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AU2001288054A1 - Optical sensor - Google Patents

Optical sensor

Info

Publication number
AU2001288054A1
AU2001288054A1 AU2001288054A AU8805401A AU2001288054A1 AU 2001288054 A1 AU2001288054 A1 AU 2001288054A1 AU 2001288054 A AU2001288054 A AU 2001288054A AU 8805401 A AU8805401 A AU 8805401A AU 2001288054 A1 AU2001288054 A1 AU 2001288054A1
Authority
AU
Australia
Prior art keywords
optical sensor
optical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001288054A
Inventor
Shunsuke Kurata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of AU2001288054A1 publication Critical patent/AU2001288054A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU2001288054A 2000-09-18 2001-09-17 Optical sensor Abandoned AU2001288054A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000282703 2000-09-18
JP2000-282703 2000-09-18
PCT/JP2001/008063 WO2002023123A1 (en) 2000-09-18 2001-09-17 Optical sensor

Publications (1)

Publication Number Publication Date
AU2001288054A1 true AU2001288054A1 (en) 2002-03-26

Family

ID=18767171

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001288054A Abandoned AU2001288054A1 (en) 2000-09-18 2001-09-17 Optical sensor

Country Status (7)

Country Link
US (1) US6710320B2 (en)
JP (1) JPWO2002023123A1 (en)
KR (1) KR20020054345A (en)
CN (1) CN1392949A (en)
AU (1) AU2001288054A1 (en)
TW (1) TW516083B (en)
WO (1) WO2002023123A1 (en)

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* Cited by examiner, † Cited by third party
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JP4118071B2 (en) * 2002-03-28 2008-07-16 株式会社ニデック Resist perimeter removal width inspection system
US20050086024A1 (en) * 2003-09-19 2005-04-21 Cyberoptics Semiconductor Inc. Semiconductor wafer location sensing via non contact methods
TWI276149B (en) * 2004-05-05 2007-03-11 Bobst Sa Method and device for detecting patterns on a substrate
JP2006226804A (en) * 2005-02-17 2006-08-31 Matsushita Electric Ind Co Ltd Inspection method of flat display panel
JP2006279823A (en) * 2005-03-30 2006-10-12 Fuji Photo Film Co Ltd Communication device for imaging apparatus
DE602006021785D1 (en) * 2005-12-06 2011-06-16 Shibaura Mechatronics Corp OBERFLÄCHENRAUHIGKEITSPRÜFER
TW200802666A (en) * 2006-04-03 2008-01-01 Rudolph Technologies Inc Wafer bevel inspection mechanism
KR20080015363A (en) 2006-08-14 2008-02-19 야마하 가부시키가이샤 Method and apparatus for inspecting wafers and semiconductor devices
TWI327258B (en) * 2006-12-29 2010-07-11 Au Optronics Corp Developing apparatus with macroscopic inspection
JP5448303B2 (en) 2007-03-29 2014-03-19 Ｊｆｅスチール株式会社 Roller misalignment measuring device
US8135206B2 (en) * 2007-05-02 2012-03-13 Emhart Glass S.A. Machine for inspecting glass containers
JP5078583B2 (en) * 2007-12-10 2012-11-21 インターナショナル・ビジネス・マシーンズ・コーポレーション Macro inspection device and macro inspection method
JP2009168615A (en) * 2008-01-16 2009-07-30 Denso Corp Visual inspection apparatus and visual inspection method
JP2010147113A (en) * 2008-12-17 2010-07-01 Disco Abrasive Syst Ltd Resin substrate processing apparatus
DE102010002954A1 (en) * 2010-03-17 2011-09-22 Linos Photonics Gmbh & Co. Kg Display system for displaying of information in vehicle, has light valve that is illuminated by light source and is provided for producing virtual picture
ES2375386B1 (en) * 2010-07-21 2012-09-27 Abengoa Solar New Technologies, S.A. PORTABLE REFLECTOMETER AND METHOD OF CHARACTERIZATION OF MIRRORS OF THERMOSOLAR POWER STATIONS.
US8570504B2 (en) * 2011-05-17 2013-10-29 Gii Acquisition, Llc Method and system for optically inspecting parts
US9721853B2 (en) * 2013-03-13 2017-08-01 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for forming a semiconductor device
JP2014174136A (en) * 2013-03-13 2014-09-22 Panasonic Corp Photodetector, spatial information detector
EP2967348B1 (en) * 2013-03-15 2022-03-23 Synaptive Medical Inc. Intelligent positioning system
CN109073565B (en) * 2016-02-03 2022-03-15 科磊股份有限公司 Wafer Defect Inspection and Review System
CN107168590B (en) * 2017-06-30 2023-07-07 成都成电光信科技股份有限公司 Surface-mounted composite infrared tube for touch screen
DE102019125127A1 (en) * 2019-09-18 2021-03-18 Mühlbauer Gmbh & Co. Kg Component handling, component inspection
US11609183B2 (en) * 2020-08-18 2023-03-21 Applied Materials, Inc. Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2165639B (en) * 1984-08-24 1988-01-27 Philips Electronic Associated Pyroelectric infra-red detector
JPS61273519A (en) * 1985-05-29 1986-12-03 Ricoh Co Ltd Original reader
JP2748175B2 (en) * 1990-01-31 1998-05-06 コニカ株式会社 Auto collimator
US5424838A (en) * 1993-03-01 1995-06-13 Siu; Bernard Microelectronics inspection system
JP3226618B2 (en) 1992-08-07 2001-11-05 トヨタ自動車株式会社 Iron-based sintered alloy for valve seat
JPH06293154A (en) * 1993-04-09 1994-10-21 Oki Electric Ind Co Ltd Electrophotographic printer with scanner
US5448649A (en) * 1994-05-24 1995-09-05 Chen; Wang S. Apparatus for imaging fingerprint or topographic relief pattern on the surface of an object
US5729024A (en) * 1995-05-08 1998-03-17 Ricoh Company, Ltd. Original edge detecting system and optical sensor
US5777321A (en) * 1996-01-29 1998-07-07 Hewlett-Packard Company Scanning device with non-contact optical components
JPH10267636A (en) * 1997-03-28 1998-10-09 New Kurieishiyon:Kk Method and apparatus for surface inspection
JPH1163913A (en) * 1997-08-15 1999-03-05 Nikon Corp Optical frequency domain reflected light distribution measuring device
JP4128254B2 (en) 1998-02-25 2008-07-30 オリンパス株式会社 Semiconductor wafer position detection apparatus and inspection apparatus
US6175107B1 (en) * 1998-05-27 2001-01-16 Owens-Brockway Glass Container Inc. Inspection of containers employing a single area array sensor and alternately strobed light sources
EP1001460B1 (en) 1998-10-15 2001-05-02 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Method and apparatus for detecting, monitoring and characterizing edge defects on semiconductor wafers

Also Published As

Publication number Publication date
US6710320B2 (en) 2004-03-23
TW516083B (en) 2003-01-01
WO2002023123A1 (en) 2002-03-21
JPWO2002023123A1 (en) 2004-01-22
CN1392949A (en) 2003-01-22
US20020153473A1 (en) 2002-10-24
KR20020054345A (en) 2002-07-06

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