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AU2001269523A1 - Holding device for treated body - Google Patents

Holding device for treated body

Info

Publication number
AU2001269523A1
AU2001269523A1 AU2001269523A AU6952301A AU2001269523A1 AU 2001269523 A1 AU2001269523 A1 AU 2001269523A1 AU 2001269523 A AU2001269523 A AU 2001269523A AU 6952301 A AU6952301 A AU 6952301A AU 2001269523 A1 AU2001269523 A1 AU 2001269523A1
Authority
AU
Australia
Prior art keywords
holding device
treated body
treated
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001269523A
Inventor
Shinji Himori
Akira Koshiishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2001269523A1 publication Critical patent/AU2001269523A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/74—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
    • H10P72/72—
    • H10P72/722—
    • H10W72/00—

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Jigs For Machine Tools (AREA)
  • Chemical Vapour Deposition (AREA)
AU2001269523A 2000-07-17 2001-07-13 Holding device for treated body Abandoned AU2001269523A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000216552A JP4559595B2 (en) 2000-07-17 2000-07-17 Apparatus for placing object to be processed and plasma processing apparatus
JP2000-216552 2000-07-17
PCT/JP2001/006105 WO2002007212A1 (en) 2000-07-17 2001-07-13 Holding device for treated body

Publications (1)

Publication Number Publication Date
AU2001269523A1 true AU2001269523A1 (en) 2002-01-30

Family

ID=18711801

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001269523A Abandoned AU2001269523A1 (en) 2000-07-17 2001-07-13 Holding device for treated body

Country Status (6)

Country Link
US (1) US6733624B2 (en)
JP (1) JP4559595B2 (en)
CN (1) CN1261995C (en)
AU (1) AU2001269523A1 (en)
TW (1) TW506033B (en)
WO (1) WO2002007212A1 (en)

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Also Published As

Publication number Publication date
US20030106647A1 (en) 2003-06-12
TW506033B (en) 2002-10-11
JP4559595B2 (en) 2010-10-06
JP2002033376A (en) 2002-01-31
US6733624B2 (en) 2004-05-11
WO2002007212A1 (en) 2002-01-24
CN1261995C (en) 2006-06-28
CN1437764A (en) 2003-08-20

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