AU2001275514A1 - Micromechanical device with damped microactuator - Google Patents
Micromechanical device with damped microactuatorInfo
- Publication number
- AU2001275514A1 AU2001275514A1 AU2001275514A AU7551401A AU2001275514A1 AU 2001275514 A1 AU2001275514 A1 AU 2001275514A1 AU 2001275514 A AU2001275514 A AU 2001275514A AU 7551401 A AU7551401 A AU 7551401A AU 2001275514 A1 AU2001275514 A1 AU 2001275514A1
- Authority
- AU
- Australia
- Prior art keywords
- microactuator
- damped
- micromechanical device
- micromechanical
- damped microactuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20955800P | 2000-06-06 | 2000-06-06 | |
| US60209558 | 2000-06-06 | ||
| PCT/US2001/040861 WO2001095468A1 (en) | 2000-06-06 | 2001-06-06 | Micromechanical device with damped microactuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001275514A1 true AU2001275514A1 (en) | 2001-12-17 |
Family
ID=22779237
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001265426A Abandoned AU2001265426A1 (en) | 2000-06-06 | 2001-06-06 | Damped micromechanical device and method for making same |
| AU2001275514A Abandoned AU2001275514A1 (en) | 2000-06-06 | 2001-06-06 | Micromechanical device with damped microactuator |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001265426A Abandoned AU2001265426A1 (en) | 2000-06-06 | 2001-06-06 | Damped micromechanical device and method for making same |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6787969B2 (en) |
| AU (2) | AU2001265426A1 (en) |
| WO (2) | WO2001095468A1 (en) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7417782B2 (en) | 2005-02-23 | 2008-08-26 | Pixtronix, Incorporated | Methods and apparatus for spatial light modulation |
| US7369369B1 (en) | 2003-04-03 | 2008-05-06 | Meyer Dallas W | Bidirectional micropositioning recording head for a magnetic storage device |
| US7538983B1 (en) * | 2003-07-29 | 2009-05-26 | Meyer Dallas W | Micropositioner recording head for a magnetic storage device |
| US7096741B2 (en) * | 2004-07-14 | 2006-08-29 | Jds Uniphase Corporation | Method and system for reducing operational shock sensitivity of MEMS devices |
| US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
| US8159428B2 (en) | 2005-02-23 | 2012-04-17 | Pixtronix, Inc. | Display methods and apparatus |
| US7304785B2 (en) | 2005-02-23 | 2007-12-04 | Pixtronix, Inc. | Display methods and apparatus |
| US7999994B2 (en) | 2005-02-23 | 2011-08-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US9158106B2 (en) | 2005-02-23 | 2015-10-13 | Pixtronix, Inc. | Display methods and apparatus |
| US7405852B2 (en) | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8482496B2 (en) | 2006-01-06 | 2013-07-09 | Pixtronix, Inc. | Circuits for controlling MEMS display apparatus on a transparent substrate |
| US9229222B2 (en) | 2005-02-23 | 2016-01-05 | Pixtronix, Inc. | Alignment methods in fluid-filled MEMS displays |
| US9082353B2 (en) | 2010-01-05 | 2015-07-14 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7746529B2 (en) | 2005-02-23 | 2010-06-29 | Pixtronix, Inc. | MEMS display apparatus |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7304786B2 (en) | 2005-02-23 | 2007-12-04 | Pixtronix, Inc. | Methods and apparatus for bi-stable actuation of displays |
| US9261694B2 (en) | 2005-02-23 | 2016-02-16 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8519945B2 (en) | 2006-01-06 | 2013-08-27 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US20070205969A1 (en) | 2005-02-23 | 2007-09-06 | Pixtronix, Incorporated | Direct-view MEMS display devices and methods for generating images thereon |
| US20060266118A1 (en) * | 2005-03-29 | 2006-11-30 | Denison Timothy J | Capacitive sensor with damping |
| DE102005018321A1 (en) * | 2005-04-20 | 2006-11-02 | Siemens Ag | Capacitive micropower generator for multi-frequency vibration sources |
| US7210352B2 (en) * | 2005-06-14 | 2007-05-01 | Innovative Micro Technology | MEMS teeter-totter apparatus with curved beam and method of manufacture |
| US8526096B2 (en) | 2006-02-23 | 2013-09-03 | Pixtronix, Inc. | Mechanical light modulators with stressed beams |
| US7876489B2 (en) | 2006-06-05 | 2011-01-25 | Pixtronix, Inc. | Display apparatus with optical cavities |
| WO2008051362A1 (en) | 2006-10-20 | 2008-05-02 | Pixtronix, Inc. | Light guides and backlight systems incorporating light redirectors at varying densities |
| US20080158725A1 (en) * | 2006-12-29 | 2008-07-03 | Toshiki Hirano | Vibration damping utilizing a patterned visco-elastic polymer |
| US9176318B2 (en) | 2007-05-18 | 2015-11-03 | Pixtronix, Inc. | Methods for manufacturing fluid-filled MEMS displays |
| US7852546B2 (en) | 2007-10-19 | 2010-12-14 | Pixtronix, Inc. | Spacers for maintaining display apparatus alignment |
| DE102007033002A1 (en) * | 2007-07-16 | 2009-01-22 | Robert Bosch Gmbh | Micromechanical component and method for operating a micromechanical component |
| DE102007058951B4 (en) * | 2007-12-07 | 2020-03-26 | Snaptrack, Inc. | MEMS package |
| US8248560B2 (en) | 2008-04-18 | 2012-08-21 | Pixtronix, Inc. | Light guides and backlight systems incorporating prismatic structures and light redirectors |
| US7920317B2 (en) | 2008-08-04 | 2011-04-05 | Pixtronix, Inc. | Display with controlled formation of bubbles |
| US8169679B2 (en) | 2008-10-27 | 2012-05-01 | Pixtronix, Inc. | MEMS anchors |
| US8279559B1 (en) | 2009-01-02 | 2012-10-02 | Meyer Dallas W | Process for creating discrete track magnetic recording media including an apparatus having a stylus selectively applying stress to a surface of the recording media |
| EP2531881A2 (en) | 2010-02-02 | 2012-12-12 | Pixtronix Inc. | Methods for manufacturing cold seal fluid-filled display apparatus |
| KR101798312B1 (en) | 2010-02-02 | 2017-11-15 | 스냅트랙, 인코포레이티드 | Circuits for controlling display apparatus |
| US9134552B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus with narrow gap electrostatic actuators |
| US11111133B1 (en) * | 2017-01-30 | 2021-09-07 | Mirrorcle Technologies, Inc. | MEMS actuators with improved performance and cooling |
| JP2018152418A (en) * | 2017-03-10 | 2018-09-27 | 東芝メモリ株式会社 | Semiconductor device manufacturing method and etching mask |
| WO2019016058A1 (en) * | 2017-07-21 | 2019-01-24 | Carl Zeiss Ag | Mems device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NO911774D0 (en) | 1991-05-06 | 1991-05-06 | Sensonor As | DEVICE FOR ENCAPLING A FUNCTIONAL ORGANIZATION AND PROCEDURE FOR PRODUCING THE SAME. |
| JPH04368479A (en) * | 1991-06-17 | 1992-12-21 | Ricoh Co Ltd | Electrostatic actuator |
| US5491604A (en) * | 1992-12-11 | 1996-02-13 | The Regents Of The University Of California | Q-controlled microresonators and tunable electronic filters using such resonators |
| US5834646A (en) * | 1995-04-12 | 1998-11-10 | Sensonor Asa | Force sensor device |
| US5659418A (en) * | 1996-02-05 | 1997-08-19 | Lucent Technologies Inc. | Structure for membrane damping in a micromechanical modulator |
| EP1012890A4 (en) * | 1997-04-01 | 2000-06-28 | Xros Inc | Adjusting operating characteristics of micromachined torsional oscillators |
| US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
| DE69806010T2 (en) * | 1998-10-29 | 2003-01-02 | Sensonor Asa, Horten | Micromechanical acceleration switch |
| KR100312432B1 (en) * | 1999-11-25 | 2001-11-05 | 오길록 | Optical Switch using Micro Structures |
-
2001
- 2001-06-06 AU AU2001265426A patent/AU2001265426A1/en not_active Abandoned
- 2001-06-06 US US09/876,265 patent/US6787969B2/en not_active Expired - Fee Related
- 2001-06-06 WO PCT/US2001/040861 patent/WO2001095468A1/en not_active Ceased
- 2001-06-06 WO PCT/US2001/040870 patent/WO2001095006A1/en not_active Ceased
- 2001-06-06 AU AU2001275514A patent/AU2001275514A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US6787969B2 (en) | 2004-09-07 |
| AU2001265426A1 (en) | 2001-12-17 |
| US20020101129A1 (en) | 2002-08-01 |
| WO2001095468A1 (en) | 2001-12-13 |
| WO2001095006A1 (en) | 2001-12-13 |
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