AU2001281221A1 - Method of laminating a photoresist sheet to a substrate - Google Patents
Method of laminating a photoresist sheet to a substrateInfo
- Publication number
- AU2001281221A1 AU2001281221A1 AU2001281221A AU8122101A AU2001281221A1 AU 2001281221 A1 AU2001281221 A1 AU 2001281221A1 AU 2001281221 A AU2001281221 A AU 2001281221A AU 8122101 A AU8122101 A AU 8122101A AU 2001281221 A1 AU2001281221 A1 AU 2001281221A1
- Authority
- AU
- Australia
- Prior art keywords
- laminating
- substrate
- photoresist sheet
- photoresist
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000010030 laminating Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229920002120 photoresistant polymer Polymers 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Laminated Bodies (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22393500P | 2000-08-09 | 2000-08-09 | |
| US60/223,935 | 2000-08-09 | ||
| US09/924,742 | 2001-08-08 | ||
| US09/924,742 US20020048715A1 (en) | 2000-08-09 | 2001-08-08 | Photoresist adhesive and method |
| PCT/US2001/025045 WO2002012960A2 (en) | 2000-08-09 | 2001-08-09 | Method of laminating a photoresist sheet to a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001281221A1 true AU2001281221A1 (en) | 2002-02-18 |
Family
ID=26918261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001281221A Abandoned AU2001281221A1 (en) | 2000-08-09 | 2001-08-09 | Method of laminating a photoresist sheet to a substrate |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20020048715A1 (en) |
| EP (1) | EP1307784A2 (en) |
| AU (1) | AU2001281221A1 (en) |
| WO (1) | WO2002012960A2 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11342256B2 (en) | 2019-01-24 | 2022-05-24 | Applied Materials, Inc. | Method of fine redistribution interconnect formation for advanced packaging applications |
| IT201900006740A1 (en) * | 2019-05-10 | 2020-11-10 | Applied Materials Inc | SUBSTRATE STRUCTURING PROCEDURES |
| IT201900006736A1 (en) | 2019-05-10 | 2020-11-10 | Applied Materials Inc | PACKAGE MANUFACTURING PROCEDURES |
| US11931855B2 (en) | 2019-06-17 | 2024-03-19 | Applied Materials, Inc. | Planarization methods for packaging substrates |
| US11862546B2 (en) | 2019-11-27 | 2024-01-02 | Applied Materials, Inc. | Package core assembly and fabrication methods |
| US11257790B2 (en) | 2020-03-10 | 2022-02-22 | Applied Materials, Inc. | High connectivity device stacking |
| US11454884B2 (en) | 2020-04-15 | 2022-09-27 | Applied Materials, Inc. | Fluoropolymer stamp fabrication method |
| US11400545B2 (en) | 2020-05-11 | 2022-08-02 | Applied Materials, Inc. | Laser ablation for package fabrication |
| US11232951B1 (en) | 2020-07-14 | 2022-01-25 | Applied Materials, Inc. | Method and apparatus for laser drilling blind vias |
| US11676832B2 (en) | 2020-07-24 | 2023-06-13 | Applied Materials, Inc. | Laser ablation system for package fabrication |
| US11521937B2 (en) | 2020-11-16 | 2022-12-06 | Applied Materials, Inc. | Package structures with built-in EMI shielding |
| US11404318B2 (en) | 2020-11-20 | 2022-08-02 | Applied Materials, Inc. | Methods of forming through-silicon vias in substrates for advanced packaging |
| US11705365B2 (en) | 2021-05-18 | 2023-07-18 | Applied Materials, Inc. | Methods of micro-via formation for advanced packaging |
| US12183684B2 (en) | 2021-10-26 | 2024-12-31 | Applied Materials, Inc. | Semiconductor device packaging methods |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4349620A (en) * | 1979-06-15 | 1982-09-14 | E. I. Du Pont De Nemours And Company | Solvent developable photoresist film |
| DE3340154A1 (en) * | 1983-11-07 | 1985-05-15 | Basf Ag, 6700 Ludwigshafen | METHOD FOR PRODUCING IMAGERALLY STRUCTURED RESIST LAYERS AND DRY FILM RESIST SUITABLE FOR THIS METHOD |
| US4764449A (en) * | 1985-11-01 | 1988-08-16 | The Chromaline Corporation | Adherent sandblast photoresist laminate |
| US5415971A (en) * | 1993-04-02 | 1995-05-16 | The Chromaline Corporation | Photoresist laminate including photoimageable adhesive layer |
-
2001
- 2001-08-08 US US09/924,742 patent/US20020048715A1/en not_active Abandoned
- 2001-08-09 EP EP01959694A patent/EP1307784A2/en not_active Withdrawn
- 2001-08-09 WO PCT/US2001/025045 patent/WO2002012960A2/en not_active Ceased
- 2001-08-09 AU AU2001281221A patent/AU2001281221A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP1307784A2 (en) | 2003-05-07 |
| WO2002012960A8 (en) | 2003-11-20 |
| WO2002012960A2 (en) | 2002-02-14 |
| US20020048715A1 (en) | 2002-04-25 |
| WO2002012960A3 (en) | 2002-08-01 |
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