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AU2001266574A1 - Staggered torsional electrostatic combdrive and method of forming same - Google Patents

Staggered torsional electrostatic combdrive and method of forming same

Info

Publication number
AU2001266574A1
AU2001266574A1 AU2001266574A AU6657401A AU2001266574A1 AU 2001266574 A1 AU2001266574 A1 AU 2001266574A1 AU 2001266574 A AU2001266574 A AU 2001266574A AU 6657401 A AU6657401 A AU 6657401A AU 2001266574 A1 AU2001266574 A1 AU 2001266574A1
Authority
AU
Australia
Prior art keywords
forming same
torsional electrostatic
electrostatic combdrive
staggered torsional
staggered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001266574A
Inventor
Robert A. Conant
Kam-Yin Lau
Richard S Muller
Jocelyn T. Nee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California San Diego UCSD
Original Assignee
University of California
University of California Berkeley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California, University of California Berkeley filed Critical University of California
Publication of AU2001266574A1 publication Critical patent/AU2001266574A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00182—Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0176—Chemical vapour Deposition
    • B81C2201/0178—Oxidation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2001266574A 2000-05-31 2001-05-14 Staggered torsional electrostatic combdrive and method of forming same Abandoned AU2001266574A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/584,835 US7079299B1 (en) 2000-05-31 2000-05-31 Staggered torsional electrostatic combdrive and method of forming same
US09584835 2000-05-31
PCT/US2001/015514 WO2001092939A1 (en) 2000-05-31 2001-05-14 Staggered torsional electrostatic combdrive and method of forming same

Publications (1)

Publication Number Publication Date
AU2001266574A1 true AU2001266574A1 (en) 2001-12-11

Family

ID=24338976

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001266574A Abandoned AU2001266574A1 (en) 2000-05-31 2001-05-14 Staggered torsional electrostatic combdrive and method of forming same

Country Status (4)

Country Link
US (2) US7079299B1 (en)
AU (1) AU2001266574A1 (en)
TW (1) TW505613B (en)
WO (1) WO2001092939A1 (en)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7079299B1 (en) 2000-05-31 2006-07-18 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
JP4102037B2 (en) * 2001-04-26 2008-06-18 富士通株式会社 Micromirror device and manufacturing method thereof
KR100434541B1 (en) * 2001-08-24 2004-06-05 삼성전자주식회사 Optical scanner and manufacturing method thereof
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication
GB2389707A (en) * 2002-06-14 2003-12-17 Suisse Electronique Microtech Linear response MEMS device
US6872319B2 (en) * 2002-09-30 2005-03-29 Rockwell Scientific Licensing, Llc Process for high yield fabrication of MEMS devices
WO2004034126A1 (en) * 2002-10-10 2004-04-22 Fujitsu Limited Micro moving element comprising torsion bar
AU2003295445A1 (en) * 2002-11-22 2004-06-18 Advanced Nano Systems Mems scanning mirror with tunable natural frequency
US7034370B2 (en) 2002-11-22 2006-04-25 Advanced Nano Systems, Inc. MEMS scanning mirror with tunable natural frequency
JP4337511B2 (en) * 2003-02-12 2009-09-30 株式会社デンソー Electrostatic actuator and manufacturing method thereof
US7375874B1 (en) 2003-03-22 2008-05-20 Active Optical Mems Inc. Light modulator with integrated drive and control circuitry
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US7015885B2 (en) * 2003-03-22 2006-03-21 Active Optical Networks, Inc. MEMS devices monolithically integrated with drive and control circuitry
ITTO20030269A1 (en) * 2003-04-08 2004-10-09 St Microelectronics Srl PROCEDURE FOR THE MANUFACTURE OF A DEVICE
DE102004037833A1 (en) * 2003-08-25 2005-03-31 Advanced Nano Systems Inc., San Jose Micro-electro-mechanical system scanning mirror device for laser printer, has springs that connect beam structure which is supporting scanning mirror by several support attachment, to stationary support structure
US7014115B2 (en) * 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
KR100579868B1 (en) * 2003-12-02 2006-05-15 삼성전자주식회사 Micro Mirror and Manufacturing Method
FR2864634B1 (en) * 2003-12-26 2006-02-24 Commissariat Energie Atomique OPTICAL COMPONENTS AND METHOD FOR PRODUCING THE SAME
US7282775B2 (en) * 2004-02-13 2007-10-16 Advanced Numicro Systems, Inc. MEMS scanning mirror with trenched surface and tapered comb teeth for reducing intertia and deformation
JP4422624B2 (en) * 2004-03-03 2010-02-24 日本航空電子工業株式会社 Micro movable device and manufacturing method thereof
CN100339738C (en) * 2004-03-12 2007-09-26 先进微系统科技股份有限公司 Microelectromechanical actuator with multiple sets of comb electrodes and manufacturing method thereof
US7187100B2 (en) * 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
US6906905B1 (en) * 2004-06-30 2005-06-14 International Business Machines Corporation Micro electro-mechanical variable capacitor
KR100594731B1 (en) * 2004-07-19 2006-06-30 삼성전자주식회사 Vertical step structure and its manufacturing method
US6985279B1 (en) * 2004-08-02 2006-01-10 Advanced Nano Systems, Inc. MEMS mirror with drive rotation amplification of mirror rotation angle
JP2006053396A (en) * 2004-08-12 2006-02-23 Tohoku Univ Drive mechanism and micromirror device provided with the mechanism
CN100367070C (en) * 2004-08-24 2008-02-06 先进纽微系统公司 Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories
JP4385937B2 (en) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 Actuator
CN100381862C (en) * 2005-03-23 2008-04-16 精工爱普生株式会社 Driver, optical device with driver, and method for manufacturing same
EP1875295A1 (en) * 2005-04-27 2008-01-09 Micronic Laser Systems Ab Mems device with mutually perpendicular deflectable reflective and electrode surfaces
KR100695153B1 (en) * 2005-06-15 2007-03-14 삼성전자주식회사 Actuator with vertical comb electrode
JP5066795B2 (en) * 2005-07-06 2012-11-07 株式会社ニコン Microactuator, optical device and optical switch
US7573022B2 (en) * 2005-07-27 2009-08-11 The Regents Of The University Of California Method for fabricating vertically-offset interdigitated comb actuator device
KR100743315B1 (en) 2005-08-26 2007-07-26 엘지전자 주식회사 Micro Mirror Device and Micro Mirror Device Array Using the Same
US7409118B2 (en) * 2006-04-12 2008-08-05 Translume, Inc. Monolithic translation stage device
TWI312530B (en) * 2006-07-24 2009-07-21 Touch Micro System Tech Method of fabricating a hinge
US7529016B1 (en) 2006-07-27 2009-05-05 Allen James J Extended-range tiltable micromirror
DE102006051207B4 (en) 2006-10-30 2019-09-12 Robert Bosch Gmbh Micromechanical component with a micro-vibrating device and method for adjusting a component
CA2612206A1 (en) * 2006-11-30 2008-05-30 Jds Uniphase Corporation Micromirror device with a hybrid actuator
WO2008068735A2 (en) * 2006-12-03 2008-06-12 Maradin Technologies Ltd. A gimbaled scanning micro-mirror actuation scheme and architecture
DE102006058563B3 (en) * 2006-12-12 2008-06-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromirror actuator with encapsulation option and method of manufacture
DE102007051820A1 (en) * 2007-04-02 2008-10-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical component with increased rigidity
DE102008012825B4 (en) * 2007-04-02 2011-08-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Micromechanical device with tilted electrodes
US7535620B2 (en) * 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
CA2624400A1 (en) 2007-06-21 2008-12-21 Jds Uniphase Corporation Mems device with an angular vertical comb actuator
JP5432440B2 (en) * 2007-07-04 2014-03-05 キヤノン株式会社 Oscillator device
WO2009044324A2 (en) * 2007-10-05 2009-04-09 Koninklijke Philips Electronics N.V. Mems scanning micromirror manufacturing method
US7880246B2 (en) * 2007-11-29 2011-02-01 Stichting Imec Nederland Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion
JP5247182B2 (en) * 2008-02-19 2013-07-24 キヤノン株式会社 Angular velocity sensor
WO2009147654A1 (en) * 2008-06-02 2009-12-10 Maradin Technologies Ltd. Gimbaled scanning micro-mirror apparatus
US20090310200A1 (en) * 2008-06-16 2009-12-17 Hoya Corporation Electrostatic actuator
US7999635B1 (en) 2008-07-29 2011-08-16 Silicon Laboratories Inc. Out-of plane MEMS resonator with static out-of-plane deflection
JP2010107628A (en) * 2008-10-29 2010-05-13 Topcon Corp Mems scanning type mirror and method of manufacturing the same
US8238018B2 (en) 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
US8134277B2 (en) * 2009-12-15 2012-03-13 Moidu Abdul Jaleel K Electrostatic comb actuator
US10455275B2 (en) * 2010-02-16 2019-10-22 Comcast Cable Communications, Llc Disposition of video alerts and integration of a mobile device into a local service domain
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
IL211211A0 (en) 2011-02-13 2011-04-28 Sason Sourani A mems device and method for using same
US8471641B2 (en) 2011-06-30 2013-06-25 Silicon Laboratories Inc. Switchable electrode for power handling
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
EP2727516B1 (en) 2012-10-30 2020-01-01 Canon Kabushiki Kaisha Ophthalmologic apparatus
DE102013211872B4 (en) 2013-06-24 2023-06-07 Robert Bosch Gmbh Micro-electromechanical reflector and method of making a micro-electromechanical reflector
DE102013212095B4 (en) 2013-06-25 2024-06-27 Robert Bosch Gmbh Micro-electromechanical reflector and method for producing a micro-electromechanical reflector
US9036230B1 (en) 2013-12-24 2015-05-19 Chen-Chi Lin Torsional electrostatic combdrive with increased stiffness
JP6424479B2 (en) * 2014-06-09 2018-11-21 富士電機株式会社 Actuator and control method of actuator
DE102014210986A1 (en) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Micromechanical layer arrangement
US10677924B2 (en) 2015-06-23 2020-06-09 Mezmeriz, Inc. Portable panoramic laser mapping and/or projection system
CN105607249B (en) * 2015-12-21 2018-06-26 西安励德微系统科技有限公司 A kind of torsional micro-mirror of the not contour pivotal quantity in unilateral side
DE102016213026A1 (en) * 2016-07-18 2018-01-18 Carl Zeiss Smt Gmbh Sensor means
CN107986227B (en) * 2017-12-29 2025-04-25 苏州工业园区纳米产业技术研究院有限公司 Unequal height vertical comb teeth device and preparation method thereof
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
CN113120850B (en) * 2019-12-31 2024-06-18 华为技术有限公司 A micro-electromechanical system and a method for manufacturing the same
US20220269069A1 (en) * 2020-04-03 2022-08-25 Google Llc Technique to detect the rotational direction of resonant mems mirrors driven by parametric excitation
US11592533B2 (en) 2020-06-18 2023-02-28 Beijing Voyager Technology Co., Ltd. MEMS mirror structure with backside skeleton
US20210396992A1 (en) * 2020-06-18 2021-12-23 Beijing Voyager Technology Co., Ltd. Mems scanning mirror with multiple comb drives
CN115199637A (en) * 2021-04-12 2022-10-18 中国科学院微电子研究所 MEMS torsion driving structure
CN116990958B (en) * 2023-07-31 2024-04-26 西安知象光电科技有限公司 Torsional micro-vibration mirror chip of angle-controllable vertical comb tooth driving array and preparation method thereof
CN119902365A (en) * 2023-10-27 2025-04-29 安徽中科米微电子技术有限公司 A MEMS micromirror with dual-axis angle feedback and its manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428259A (en) * 1990-02-02 1995-06-27 Nec Corporation Micromotion mechanical structure and a process for the production thereof
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5804084A (en) * 1996-10-11 1998-09-08 Sandia Corporation Use of chemical mechanical polishing in micromachining
JP3011144B2 (en) 1997-07-31 2000-02-21 日本電気株式会社 Optical scanner and its driving method
US6201629B1 (en) 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US5995334A (en) * 1997-12-30 1999-11-30 International Business Machines Corporation Rotary electrostatic microactuator with area-efficient comb electrode arrangement
KR100300002B1 (en) * 1998-04-01 2001-11-22 조동일 Micromachining method using single crystal silicon
KR100459887B1 (en) * 1999-01-11 2004-12-03 삼성전자주식회사 Inertia detection ion sensor and actuator using 3-dimension comb structure
US6133670A (en) * 1999-06-24 2000-10-17 Sandia Corporation Compact electrostatic comb actuator
US6628041B2 (en) * 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US7079299B1 (en) 2000-05-31 2006-07-18 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
US6544863B1 (en) * 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers

Also Published As

Publication number Publication date
WO2001092939A1 (en) 2001-12-06
US20030019832A1 (en) 2003-01-30
US6758983B2 (en) 2004-07-06
TW505613B (en) 2002-10-11
US7079299B1 (en) 2006-07-18

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