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AU2002244284A1 - System and method for chemical mechanical polishing using multiple small polishing - Google Patents

System and method for chemical mechanical polishing using multiple small polishing

Info

Publication number
AU2002244284A1
AU2002244284A1 AU2002244284A AU2002244284A AU2002244284A1 AU 2002244284 A1 AU2002244284 A1 AU 2002244284A1 AU 2002244284 A AU2002244284 A AU 2002244284A AU 2002244284 A AU2002244284 A AU 2002244284A AU 2002244284 A1 AU2002244284 A1 AU 2002244284A1
Authority
AU
Australia
Prior art keywords
polishing
chemical mechanical
multiple small
mechanical polishing
small polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002244284A
Inventor
In-Kwon Jeong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oriol Inc
Original Assignee
Oriol Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oriol Inc filed Critical Oriol Inc
Publication of AU2002244284A1 publication Critical patent/AU2002244284A1/en
Abandoned legal-status Critical Current

Links

AU2002244284A 2001-03-15 2002-03-11 System and method for chemical mechanical polishing using multiple small polishing Abandoned AU2002244284A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/810,909 2001-03-15

Publications (1)

Publication Number Publication Date
AU2002244284A1 true AU2002244284A1 (en) 2002-10-03

Family

ID=

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