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AU2001266311A1 - Ejection head for aggressive liquids manufactured by anodic bonding - Google Patents

Ejection head for aggressive liquids manufactured by anodic bonding

Info

Publication number
AU2001266311A1
AU2001266311A1 AU2001266311A AU6631101A AU2001266311A1 AU 2001266311 A1 AU2001266311 A1 AU 2001266311A1 AU 2001266311 A AU2001266311 A AU 2001266311A AU 6631101 A AU6631101 A AU 6631101A AU 2001266311 A1 AU2001266311 A1 AU 2001266311A1
Authority
AU
Australia
Prior art keywords
ejection head
substrate
nozzle plate
ejection
ejecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001266311A
Inventor
Renato Conta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olivetti Tecnost SpA
Original Assignee
Olivetti Tecnost SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olivetti Tecnost SpA filed Critical Olivetti Tecnost SpA
Publication of AU2001266311A1 publication Critical patent/AU2001266311A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00—Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603—Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M53/00—Fuel-injection apparatus characterised by having heating, cooling or thermally-insulating means
    • F02M53/04—Injectors with heating, cooling, or thermally-insulating means
    • F02M53/06—Injectors with heating, cooling, or thermally-insulating means with fuel-heating means, e.g. for vaporising
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1853—Orifice plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemically Coating (AREA)
  • Magnetic Heads (AREA)

Abstract

A method for manufacturing an ejection head ( 10 ) or ejector suitable for ejecting in the form of droplets ( 16 ) a liquid ( 14 ) conveyed inside the ejection head ( 10 ), comprising a step of producing, from a silicon wafer, a nozzle plate ( 12 ) having at least one ejection nozzle ( 13 ); a step of producing, from another silicon wafer, a substrate ( 11 ) having at least one actuator ( 15 ) for activating the ejection of the droplets of liquid through the nozzle ( 13 ); and a step of joining the nozzle plate ( 12 ) and the substrate ( 11 ) together to form the ejection head, wherein this joining step comprises the production of a junction ( 25 ), made by means of the anodic bonding technology, between the substrate ( 11 ) and the nozzle plate ( 12 ), in such a way that, in the area of this junction ( 25 ), the ejection head ( 10 ) does not present structural discontinuities, and also possesses a resistance to chemical corrosion by the liquid ( 14 ) contained in the ejection head ( 10 ) at least equal to that of the silicon constituting both the substrate ( 11 ) and the nozzle plate ( 12 ). The method of the invention may be applied for manufacturing an ink jet printhead ( 110 ), having one or more nozzles ( 113 a , 113 b, etc.), which has the advantage, with respect to the known printheads, of also being suitable for working with special inks characterized by high level chemical aggressiveness. In general, the ejection head of the invention, thanks to its structure which is globally highly robust and also chemically inert in the area of the junction ( 25 ), can be used advantageously with various types of liquids, even with marked chemical aggressiveness, in different sectors of the art, for example for ejecting paints on various types of media, generally not paper, in the industrial marking sector; or for ejecting in a controlled way droplets of fuel, such as petrol, in an internal combustion engine.
AU2001266311A 2000-05-29 2001-05-25 Ejection head for aggressive liquids manufactured by anodic bonding Abandoned AU2001266311A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT2000TO000494A IT1320381B1 (en) 2000-05-29 2000-05-29 METHOD FOR THE MANUFACTURE OF AN EJECTION HEAD OF DILQUID DROPS, PARTICULARLY SUITABLE FOR OPERATING WITH CHEMICALLY LIQUIDS
ITTO200A000494 2000-05-29
PCT/IT2001/000266 WO2001092715A1 (en) 2000-05-29 2001-05-25 Ejection head for aggressive liquids manufactured by anodic bonding

Publications (1)

Publication Number Publication Date
AU2001266311A1 true AU2001266311A1 (en) 2001-12-11

Family

ID=11457761

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001266311A Abandoned AU2001266311A1 (en) 2000-05-29 2001-05-25 Ejection head for aggressive liquids manufactured by anodic bonding

Country Status (8)

Country Link
US (2) US6780340B2 (en)
EP (1) EP1290336B1 (en)
AT (1) ATE255204T1 (en)
AU (1) AU2001266311A1 (en)
DE (1) DE60101336T2 (en)
ES (1) ES2211813T3 (en)
IT (1) IT1320381B1 (en)
WO (1) WO2001092715A1 (en)

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IT1320381B1 (en) * 2000-05-29 2003-11-26 Olivetti Lexikon Spa METHOD FOR THE MANUFACTURE OF AN EJECTION HEAD OF DILQUID DROPS, PARTICULARLY SUITABLE FOR OPERATING WITH CHEMICALLY LIQUIDS
SG126682A1 (en) * 2000-08-09 2006-11-29 Sony Corp Print head, manufacturing method therefor, and printer
NL1016030C1 (en) * 2000-08-28 2002-03-01 Aquamarijn Holding B V Spraying device with a nozzle plate, a nozzle plate, as well as methods for manufacturing and applying such a nozzle plate.
KR100436760B1 (en) * 2001-12-20 2004-06-23 삼성전자주식회사 Head of ink jet printer and method for manufacturing head of ink jet printer
US6729306B2 (en) * 2002-02-26 2004-05-04 Hewlett-Packard Development Company, L.P. Micro-pump and fuel injector for combustible liquids
US6962402B2 (en) * 2002-12-02 2005-11-08 Silverbrook Research Pty Ltd Inkjet printhead with ink supply passage formed from both sides of the wafer by overlapping etches
ITTO20020375A1 (en) * 2002-05-07 2003-11-07 Fiat Ricerche ,, ELECTRICITY MICROGENERATOR ,,
JP2004009127A (en) * 2002-06-11 2004-01-15 Senju Metal Ind Co Ltd Jet soldering bath
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US6782869B2 (en) 2002-08-30 2004-08-31 Hewlett-Packard Development Company, L.P. Fuel delivery system and method
US6786194B2 (en) * 2002-10-31 2004-09-07 Hewlett-Packard Development Company, L.P. Variable fuel delivery system and method
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
JP4337723B2 (en) * 2004-12-08 2009-09-30 セイコーエプソン株式会社 Droplet discharge head manufacturing method, droplet discharge head, and droplet discharge apparatus
CN101094770B (en) 2004-12-30 2010-04-14 富士胶卷迪马蒂克斯股份有限公司 inkjet printing
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US7801058B2 (en) 2006-07-27 2010-09-21 Mobitrum Corporation Method and system for dynamic information exchange on mesh network devices
US8427979B1 (en) 2006-07-27 2013-04-23 Mobitrum Corporation Method and system for dynamic information exchange on location aware mesh network devices
US8411590B2 (en) 2006-07-27 2013-04-02 Mobitrum Corporation Mesh network remote control device
US8305935B2 (en) 2006-07-27 2012-11-06 Mobitrum Corporation Method and system for dynamic information exchange on location aware mesh network devices
US8305936B2 (en) 2006-07-27 2012-11-06 Mobitrum Corporation Method and system for dynamic information exchange on a mesh network in a vehicle
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Also Published As

Publication number Publication date
EP1290336B1 (en) 2003-11-26
ITTO20000494A0 (en) 2000-05-29
ITTO20000494A1 (en) 2001-11-29
DE60101336T2 (en) 2004-09-09
DE60101336D1 (en) 2004-01-08
US20040207697A1 (en) 2004-10-21
EP1290336A1 (en) 2003-03-12
US20030131475A1 (en) 2003-07-17
ES2211813T3 (en) 2004-07-16
WO2001092715A1 (en) 2001-12-06
IT1320381B1 (en) 2003-11-26
US6988791B2 (en) 2006-01-24
US6780340B2 (en) 2004-08-24
ATE255204T1 (en) 2003-12-15

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