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AU2001245638A1 - Automated feed mechanism for electronic components of silicon wafer - Google Patents

Automated feed mechanism for electronic components of silicon wafer

Info

Publication number
AU2001245638A1
AU2001245638A1 AU2001245638A AU4563801A AU2001245638A1 AU 2001245638 A1 AU2001245638 A1 AU 2001245638A1 AU 2001245638 A AU2001245638 A AU 2001245638A AU 4563801 A AU4563801 A AU 4563801A AU 2001245638 A1 AU2001245638 A1 AU 2001245638A1
Authority
AU
Australia
Prior art keywords
electronic components
silicon wafer
feed mechanism
automated feed
automated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001245638A
Inventor
Brian Blades
James L. Dowling
Rodney P. Jackson
Lawrence F. Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laurier Inc
Original Assignee
Laurier Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Laurier Inc filed Critical Laurier Inc
Publication of AU2001245638A1 publication Critical patent/AU2001245638A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10P72/3402—
    • H10P72/3411—
AU2001245638A 2000-03-13 2001-03-13 Automated feed mechanism for electronic components of silicon wafer Abandoned AU2001245638A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US18871800P 2000-03-13 2000-03-13
US60188718 2000-03-13
PCT/US2001/007871 WO2001068489A1 (en) 2000-03-13 2001-03-13 Automated feed mechanism for electronic components of silicon wafer

Publications (1)

Publication Number Publication Date
AU2001245638A1 true AU2001245638A1 (en) 2001-09-24

Family

ID=22694239

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001245638A Abandoned AU2001245638A1 (en) 2000-03-13 2001-03-13 Automated feed mechanism for electronic components of silicon wafer

Country Status (2)

Country Link
AU (1) AU2001245638A1 (en)
WO (1) WO2001068489A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115274519B (en) * 2022-07-21 2024-02-23 无锡市华宇光微电子科技有限公司 A kind of chip material tube conveying and turning machine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3796782B2 (en) * 1995-11-13 2006-07-12 アシスト シンコー株式会社 Mechanical interface device
JP3624054B2 (en) * 1996-06-18 2005-02-23 東京エレクトロン株式会社 Processing apparatus and processing method
US6203582B1 (en) * 1996-07-15 2001-03-20 Semitool, Inc. Modular semiconductor workpiece processing tool
US5885045A (en) * 1997-03-17 1999-03-23 Fortrend Engineering Corporation Integrated wafer pod-load/unload and mass-transfer system
US6168667B1 (en) * 1997-05-30 2001-01-02 Tokyo Electron Limited Resist-processing apparatus
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism
US6217272B1 (en) * 1998-10-01 2001-04-17 Applied Science And Technology, Inc. In-line sputter deposition system

Also Published As

Publication number Publication date
WO2001068489A1 (en) 2001-09-20

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