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AU2001268656A1 - Automated processing system - Google Patents

Automated processing system

Info

Publication number
AU2001268656A1
AU2001268656A1 AU2001268656A AU6865601A AU2001268656A1 AU 2001268656 A1 AU2001268656 A1 AU 2001268656A1 AU 2001268656 A AU2001268656 A AU 2001268656A AU 6865601 A AU6865601 A AU 6865601A AU 2001268656 A1 AU2001268656 A1 AU 2001268656A1
Authority
AU
Australia
Prior art keywords
processing system
automated processing
automated
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001268656A
Inventor
Daniel P. Bexten
Jeffry A. Davis
Gordon Ray Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semitool Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/612,009 external-priority patent/US6942738B1/en
Priority claimed from US09/735,154 external-priority patent/US6536131B2/en
Application filed by Semitool Inc filed Critical Semitool Inc
Publication of AU2001268656A1 publication Critical patent/AU2001268656A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/3408—
    • H10P72/3404—
    • H10P72/3412—
    • H10P72/7602—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
AU2001268656A 2000-07-07 2001-06-20 Automated processing system Abandoned AU2001268656A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US61170900A 2000-07-07 2000-07-07
US09/612,009 2000-07-07
US09/612,009 US6942738B1 (en) 1996-07-15 2000-07-07 Automated semiconductor processing system
US09/611,709 2000-07-07
US09/735,154 2000-12-12
US09/735,154 US6536131B2 (en) 1996-07-15 2000-12-12 Wafer handling system
PCT/US2001/019866 WO2002005313A2 (en) 2000-07-07 2001-06-20 Automated processing system

Publications (1)

Publication Number Publication Date
AU2001268656A1 true AU2001268656A1 (en) 2002-01-21

Family

ID=27417065

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001268656A Abandoned AU2001268656A1 (en) 2000-07-07 2001-06-20 Automated processing system

Country Status (6)

Country Link
US (1) US7278813B2 (en)
EP (1) EP1332349A4 (en)
JP (1) JP2004524673A (en)
AU (1) AU2001268656A1 (en)
TW (1) TW537996B (en)
WO (1) WO2002005313A2 (en)

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US20170194181A1 (en) * 2016-01-04 2017-07-06 Micron Technology, Inc. Overhead traveling vehicle, transportation system with the same, and method of operating the same
TWI633619B (en) * 2016-03-29 2018-08-21 辛耘企業股份有限公司 Wafer direction changing device
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US10790177B2 (en) * 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
CN108054124B (en) * 2018-01-23 2024-05-03 哈工大机器人（合肥）国际创新研究院 Device for treating miniature disk-shaped parts
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US11551959B2 (en) * 2019-10-29 2023-01-10 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for automated wafer carrier handling
JP7279858B2 (en) * 2020-05-21 2023-05-23 株式会社安川電機 Conveying device, conveying method and conveying system
US11353381B1 (en) * 2020-06-09 2022-06-07 Applied Materials, Inc. Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
KR102586016B1 (en) * 2020-11-25 2023-10-11 세메스 주식회사 Apparatus for treatng a substrate, a supporting unit and method for assembling a supporting unit

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Also Published As

Publication number Publication date
EP1332349A4 (en) 2008-12-17
WO2002005313A2 (en) 2002-01-17
JP2004524673A (en) 2004-08-12
TW537996B (en) 2003-06-21
US7278813B2 (en) 2007-10-09
US20030209404A1 (en) 2003-11-13
WO2002005313A3 (en) 2003-04-24
EP1332349A2 (en) 2003-08-06

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