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AU2001272659A1 - Process for making a periodic profile - Google Patents

Process for making a periodic profile

Info

Publication number
AU2001272659A1
AU2001272659A1 AU2001272659A AU7265901A AU2001272659A1 AU 2001272659 A1 AU2001272659 A1 AU 2001272659A1 AU 2001272659 A AU2001272659 A AU 2001272659A AU 7265901 A AU7265901 A AU 7265901A AU 2001272659 A1 AU2001272659 A1 AU 2001272659A1
Authority
AU
Australia
Prior art keywords
making
periodic profile
periodic
profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001272659A
Inventor
Guy Peter Bryan-Brown
Emma Louise Wood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of AU2001272659A1 publication Critical patent/AU2001272659A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
AU2001272659A 2000-07-29 2001-07-25 Process for making a periodic profile Abandoned AU2001272659A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0018629 2000-07-29
GBGB0018629.6A GB0018629D0 (en) 2000-07-29 2000-07-29 Process for making a periodic profile
GB0018629.6 2000-07-29
PCT/GB2001/003305 WO2002010857A2 (en) 2000-07-29 2001-07-25 Process for making a periodic profile

Publications (1)

Publication Number Publication Date
AU2001272659A1 true AU2001272659A1 (en) 2002-02-13

Family

ID=9896589

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001272659A Abandoned AU2001272659A1 (en) 2000-07-29 2001-07-25 Process for making a periodic profile

Country Status (5)

Country Link
US (1) US6727046B1 (en)
EP (1) EP1305672A2 (en)
AU (1) AU2001272659A1 (en)
GB (1) GB0018629D0 (en)
WO (1) WO2002010857A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3912663B2 (en) * 2002-02-26 2007-05-09 富士フイルム株式会社 Color filter pixel formation method, liquid crystal display color filter, liquid crystal display spacer and alignment control protrusion formation method, liquid crystal display spacer and alignment control protrusion
EP1489460A3 (en) * 2003-06-20 2008-07-09 FUJIFILM Corporation Light-sensitive sheet comprising support, first light-sensitive layer and second light-sensitive layer
ITTO20030730A1 (en) * 2003-09-23 2005-03-24 Infm Istituto Naz Per La Fisi Ca Della Mater PROCEDURE FOR THE MANUFACTURE OF COMPLEX THREE-DIMENSIONAL STRUCTURES ON A SUB-MICROMETRIC SCALE BY COMBINED TWO-RESIST LITHOGRAPHY.
US11131929B2 (en) 2018-11-07 2021-09-28 Waymo Llc Systems and methods that utilize angled photolithography for manufacturing light guide elements
US11131934B2 (en) 2019-10-29 2021-09-28 Waymo Llc Non-telecentric light guide elements

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5275341A (en) * 1975-12-19 1977-06-24 Rikagaku Kenkyusho Method of producing echelette grating
US4211834A (en) 1977-12-30 1980-07-08 International Business Machines Corporation Method of using a o-quinone diazide sensitized phenol-formaldehyde resist as a deep ultraviolet light exposure mask
US4660934A (en) * 1984-03-21 1987-04-28 Kokusai Denshin Denwa Kabushiki Kaisha Method for manufacturing diffraction grating
JPS60230650A (en) * 1984-04-30 1985-11-16 Shimadzu Corp Fine pattern manufacturing method
JPH03265117A (en) 1990-03-15 1991-11-26 Mitsubishi Electric Corp Manufacture of semiconductor device
GB9521106D0 (en) * 1995-10-16 1995-12-20 Secr Defence Bistable nematic liquid crystal device

Also Published As

Publication number Publication date
WO2002010857A3 (en) 2002-07-18
WO2002010857A2 (en) 2002-02-07
US6727046B1 (en) 2004-04-27
EP1305672A2 (en) 2003-05-02
GB0018629D0 (en) 2000-09-13

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