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AU2001275701A1 - Micromechanical devices - Google Patents

Micromechanical devices

Info

Publication number
AU2001275701A1
AU2001275701A1 AU2001275701A AU7570101A AU2001275701A1 AU 2001275701 A1 AU2001275701 A1 AU 2001275701A1 AU 2001275701 A AU2001275701 A AU 2001275701A AU 7570101 A AU7570101 A AU 7570101A AU 2001275701 A1 AU2001275701 A1 AU 2001275701A1
Authority
AU
Australia
Prior art keywords
micromechanical devices
micromechanical
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001275701A
Inventor
Stuart Crowther
Ian Thomas Flint
Gulam Mohammed Ismail
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
Marconi Applied Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Applied Technologies Ltd filed Critical Marconi Applied Technologies Ltd
Publication of AU2001275701A1 publication Critical patent/AU2001275701A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2001275701A 2000-07-28 2001-07-24 Micromechanical devices Abandoned AU2001275701A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0018520A GB2369436A (en) 2000-07-28 2000-07-28 Chemical sensing micro-mechanical cantilever
GB0018520 2000-07-28
PCT/GB2001/003331 WO2002010065A1 (en) 2000-07-28 2001-07-24 Micromechanical devices

Publications (1)

Publication Number Publication Date
AU2001275701A1 true AU2001275701A1 (en) 2002-02-13

Family

ID=9896494

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001275701A Abandoned AU2001275701A1 (en) 2000-07-28 2001-07-24 Micromechanical devices

Country Status (3)

Country Link
AU (1) AU2001275701A1 (en)
GB (1) GB2369436A (en)
WO (1) WO2002010065A1 (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762426A (en) * 1986-12-19 1988-08-09 Honeywell Inc. Remote passive temperature sensor
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US5374792A (en) * 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
US5618760A (en) * 1994-04-12 1997-04-08 The Board Of Trustees Of The Leland Stanford, Jr. University Method of etching a pattern on a substrate using a scanning probe microscope
US5771902A (en) * 1995-09-25 1998-06-30 Regents Of The University Of California Micromachined actuators/sensors for intratubular positioning/steering
US5563341A (en) * 1995-06-07 1996-10-08 Fenner; Ralph L. Vapor pressure sensor and method
DE19536228B4 (en) * 1995-09-28 2005-06-30 Infineon Technologies Ag Microelectronic integrated sensor and method of manufacturing the sensor
KR100207410B1 (en) * 1995-12-19 1999-07-15 전주범 Manufacturing method of optical path control device
WO1998050773A2 (en) * 1997-05-08 1998-11-12 University Of Minnesota Microcantilever biosensor
US5870007A (en) * 1997-06-16 1999-02-09 Roxburgh Ltd. Multi-dimensional physical actuation of microstructures
US6261494B1 (en) * 1998-10-22 2001-07-17 Northeastern University Method of forming plastically deformable microstructures

Also Published As

Publication number Publication date
GB2369436A (en) 2002-05-29
WO2002010065A1 (en) 2002-02-07
GB0018520D0 (en) 2000-09-13

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