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AU2001268756A1 - Mgzno based uv detectors - Google Patents

Mgzno based uv detectors

Info

Publication number
AU2001268756A1
AU2001268756A1 AU2001268756A AU6875601A AU2001268756A1 AU 2001268756 A1 AU2001268756 A1 AU 2001268756A1 AU 2001268756 A AU2001268756 A AU 2001268756A AU 6875601 A AU6875601 A AU 6875601A AU 2001268756 A1 AU2001268756 A1 AU 2001268756A1
Authority
AU
Australia
Prior art keywords
detectors
mgzno
mgzno based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001268756A
Inventor
Supab Choopun
Thirumalai Venkatesan
Ratnakar D. Vispute
Wei Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Maryland Baltimore
Original Assignee
University of Maryland Baltimore
University of Maryland College Park
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Maryland Baltimore, University of Maryland College Park filed Critical University of Maryland Baltimore
Publication of AU2001268756A1 publication Critical patent/AU2001268756A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/222Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN heterojunction
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/122Active materials comprising only Group IV materials
    • H10F77/1223Active materials comprising only Group IV materials characterised by the dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
AU2001268756A 2000-06-26 2001-06-26 Mgzno based uv detectors Abandoned AU2001268756A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21419600P 2000-06-26 2000-06-26
US60214196 2000-06-26
PCT/US2001/041124 WO2002001650A1 (en) 2000-06-26 2001-06-26 Mgzno based uv detectors

Publications (1)

Publication Number Publication Date
AU2001268756A1 true AU2001268756A1 (en) 2002-01-08

Family

ID=22798161

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001268756A Abandoned AU2001268756A1 (en) 2000-06-26 2001-06-26 Mgzno based uv detectors

Country Status (3)

Country Link
US (1) US7132668B2 (en)
AU (1) AU2001268756A1 (en)
WO (1) WO2002001650A1 (en)

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DE602006014189D1 (en) 2005-11-24 2010-06-17 Murata Manufacturing Co ULTRAVIOLET SENSOR
US7973379B2 (en) * 2005-12-26 2011-07-05 Citizen Holdings Co., Ltd. Photovoltaic ultraviolet sensor
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WO2008045423A1 (en) * 2006-10-10 2008-04-17 Structured Materials Inc. Self assembled controlled luminescent transparent conductive photonic crystals for light emitting devices
CN100565941C (en) * 2008-08-21 2009-12-02 中国科学院长春光学精密机械与物理研究所 The method for preparing solar blind ultraviolet detector
US9406709B2 (en) 2010-06-22 2016-08-02 President And Fellows Of Harvard College Methods for fabricating and using nanowires
US8835831B2 (en) * 2010-06-22 2014-09-16 Zena Technologies, Inc. Polarized light detecting device and fabrication methods of the same
US9478685B2 (en) 2014-06-23 2016-10-25 Zena Technologies, Inc. Vertical pillar structured infrared detector and fabrication method for the same
US9299866B2 (en) 2010-12-30 2016-03-29 Zena Technologies, Inc. Nanowire array based solar energy harvesting device
US8299472B2 (en) 2009-12-08 2012-10-30 Young-June Yu Active pixel sensor with nanowire structured photodetectors
US8866065B2 (en) 2010-12-13 2014-10-21 Zena Technologies, Inc. Nanowire arrays comprising fluorescent nanowires
US9515218B2 (en) 2008-09-04 2016-12-06 Zena Technologies, Inc. Vertical pillar structured photovoltaic devices with mirrors and optical claddings
US9000353B2 (en) 2010-06-22 2015-04-07 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
US8735797B2 (en) 2009-12-08 2014-05-27 Zena Technologies, Inc. Nanowire photo-detector grown on a back-side illuminated image sensor
US8748799B2 (en) 2010-12-14 2014-06-10 Zena Technologies, Inc. Full color single pixel including doublet or quadruplet si nanowires for image sensors
US9082673B2 (en) 2009-10-05 2015-07-14 Zena Technologies, Inc. Passivated upstanding nanostructures and methods of making the same
US8546742B2 (en) 2009-06-04 2013-10-01 Zena Technologies, Inc. Array of nanowires in a single cavity with anti-reflective coating on substrate
US8274039B2 (en) 2008-11-13 2012-09-25 Zena Technologies, Inc. Vertical waveguides with various functionality on integrated circuits
US8229255B2 (en) 2008-09-04 2012-07-24 Zena Technologies, Inc. Optical waveguides in image sensors
US9343490B2 (en) 2013-08-09 2016-05-17 Zena Technologies, Inc. Nanowire structured color filter arrays and fabrication method of the same
JP2011151269A (en) * 2010-01-22 2011-08-04 Rohm Co Ltd Imaging device
CN103050498B (en) * 2012-12-28 2015-08-26 中山大学 A kind of micro-nano linear array structure ultraviolet avalanche photodetector and preparation method thereof
US9059417B1 (en) 2013-06-06 2015-06-16 University Of Central Florida Research Foundation, Inc. Photodetectors based on wurtzite MgZnO
CN103545397B (en) * 2013-10-29 2016-02-24 中国科学院化学研究所 Thin film ultraviolet detector and preparation method thereof and application
CN104504838A (en) * 2014-12-15 2015-04-08 长春理工大学 Ultraviolet flame detector adopting zinc oxide-based semiconductor film
US9806125B2 (en) 2015-07-28 2017-10-31 Carrier Corporation Compositionally graded photodetectors
US9865766B2 (en) 2015-07-28 2018-01-09 Carrier Corporation Ultraviolet photodetectors and methods of making ultraviolet photodetectors
US9928727B2 (en) 2015-07-28 2018-03-27 Carrier Corporation Flame detectors
US10126165B2 (en) * 2015-07-28 2018-11-13 Carrier Corporation Radiation sensors
KR102446410B1 (en) * 2015-09-17 2022-09-22 삼성전자주식회사 Optoelectronic device and electronic device including same
CN106997909B (en) * 2016-01-22 2019-04-05 中国科学院物理研究所 A kind of highly sensitive blind deep ultraviolet light detector of subsisting
CN106997907B (en) * 2016-01-22 2019-04-05 中国科学院物理研究所 A kind of visible blind UV detector of high sensitivity
JP6767774B2 (en) * 2016-05-19 2020-10-14 ラピスセミコンダクタ株式会社 Semiconductor devices and methods for manufacturing semiconductor devices
WO2018222528A1 (en) * 2017-05-30 2018-12-06 Carrier Corporation Semiconductor film and phototube light detector
CN109616529A (en) * 2018-12-07 2019-04-12 中国科学院长春光学精密机械与物理研究所 A kind of ultraviolet detector and preparation method thereof
CN110335907B (en) * 2019-07-17 2022-07-12 东莞市光钛科技有限公司 A Vertical Structured MgZnO/ZnO Solar Blind Detector
TWI750549B (en) * 2019-12-06 2021-12-21 國家中山科學研究院 Method for preparing aluminum nitride-zinc oxide ultraviolet light detection electrode
CN111261735B (en) * 2020-03-19 2022-07-08 中国科学院长春光学精密机械与物理研究所 ZnMgO film, ultraviolet detector and preparation method thereof
CN112071949B (en) * 2020-08-04 2022-10-11 深圳大学 Ultraviolet detector and preparation method thereof
CN113314642B (en) * 2021-05-28 2022-06-21 吉林建筑大学 Preparation method of double-insulation-layer solar-blind ultraviolet photosensitive thin film transistor
CN115274932B (en) * 2022-08-10 2024-11-01 吉林大学 FTO/alpha-Ga based2O3Ultraviolet detector of MgZnO crystal form matching heterojunction and preparation method thereof

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US6559736B2 (en) * 2000-07-13 2003-05-06 Rutgers, The State University Of New Jersey Integrated tunable surface acoustic wave with quantum well structure technology and systems provided thereby
US6423983B1 (en) * 2000-10-13 2002-07-23 North Carolina State University Optoelectronic and microelectronic devices including cubic ZnMgO and/or CdMgO alloys

Also Published As

Publication number Publication date
WO2002001650A1 (en) 2002-01-03
US7132668B2 (en) 2006-11-07
US20030160176A1 (en) 2003-08-28

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