AU2001259482A1 - Extreme-uv electrical discharge source - Google Patents

Extreme-uv electrical discharge source

Info

Publication number: AU2001259482A1
Authority: AU; Australia
Prior art keywords: extreme; electrical discharge; discharge source; source; electrical
Prior art date: 2000-06-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2001259482A

Inventor

Neal R. Fornaciari

Richard E. Nygren

Michael A. Ulrickson

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

EUV LLC

Original Assignee

EUV LLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-06-13

Filing date

2001-05-03

Publication date

2001-12-24

2001-05-03 Application filed by EUV LLC filed Critical EUV LLC

2001-12-24 Publication of AU2001259482A1 publication Critical patent/AU2001259482A1/en

Status Abandoned legal-status Critical Current

Classifications

- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/009—Auxiliary arrangements not involved in the plasma generation
- H05G2/0094—Reduction, prevention or protection from contamination; Cleaning

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Optics & Photonics (AREA)
Plasma & Fusion (AREA)
X-Ray Techniques (AREA)

AU2001259482A 2000-06-13 2001-05-03 Extreme-uv electrical discharge source Abandoned AU2001259482A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US09/594,746 US6356618B1 (en)	2000-06-13	2000-06-13	Extreme-UV electrical discharge source
US09594746		2000-06-13
PCT/US2001/014461 WO2001097575A1 (en)	2000-06-13	2001-05-03	Extreme-uv electrical discharge source

Publications (1)

Publication Number	Publication Date
AU2001259482A1 true AU2001259482A1 (en)	2001-12-24

Family

ID=24380212

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2001259482A Abandoned AU2001259482A1 (en)	2000-06-13	2001-05-03	Extreme-uv electrical discharge source

Country Status (3)

Country	Link
US (1)	US6356618B1 (en)
AU (1)	AU2001259482A1 (en)
WO (1)	WO2001097575A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR100504189B1 (en) *	1997-12-31	2005-10-21	매그나칩 반도체 유한회사	Ultraviolet ray generating device and method
US6498832B2 (en) *	2001-03-13	2002-12-24	Euv Llc	Electrode configuration for extreme-UV electrical discharge source
US6998785B1 (en) *	2001-07-13	2006-02-14	University Of Central Florida Research Foundation, Inc.	Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation
JP5098126B2 (en) *	2001-08-07	2012-12-12	株式会社ニコン	X-ray generator, exposure apparatus, exposure method, and device manufacturing method
US6714624B2 (en) *	2001-09-18	2004-03-30	Euv Llc	Discharge source with gas curtain for protecting optics from particles
US6654446B2 (en) *	2001-09-18	2003-11-25	Euv Llc	Capillary discharge source
JP2003288998A (en)	2002-03-27	2003-10-10	Ushio Inc	Extreme ultraviolet light source
KR20040020585A (en) *	2002-08-31	2004-03-09	최대규	extreme ultraviolet generator using plasma reactor
US6787788B2 (en) *	2003-01-21	2004-09-07	Melissa Shell	Electrode insulator materials for use in extreme ultraviolet electric discharge sources
JP2004226244A (en) *	2003-01-23	2004-08-12	Ushio Inc	Extreme ultraviolet light source and semiconductor exposure equipment
US7049614B2 (en) *	2003-03-10	2006-05-23	Intel Corporation	Electrode in a discharge produced plasma extreme ultraviolet source
US7081992B2 (en) *	2004-01-16	2006-07-25	Euv Llc	Condenser optic with sacrificial reflective surface
RU2278483C2 (en) *	2004-04-14	2006-06-20	Владимир Михайлович Борисов	Extreme ultraviolet source with rotary electrodes and method for producing extreme ultraviolet radiation from gas-discharge plasma
EP1779089A4 (en) *	2004-07-28	2010-03-24	Univ Community College Sys Nev	EXTREME ULTRAVIOLET RADIATION SOURCE WITH ELECTRODE DISCHARGE
US7251263B2 (en) *	2005-05-23	2007-07-31	Colorado State University Research Foundation	Capillary discharge x-ray laser
RU2383074C2 (en) *	2008-05-14	2010-02-27	Федеральное государственное предприятие "Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований" (ФГУП "ГНЦ РФ ТРИНИТИ")	Powerful euv radiation source
RU2373591C1 (en) *	2008-05-14	2009-11-20	Владимир Михайлович Борисов	Euv radiation source
CN102497718A (en) *	2011-11-21	2012-06-13	哈尔滨工业大学	Capillary for discharge plasma EUV light source with arc-shaped inner wall
CN103559993B (en) *	2013-11-20	2015-09-16	哈尔滨工业大学	Prepulsing is isolated inductance and is utilized the capillary discharging soft x-ray laser device of this inductance

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3609434A (en)	1967-07-19	1971-09-28	Nuclear Chicago Corp	High-temperature proportional counter and insulator construction therefor
US4937832A (en) *	1989-06-30	1990-06-26	Rocca Jorge J	Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma
US5499282A (en)	1994-05-02	1996-03-12	University Of Central Florida	Efficient narrow spectral width soft-X-ray discharge sources
US5577092A (en)	1995-01-25	1996-11-19	Kublak; Glenn D.	Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
US5963616A (en)	1997-03-11	1999-10-05	University Of Central Florida	Configurations, materials and wavelengths for EUV lithium plasma discharge lamps
US6031241A (en)	1997-03-11	2000-02-29	University Of Central Florida	Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications

2000
- 2000-06-13 US US09/594,746 patent/US6356618B1/en not_active Expired - Fee Related
2001
- 2001-05-03 AU AU2001259482A patent/AU2001259482A1/en not_active Abandoned
- 2001-05-03 WO PCT/US2001/014461 patent/WO2001097575A1/en not_active Ceased

Also Published As

Publication number	Publication date
US6356618B1 (en)	2002-03-12
WO2001097575A1 (en)	2001-12-20

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AU1402501A (en)	2001-05-30	Electrical power source
AU4583300A (en)	2001-10-30	Electrical power outlet
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AU2002308019A1 (en)	2002-10-03	Electrical power source
AUPQ795600A0 (en)	2000-06-29	Electric lamp