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AU2002243240A1 - Precision sub-pixel alignment technique - Google Patents

Precision sub-pixel alignment technique

Info

Publication number
AU2002243240A1
AU2002243240A1 AU2002243240A AU2002243240A AU2002243240A1 AU 2002243240 A1 AU2002243240 A1 AU 2002243240A1 AU 2002243240 A AU2002243240 A AU 2002243240A AU 2002243240 A AU2002243240 A AU 2002243240A AU 2002243240 A1 AU2002243240 A1 AU 2002243240A1
Authority
AU
Australia
Prior art keywords
alignment technique
pixel alignment
precision sub
precision
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002243240A
Inventor
Christopher G. Talbot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of AU2002243240A1 publication Critical patent/AU2002243240A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU2002243240A 2001-11-21 2001-11-21 Precision sub-pixel alignment technique Abandoned AU2002243240A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2001/044196 WO2003046528A1 (en) 2001-11-21 2001-11-21 Precision sub-pixel alignment technique

Publications (1)

Publication Number Publication Date
AU2002243240A1 true AU2002243240A1 (en) 2003-06-10

Family

ID=21743024

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002243240A Abandoned AU2002243240A1 (en) 2001-11-21 2001-11-21 Precision sub-pixel alignment technique

Country Status (2)

Country Link
AU (1) AU2002243240A1 (en)
WO (1) WO2003046528A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102409943B1 (en) * 2017-11-29 2022-06-16 삼성전자주식회사 Method of detecting a defect and apparatus for performing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845373A (en) * 1984-02-22 1989-07-04 Kla Instruments Corporation Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
US5067020A (en) * 1989-12-14 1991-11-19 Eastman Kodak Company Dual sensor film scanner having coupled optics and a video viewfinder
US5923430A (en) * 1993-06-17 1999-07-13 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers

Also Published As

Publication number Publication date
WO2003046528A1 (en) 2003-06-05

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase