AU2001237339A1 - Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods - Google Patents
Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methodsInfo
- Publication number
- AU2001237339A1 AU2001237339A1 AU2001237339A AU3733901A AU2001237339A1 AU 2001237339 A1 AU2001237339 A1 AU 2001237339A1 AU 2001237339 A AU2001237339 A AU 2001237339A AU 3733901 A AU3733901 A AU 3733901A AU 2001237339 A1 AU2001237339 A1 AU 2001237339A1
- Authority
- AU
- Australia
- Prior art keywords
- layer
- arrangements
- detection methods
- sample containers
- waveguide plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000001514 detection method Methods 0.000 title 1
- 239000004922 lacquer Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
- G01N21/7743—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure the reagent-coated grating coupling light in or out of the waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7776—Index
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
- G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Integrated Circuits (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Optical Measuring Cells (AREA)
Abstract
Production of a grid structure comprises covering a surface section of a substrate with a photo lacquer layer (10); arranging the surface section in the near field of a phase mask (14) which has been structured according to a laser two beam interference method; irradiating the phase mask under the Littrow angle (theta L) or not more than 5 [deg]; developing the lacquer; etching the surface section to form the grid structure and removing the photo lacquer layer. Preferred Features: The phase mask is a transparent substrate and comprises a structured layer which the grid structure optically inactivates. The structured layer is made of a chrome layer.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1602000 | 2000-01-27 | ||
| CH20000160/00 | 2000-01-27 | ||
| PCT/EP2001/000782 WO2001055691A2 (en) | 2000-01-27 | 2001-01-25 | Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001237339A1 true AU2001237339A1 (en) | 2001-08-07 |
Family
ID=4413835
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001237339A Abandoned AU2001237339A1 (en) | 2000-01-27 | 2001-01-25 | Waveguide plate and sensor platforms based thereon, arrangements of sample containers and detection methods |
| AU26608/01A Ceased AU782096B2 (en) | 2000-01-27 | 2001-01-26 | Method for producing a grid structure, an optical element, an evanescence field sensor plate, a microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelength |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU26608/01A Ceased AU782096B2 (en) | 2000-01-27 | 2001-01-26 | Method for producing a grid structure, an optical element, an evanescence field sensor plate, a microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelength |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US6510263B1 (en) |
| EP (3) | EP1250582A2 (en) |
| JP (2) | JP2003521684A (en) |
| KR (2) | KR100809802B1 (en) |
| CN (1) | CN1295530C (en) |
| AT (1) | ATE307348T1 (en) |
| AU (2) | AU2001237339A1 (en) |
| CA (1) | CA2399651A1 (en) |
| DK (1) | DK1250618T3 (en) |
| HK (1) | HK1048663A1 (en) |
| TW (1) | TWI292856B (en) |
| WO (2) | WO2001055691A2 (en) |
Families Citing this family (103)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6510263B1 (en) * | 2000-01-27 | 2003-01-21 | Unaxis Balzers Aktiengesellschaft | Waveguide plate and process for its production and microtitre plate |
| US6961490B2 (en) * | 2000-01-27 | 2005-11-01 | Unaxis-Balzers Aktiengesellschaft | Waveguide plate and process for its production and microtitre plate |
| US20030138208A1 (en) * | 2000-05-06 | 2003-07-24 | Michael Pawlak | Grating optical waveguide structure for multi-analyte determinations and the use thereof |
| US6917726B2 (en) * | 2001-09-27 | 2005-07-12 | Cornell Research Foundation, Inc. | Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes |
| EP2275802A1 (en) * | 2000-08-09 | 2011-01-19 | Artificial Sensing Instruments ASI AG | Waveguide grid structure and optical measuring assembly |
| FR2818287B1 (en) * | 2000-12-14 | 2003-01-17 | Commissariat Energie Atomique | SOLID SUPPORT FOR THE IMMOBILIZATION OF OLIGONUCLEOTIDES |
| US6903815B2 (en) * | 2001-11-22 | 2005-06-07 | Kabushiki Kaisha Toshiba | Optical waveguide sensor, device, system and method for glucose measurement |
| US7545494B2 (en) * | 2003-07-23 | 2009-06-09 | Bayer Technology Services Gmbh | Analytical system and method for analyzing nonlinear optical signals |
| US8083853B2 (en) | 2004-05-12 | 2011-12-27 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser hole design |
| US20050233092A1 (en) * | 2004-04-20 | 2005-10-20 | Applied Materials, Inc. | Method of controlling the uniformity of PECVD-deposited thin films |
| US7785672B2 (en) * | 2004-04-20 | 2010-08-31 | Applied Materials, Inc. | Method of controlling the film properties of PECVD-deposited thin films |
| US20060005771A1 (en) * | 2004-07-12 | 2006-01-12 | Applied Materials, Inc. | Apparatus and method of shaping profiles of large-area PECVD electrodes |
| US8074599B2 (en) * | 2004-05-12 | 2011-12-13 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser curvature |
| US8328939B2 (en) * | 2004-05-12 | 2012-12-11 | Applied Materials, Inc. | Diffuser plate with slit valve compensation |
| US7102824B2 (en) | 2004-05-13 | 2006-09-05 | The Boeing Company | Optical element for efficient sensing at large angles of incidence |
| EP1790202A4 (en) * | 2004-09-17 | 2013-02-20 | Pacific Biosciences California | Apparatus and method for analysis of molecules |
| US7170050B2 (en) | 2004-09-17 | 2007-01-30 | Pacific Biosciences Of California, Inc. | Apparatus and methods for optical analysis of molecules |
| US7429410B2 (en) * | 2004-09-20 | 2008-09-30 | Applied Materials, Inc. | Diffuser gravity support |
| US9050615B2 (en) | 2005-04-26 | 2015-06-09 | Bayer Intellectual Property Gmbh | Apparatus and method for coating substrates for analyte detection by means of an affinity assay method |
| US7588668B2 (en) | 2005-09-13 | 2009-09-15 | Applied Materials, Inc. | Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
| US20070056845A1 (en) * | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Multiple zone sputtering target created through conductive and insulation bonding |
| US20070056843A1 (en) * | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones |
| US7218802B1 (en) | 2005-11-30 | 2007-05-15 | Corning Incorporated | Low drift planar waveguide grating sensor and method for manufacturing same |
| US20070172745A1 (en) * | 2006-01-26 | 2007-07-26 | Smith Bruce W | Evanescent wave assist features for microlithography |
| US20070196863A1 (en) * | 2006-02-17 | 2007-08-23 | Hanson Technologies, Inc. | Prion protein detection |
| US8288157B2 (en) | 2007-09-12 | 2012-10-16 | Plc Diagnostics, Inc. | Waveguide-based optical scanning systems |
| US9423397B2 (en) | 2006-03-10 | 2016-08-23 | Indx Lifecare, Inc. | Waveguide-based detection system with scanning light source |
| US9976192B2 (en) | 2006-03-10 | 2018-05-22 | Ldip, Llc | Waveguide-based detection system with scanning light source |
| US9528939B2 (en) | 2006-03-10 | 2016-12-27 | Indx Lifecare, Inc. | Waveguide-based optical scanning systems |
| FR2902226B1 (en) * | 2006-06-12 | 2010-01-29 | Commissariat Energie Atomique | OPTICAL COMPONENT OPERATING IN NEAR FIELD TRANSMISSION |
| WO2008022097A2 (en) * | 2006-08-15 | 2008-02-21 | Api Nanofabrication And Research Corp. | Methods for forming patterned structures |
| JP5933910B2 (en) * | 2006-08-15 | 2016-06-15 | ポラリゼーション ソリューションズ エルエルシー | Polarizer thin film and manufacturing method thereof |
| US20080266549A1 (en) * | 2007-04-26 | 2008-10-30 | Ese Inc. | Chemical Constituent Analyzer |
| US20080317973A1 (en) * | 2007-06-22 | 2008-12-25 | White John M | Diffuser support |
| JP2009157353A (en) * | 2007-12-26 | 2009-07-16 | Nitto Denko Corp | Waveguide sensor for sensing |
| KR100919366B1 (en) * | 2007-12-28 | 2009-09-25 | 주식회사 하이닉스반도체 | Pattern formation method of semiconductor device |
| US8371705B2 (en) * | 2008-03-11 | 2013-02-12 | The United States Of America As Represented By The Secretary Of The Army | Mirrors and methods of making same |
| US20090231702A1 (en) | 2008-03-17 | 2009-09-17 | Qihong Wu | Optical films and methods of making the same |
| EP3425060B1 (en) | 2008-03-28 | 2021-10-27 | Pacific Biosciences of California, Inc. | Compositions and methods for nucleic acid sequencing |
| DE102008016652B3 (en) * | 2008-04-01 | 2009-10-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser beam producing device for use in interferometric measuring instrument, has polarization lattice consisting of overlay of spatial frequencies for production of laser ejected beams of different wavelength and orthogonal polarization |
| EP2110694B1 (en) | 2008-04-18 | 2013-08-14 | Sony DADC Austria AG | Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement |
| US8097082B2 (en) * | 2008-04-28 | 2012-01-17 | Applied Materials, Inc. | Nonplanar faceplate for a plasma processing chamber |
| GB2461026B (en) | 2008-06-16 | 2011-03-09 | Plc Diagnostics Inc | System and method for nucleic acids sequencing by phased synthesis |
| KR100989130B1 (en) | 2008-08-19 | 2010-10-20 | 삼성모바일디스플레이주식회사 | Laser irradiation apparatus and manufacturing method of organic light emitting display device using the same |
| US9778188B2 (en) | 2009-03-11 | 2017-10-03 | Industrial Technology Research Institute | Apparatus and method for detection and discrimination molecular object |
| US11726332B2 (en) | 2009-04-27 | 2023-08-15 | Digilens Inc. | Diffractive projection apparatus |
| WO2010127001A1 (en) | 2009-04-29 | 2010-11-04 | Plc Diagnostics Inc. | Waveguide-based detection system with scanning light source |
| US9482615B2 (en) | 2010-03-15 | 2016-11-01 | Industrial Technology Research Institute | Single-molecule detection system and methods |
| CN101846621B (en) * | 2010-05-17 | 2011-09-28 | 中国科学院长春光学精密机械与物理研究所 | Label-free leaky-mode optical fiber evanescent biosensor system and optical fiber manufacturing method |
| US8865078B2 (en) * | 2010-06-11 | 2014-10-21 | Industrial Technology Research Institute | Apparatus for single-molecule detection |
| WO2016020630A2 (en) | 2014-08-08 | 2016-02-11 | Milan Momcilo Popovich | Waveguide laser illuminator incorporating a despeckler |
| EP2618130A1 (en) * | 2012-01-17 | 2013-07-24 | F. Hoffmann-La Roche AG | Device for use in the detection of binding affinities |
| US9933684B2 (en) | 2012-11-16 | 2018-04-03 | Rockwell Collins, Inc. | Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration |
| US9360618B2 (en) * | 2013-02-21 | 2016-06-07 | Ofs Fitel, Llc | Index matched grating inscription |
| US10018566B2 (en) | 2014-02-28 | 2018-07-10 | Ldip, Llc | Partially encapsulated waveguide based sensing chips, systems and methods of use |
| JP6411080B2 (en) * | 2014-06-06 | 2018-10-24 | キヤノンメディカルシステムズ株式会社 | Optical measurement system |
| US9618693B2 (en) * | 2014-06-13 | 2017-04-11 | Infineon Technologies Ag | Liquid sensing systems and methods using a ring resonator sensor |
| WO2016042283A1 (en) | 2014-09-19 | 2016-03-24 | Milan Momcilo Popovich | Method and apparatus for generating input images for holographic waveguide displays |
| EP3245444B1 (en) | 2015-01-12 | 2021-09-08 | DigiLens Inc. | Environmentally isolated waveguide display |
| US9632226B2 (en) | 2015-02-12 | 2017-04-25 | Digilens Inc. | Waveguide grating device |
| US11181479B2 (en) | 2015-02-27 | 2021-11-23 | Ldip, Llc | Waveguide-based detection system with scanning light source |
| JP6530061B2 (en) * | 2015-04-24 | 2019-06-12 | 技術研究組合光電子融合基盤技術研究所 | Grating coupler |
| DE102015214414B4 (en) * | 2015-07-29 | 2020-10-22 | Berthold Technologies Gmbh & Co. Kg | Method and system for determining biological properties of samples |
| TWI541493B (en) * | 2015-09-01 | 2016-07-11 | 國立交通大學 | A dispersive element and a spectrometer thereof |
| EP3359999A1 (en) | 2015-10-05 | 2018-08-15 | Popovich, Milan Momcilo | Waveguide display |
| EP3548939A4 (en) | 2016-12-02 | 2020-11-25 | DigiLens Inc. | WAVE GUIDE DEVICE WITH UNIFORM OUTPUT LIGHTING |
| US10545346B2 (en) | 2017-01-05 | 2020-01-28 | Digilens Inc. | Wearable heads up displays |
| KR20250004154A (en) | 2018-01-08 | 2025-01-07 | 디지렌즈 인코포레이티드. | Methods for fabricating optical waveguides |
| CN115356905B (en) | 2018-01-08 | 2025-05-09 | 迪吉伦斯公司 | System and method for high throughput recording of holographic gratings in waveguide cells |
| US10914954B2 (en) * | 2018-08-03 | 2021-02-09 | Facebook Technologies, Llc | Rainbow reduction for waveguide displays |
| CN110885195A (en) * | 2018-09-10 | 2020-03-17 | 广州市辉乐医药科技有限公司 | Manufacturing method of anti-laser glasses |
| US11131929B2 (en) | 2018-11-07 | 2021-09-28 | Waymo Llc | Systems and methods that utilize angled photolithography for manufacturing light guide elements |
| US20200225471A1 (en) | 2019-01-14 | 2020-07-16 | Digilens Inc. | Holographic Waveguide Display with Light Control Layer |
| WO2020163524A1 (en) | 2019-02-05 | 2020-08-13 | Digilens Inc. | Methods for compensating for optical surface nonuniformity |
| US20220283377A1 (en) | 2019-02-15 | 2022-09-08 | Digilens Inc. | Wide Angle Waveguide Display |
| KR20250150160A (en) | 2019-02-15 | 2025-10-17 | 디지렌즈 인코포레이티드. | Methods and apparatuses for providing a holographic waveguide display using integrated gratings |
| CN113811803A (en) | 2019-03-12 | 2021-12-17 | 奇跃公司 | Waveguide with high refractive index material and method of making the same |
| WO2020185832A1 (en) | 2019-03-12 | 2020-09-17 | Magic Leap, Inc. | Method of fabricating display device having patterned lithium-based transition metal oxide |
| CA3136670C (en) * | 2019-04-28 | 2024-04-09 | Leia Inc. | Method of fabricating diffractive backlight |
| CN114207492A (en) | 2019-06-07 | 2022-03-18 | 迪吉伦斯公司 | Waveguide with transmission grating and reflection grating and method for producing the same |
| WO2021041949A1 (en) | 2019-08-29 | 2021-03-04 | Digilens Inc. | Evacuating bragg gratings and methods of manufacturing |
| US11131934B2 (en) | 2019-10-29 | 2021-09-28 | Waymo Llc | Non-telecentric light guide elements |
| DE102019134172A1 (en) * | 2019-12-12 | 2021-06-17 | Dr. Johannes Heidenhain Gmbh | Device and method for coupling light with different wavelengths into a waveguide |
| KR102389546B1 (en) * | 2020-04-22 | 2022-04-22 | 삼성전자주식회사 | Method of fabrication and control of nanostructure array by angle-resolved exposure in proximity-field nanopatterning |
| WO2021233877A1 (en) * | 2020-05-18 | 2021-11-25 | Interdigital Ce Patent Holdings, Sas | High-uniformity high refractive index material transmissive and reflective diffraction gratings |
| US11760170B2 (en) | 2020-08-20 | 2023-09-19 | Denso International America, Inc. | Olfaction sensor preservation systems and methods |
| US11813926B2 (en) | 2020-08-20 | 2023-11-14 | Denso International America, Inc. | Binding agent and olfaction sensor |
| US11932080B2 (en) | 2020-08-20 | 2024-03-19 | Denso International America, Inc. | Diagnostic and recirculation control systems and methods |
| US12251991B2 (en) | 2020-08-20 | 2025-03-18 | Denso International America, Inc. | Humidity control for olfaction sensors |
| US11636870B2 (en) | 2020-08-20 | 2023-04-25 | Denso International America, Inc. | Smoking cessation systems and methods |
| US12017506B2 (en) | 2020-08-20 | 2024-06-25 | Denso International America, Inc. | Passenger cabin air control systems and methods |
| US12377711B2 (en) | 2020-08-20 | 2025-08-05 | Denso International America, Inc. | Vehicle feature control systems and methods based on smoking |
| US11828210B2 (en) | 2020-08-20 | 2023-11-28 | Denso International America, Inc. | Diagnostic systems and methods of vehicles using olfaction |
| US12269315B2 (en) | 2020-08-20 | 2025-04-08 | Denso International America, Inc. | Systems and methods for measuring and managing odor brought into rental vehicles |
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| FR3114169B1 (en) | 2020-09-11 | 2023-06-23 | St Microelectronics Crolles 2 Sas | Optical filter and corresponding method of manufacture |
| CN114167534A (en) * | 2020-09-11 | 2022-03-11 | 意法半导体有限公司 | Optical filter and corresponding manufacturing method |
| US12259552B2 (en) * | 2020-12-17 | 2025-03-25 | Google Llc | Spatial variance along waveguide incoupler |
| US12399326B2 (en) | 2021-01-07 | 2025-08-26 | Digilens Inc. | Grating structures for color waveguides |
| WO2022187870A1 (en) | 2021-03-05 | 2022-09-09 | Digilens Inc. | Evacuated periotic structures and methods of manufacturing |
| US20240201456A1 (en) * | 2021-04-30 | 2024-06-20 | Magic Leap, Inc. | Thin illumination layer waveguide and methods of fabrication |
| CN113671692A (en) * | 2021-08-27 | 2021-11-19 | 北京润和微光科技有限公司 | Method for preparing flat-top light spot shaping element, element and laser processing equipment |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60241287A (en) * | 1984-05-16 | 1985-11-30 | Nec Corp | Manufacture of high-density lattice pattern |
| JPS61156003A (en) | 1984-12-27 | 1986-07-15 | Sharp Corp | Production of diffraction grating |
| DE3680999D1 (en) * | 1985-05-29 | 1991-09-26 | Artificial Sensing Instr Asi A | OPTICAL SENSOR FOR SELECTIVE DETECTION OF SUBSTANCES AND DETECTION OF REFRIGERATION CHANGES IN MEASURING SUBSTANCES. |
| US5004673A (en) | 1987-04-20 | 1991-04-02 | Environmental Research Institute Of Michigan | Method of manufacturing surface relief patterns of variable cross-sectional geometry |
| JPH0196605A (en) * | 1987-10-08 | 1989-04-14 | Nec Corp | Wavelength multiplex branching filter element |
| JPH02262366A (en) * | 1989-04-03 | 1990-10-25 | Canon Inc | Photodetector and semiconductor laser equipped with photodetector |
| US5082629A (en) * | 1989-12-29 | 1992-01-21 | The Board Of The University Of Washington | Thin-film spectroscopic sensor |
| DE59109246D1 (en) * | 1990-05-03 | 2003-04-03 | Hoffmann La Roche | Micro-optical sensor |
| ES2093133T3 (en) | 1991-04-12 | 1996-12-16 | Balzers Hochvakuum | PROCEDURE AND INSTALLATION FOR THE COATING OF AT LEAST ONE OBJECT. |
| EP0513755A3 (en) * | 1991-05-14 | 1994-05-18 | Canon Kk | A method for producing a diffraction grating |
| DE4228853C2 (en) | 1991-09-18 | 1993-10-21 | Schott Glaswerke | Optical waveguide with a planar or only slightly curved substrate and method for its preparation and use of such |
| JP2738623B2 (en) * | 1992-04-23 | 1998-04-08 | 三菱電機株式会社 | Method of forming diffraction grating |
| US5413884A (en) * | 1992-12-14 | 1995-05-09 | American Telephone And Telegraph Company | Grating fabrication using electron beam lithography |
| CH686747A5 (en) | 1993-04-01 | 1996-06-14 | Balzers Hochvakuum | An optical layer material. |
| GB9314991D0 (en) * | 1993-07-20 | 1993-09-01 | Sandoz Ltd | Mechanical device |
| CH688165A5 (en) * | 1993-07-26 | 1997-05-30 | Balzers Hochvakuum | A process for producing an optical waveguide and an optical waveguide produced afterwards |
| JPH0743511A (en) * | 1993-08-02 | 1995-02-14 | Matsushita Electric Ind Co Ltd | Method for manufacturing diffraction grating and method for manufacturing optical wavelength conversion element |
| US5959292A (en) * | 1994-05-27 | 1999-09-28 | Novartis Corporation | Process for detecting evanescently excited luminescence |
| US5501925A (en) * | 1994-05-27 | 1996-03-26 | Litel Instruments | High power masks and methods for manufacturing same |
| JPH0844042A (en) * | 1994-07-29 | 1996-02-16 | Olympus Optical Co Ltd | Transmittancee modulation type photomask and its production and production of optical element formed by using the same |
| CH693368A5 (en) * | 1994-12-09 | 2003-06-30 | Unaxis Balzers Ag | A method for producing a diffraction grating, the light guide member and the uses thereof. |
| US5814565A (en) * | 1995-02-23 | 1998-09-29 | University Of Utah Research Foundation | Integrated optic waveguide immunosensor |
| US5759744A (en) | 1995-02-24 | 1998-06-02 | University Of New Mexico | Methods and apparatus for lithography of sparse arrays of sub-micrometer features |
| JP2924707B2 (en) * | 1995-04-13 | 1999-07-26 | 日本電気株式会社 | Optical waveguide type fluorescent immunosensor and method of manufacturing the same |
| WO1996036892A1 (en) * | 1995-05-19 | 1996-11-21 | Cornell Research Foundation, Inc. | Cascaded self-induced holography |
| GB2302599B (en) * | 1995-06-20 | 1998-08-26 | Northern Telecom Ltd | Forming Bragg gratings in photosensitive optical waveguides |
| JP3236199B2 (en) * | 1995-08-25 | 2001-12-10 | 日本電気株式会社 | Planar optical waveguide type biochemical sensor |
| GB9602542D0 (en) * | 1996-02-08 | 1996-04-10 | Fisons Plc | Analytical device |
| JP3022300B2 (en) * | 1996-02-19 | 2000-03-15 | 日立電線株式会社 | Optical device formed with grating and Add / Drop filter using the same |
| US5786116A (en) * | 1997-02-14 | 1998-07-28 | Micron Technology, Inc. | Atom lithographic mask having diffraction grating aligned with primary mask pattern |
| US20020028390A1 (en) * | 1997-09-22 | 2002-03-07 | Mohammad A. Mazed | Techniques for fabricating and packaging multi-wavelength semiconductor laser array devices (chips) and their applications in system architectures |
| US5982963A (en) | 1997-12-15 | 1999-11-09 | University Of Southern California | Tunable nonlinearly chirped grating |
| US6013396A (en) * | 1998-10-30 | 2000-01-11 | Advanced Micro Devices, Inc. | Fabrication of chrome/phase grating phase shift mask by interferometric lithography |
| US6510263B1 (en) * | 2000-01-27 | 2003-01-21 | Unaxis Balzers Aktiengesellschaft | Waveguide plate and process for its production and microtitre plate |
-
2000
- 2000-02-03 US US09/497,129 patent/US6510263B1/en not_active Expired - Lifetime
-
2001
- 2001-01-20 TW TW090101579A patent/TWI292856B/en not_active IP Right Cessation
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- 2001-01-25 AU AU2001237339A patent/AU2001237339A1/en not_active Abandoned
- 2001-01-25 EP EP01909687A patent/EP1250582A2/en not_active Withdrawn
- 2001-01-25 JP JP2001555783A patent/JP2003521684A/en active Pending
- 2001-01-26 HK HK03100870.2A patent/HK1048663A1/en unknown
- 2001-01-26 CA CA002399651A patent/CA2399651A1/en not_active Abandoned
- 2001-01-26 EP EP05017720A patent/EP1605288A1/en not_active Withdrawn
- 2001-01-26 CN CNB018070884A patent/CN1295530C/en not_active Expired - Fee Related
- 2001-01-26 AT AT01901098T patent/ATE307348T1/en active
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- 2001-01-26 KR KR1020027009535A patent/KR100809802B1/en not_active Expired - Fee Related
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Also Published As
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|---|---|
| EP1250618B1 (en) | 2005-10-19 |
| EP1250582A2 (en) | 2002-10-23 |
| WO2001055691A3 (en) | 2002-03-14 |
| KR100809802B1 (en) | 2008-03-04 |
| WO2001055691A2 (en) | 2001-08-02 |
| US6873764B2 (en) | 2005-03-29 |
| TWI292856B (en) | 2008-01-21 |
| KR100966984B1 (en) | 2010-06-30 |
| WO2001055760A1 (en) | 2001-08-02 |
| DK1250618T3 (en) | 2006-03-06 |
| AU2660801A (en) | 2001-08-07 |
| EP1605288A1 (en) | 2005-12-14 |
| HK1048663A1 (en) | 2003-04-11 |
| CN1419658A (en) | 2003-05-21 |
| AU782096B2 (en) | 2005-06-30 |
| US6510263B1 (en) | 2003-01-21 |
| KR20020073511A (en) | 2002-09-26 |
| EP1250618A1 (en) | 2002-10-23 |
| JP2003521684A (en) | 2003-07-15 |
| US20030091284A1 (en) | 2003-05-15 |
| CA2399651A1 (en) | 2001-08-02 |
| ATE307348T1 (en) | 2005-11-15 |
| JP2003521728A (en) | 2003-07-15 |
| KR20070118191A (en) | 2007-12-13 |
| CN1295530C (en) | 2007-01-17 |
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