefor

Country Status (2)

Country	Link
AU (1)	AU2002251666A1 (en)
WO (1)	WO2003086954A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP1398766A3 (en) *	2002-08-13	2005-08-17	Lg Electronics Inc.	Micro-actuator, manufacturing method thereof, optical pickup head of optical recording/reproducing apparatus with micro-actuator and fabrication method thereof
EP1591824B1 (en) *	2004-04-26	2012-05-09	Panasonic Corporation	Microactuator
CN109734044B (en) *	2019-01-09	2021-08-24	杭州电子科技大学	Self-propelled micro impact hammer
CN109761185B (en) *	2019-01-25	2020-09-29	山东大学	MEMS driver based on zipper comb teeth and working method thereof
CN111943127B (en) *	2020-07-10	2024-01-05	瑞声科技（南京）有限公司	Comb tooth structure, preparation method thereof and microphone

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6301403B1 (en) *	1996-07-30	2001-10-09	Iolon, Inc.	Optical microswitch with rotary electrostatic microactuator
GB0020427D0 (en) *	2000-08-18	2000-10-04	Kymata Ltd	Moem device and fabrication method

2002
- 2002-03-30 AU AU2002251666A patent/AU2002251666A1/en not_active Abandoned
- 2002-03-30 WO PCT/SG2002/000051 patent/WO2003086954A1/en not_active Ceased

Also Published As

Publication number	Publication date
WO2003086954A1 (en)	2003-10-23
AU2002251666A8 (en)	2003-10-27

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Legal Events

Date	Code	Title	Description
2004-12-16	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
2005-08-18	TH	Corrigenda	Free format text: IN VOL 17, NO 48, PAGE(S) 16572 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY, APPLICATION NO. 2002251666, UNDER INID (71) CORRECT THE NAME TO READ SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY; UNIVERSITY OF NEUCHATEL