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AU2001214886A1 - Mems optical switch and method of manufacture - Google Patents

Mems optical switch and method of manufacture

Info

Publication number
AU2001214886A1
AU2001214886A1 AU2001214886A AU1488601A AU2001214886A1 AU 2001214886 A1 AU2001214886 A1 AU 2001214886A1 AU 2001214886 A AU2001214886 A AU 2001214886A AU 1488601 A AU1488601 A AU 1488601A AU 2001214886 A1 AU2001214886 A1 AU 2001214886A1
Authority
AU
Australia
Prior art keywords
manufacture
optical switch
mems optical
mems
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001214886A
Inventor
James G. Couillard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of AU2001214886A1 publication Critical patent/AU2001214886A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001214886A 2000-01-14 2000-11-14 Mems optical switch and method of manufacture Abandoned AU2001214886A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09483669 2000-01-14
US09/483,669 US6360036B1 (en) 2000-01-14 2000-01-14 MEMS optical switch and method of manufacture
PCT/US2000/031245 WO2001051973A1 (en) 2000-01-14 2000-11-14 Mems optical switch and method of manufacture

Publications (1)

Publication Number Publication Date
AU2001214886A1 true AU2001214886A1 (en) 2001-07-24

Family

ID=23921026

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001214886A Abandoned AU2001214886A1 (en) 2000-01-14 2000-11-14 Mems optical switch and method of manufacture

Country Status (6)

Country Link
US (1) US6360036B1 (en)
JP (1) JP2003519821A (en)
CN (1) CN1423755A (en)
AU (1) AU2001214886A1 (en)
CA (1) CA2397238A1 (en)
WO (1) WO2001051973A1 (en)

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US6747785B2 (en) * 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
US7148603B1 (en) * 2002-11-27 2006-12-12 Sandia Corporation Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
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US6853765B1 (en) 2003-03-31 2005-02-08 The United States Of America As Represented By The Secretary Of The Navy MEMS optical switch with thermal actuator
CN1317815C (en) * 2004-03-18 2007-05-23 清华大学 A Micro Piezoelectric Actuator for MEMS
US6909819B1 (en) * 2004-04-16 2005-06-21 Capella Photonics, Inc. System and method for canceling disturbance MEMS devices
JP4408266B2 (en) 2004-04-22 2010-02-03 日本碍子株式会社 Microswitch and manufacturing method thereof
US20060152830A1 (en) * 2005-01-12 2006-07-13 John Farah Polyimide deformable mirror
CN100439234C (en) * 2005-12-29 2008-12-03 中国科学院上海微系统与信息技术研究所 Manufacturing method of anchor in xenon difluoride gas corrosion process
US7532093B1 (en) 2006-02-06 2009-05-12 The United States Of America As Represented By The Secretary Of The Army RF MEMS series switch using piezoelectric actuation and method of fabrication
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CN102540454B (en) * 2010-12-27 2013-08-14 上海丽恒光微电子科技有限公司 Optical switch and MEMS (micro-electromechanical system) display
CN103163672B (en) * 2011-12-19 2015-11-25 上海天马微电子有限公司 Pixel unit and display panel
CN102616731B (en) * 2012-03-27 2016-02-03 上海华虹宏力半导体制造有限公司 The manufacture method of MEMS
CN103048783A (en) * 2012-12-21 2013-04-17 无锡微奥科技有限公司 Thermally driven MEMS (Micro-Electro-Mechanical System) micromirror
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CN112740063B (en) * 2018-06-19 2024-07-16 加利福尼亚大学董事会 Beam steering system based on MEMS-actuated vertical coupler array
CN112444916B (en) * 2019-08-27 2024-02-02 新加坡国立大学 Multilayer waveguide device and method of manufacturing the same
CN110658584B (en) 2019-10-08 2020-08-14 浙江大学 Ultra-large bandwidth silicon-based waveguide MEMS optical switch
CN111446089B (en) * 2020-03-12 2022-04-26 上海集成电路研发中心有限公司 MEMS switch structure and manufacturing method
CN113740970A (en) * 2020-05-30 2021-12-03 华为技术有限公司 Grating and characteristic adjusting method and device thereof

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Also Published As

Publication number Publication date
CN1423755A (en) 2003-06-11
WO2001051973A1 (en) 2001-07-19
JP2003519821A (en) 2003-06-24
US6360036B1 (en) 2002-03-19
CA2397238A1 (en) 2001-07-19

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