[go: up one dir, main page]

AU2001242179A1 - System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object - Google Patents

System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object

Info

Publication number
AU2001242179A1
AU2001242179A1 AU2001242179A AU4217901A AU2001242179A1 AU 2001242179 A1 AU2001242179 A1 AU 2001242179A1 AU 2001242179 A AU2001242179 A AU 2001242179A AU 4217901 A AU4217901 A AU 4217901A AU 2001242179 A1 AU2001242179 A1 AU 2001242179A1
Authority
AU
Australia
Prior art keywords
shifted patterns
phase
simultaneous
patterns
multiple phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001242179A
Inventor
Michel Cantin
Alain Coulombe
Alexandre Nikitine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solvision Inc
Original Assignee
Solvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvision Inc filed Critical Solvision Inc
Publication of AU2001242179A1 publication Critical patent/AU2001242179A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/145—Illumination specially adapted for pattern recognition, e.g. using gratings
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06—Recognition of objects for industrial automation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A three-dimensional image grabber allowing for the simultaneous projection of multiple phase-shifted patterns onto an object, and the simultaneous acquisition of multiple images of these phase-shifted patterns is described herein. The grabber comprises a pattern projecting assembly and an image acquisition assembly. The pattern projecting assembly includes, for example, a spectral splitter or a plurality of light sources, grids and projectors for simultaneous projection of a plurality of patterns under different monochromatic lights. The image acquisition assembly includes, for example, a CCD camera sensitive to the different monochromatic lights, or a plurality of CCD cameras with filters to gather lights incoming for the object simultaneously illuminated by the plurality of phase-shifted patterns. A method and a system for measuring the relief of an object, using the above-mentioned process, is also disclosed.
AU2001242179A 2000-03-24 2001-03-20 System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object Abandoned AU2001242179A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CA2301822 2000-03-24
CA002301822A CA2301822A1 (en) 2000-03-24 2000-03-24 Simultaneous projection of several patterns with simultaneous acquisition for inspection of objects in three-dimensions
PCT/CA2001/000376 WO2001071279A1 (en) 2000-03-24 2001-03-20 System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object

Publications (1)

Publication Number Publication Date
AU2001242179A1 true AU2001242179A1 (en) 2001-10-03

Family

ID=4165604

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001242179A Abandoned AU2001242179A1 (en) 2000-03-24 2001-03-20 System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object

Country Status (12)

Country Link
US (2) US7079666B2 (en)
EP (1) EP1266187B1 (en)
JP (1) JP2003528303A (en)
KR (1) KR100815283B1 (en)
CN (1) CN1185464C (en)
AT (1) ATE347682T1 (en)
AU (1) AU2001242179A1 (en)
CA (1) CA2301822A1 (en)
DE (1) DE60125025T2 (en)
IL (1) IL151528A0 (en)
TW (1) TW571072B (en)
WO (1) WO2001071279A1 (en)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6917421B1 (en) 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
US7126699B1 (en) 2002-10-18 2006-10-24 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional metrology and/or inspection of a specimen
DE10254139A1 (en) * 2002-11-15 2004-05-27 Carl Zeiss Jena Gmbh Method and arrangement for the depth-resolved optical detection of a sample
US8319975B2 (en) * 2004-03-11 2012-11-27 Nano-Or Technologies (Israel) Ltd. Methods and apparatus for wavefront manipulations and improved 3-D measurements
US7161799B2 (en) * 2004-06-11 2007-01-09 Michael Z. Lim Thermal insulating board for laptop computers
US7111783B2 (en) * 2004-06-25 2006-09-26 Board Of Trustees Operating Michigan State University Automated dimensional inspection
US7433058B2 (en) * 2004-07-12 2008-10-07 Solvision Inc. System and method for simultaneous 3D height measurements on multiple sides of an object
US20060017936A1 (en) * 2004-07-22 2006-01-26 Michel Cantin Transparent object height measurement
US20060153427A1 (en) * 2005-01-12 2006-07-13 Zanzucchi Peter J Image methods for determining contour of terrain
JP4613626B2 (en) * 2005-02-04 2011-01-19 旭硝子株式会社 Mirror surface shape measuring method and apparatus, and inspection method and apparatus
DE102005046754A1 (en) 2005-09-29 2007-04-05 Carl Zeiss Jena Gmbh Specimen sensing device e.g. laser scanning microscope, has control unit alternatively connecting each recording pixel to analysis channels, such that detected light is divided into two portions phased in relation to one another
US7929751B2 (en) * 2005-11-09 2011-04-19 Gi, Llc Method and apparatus for absolute-coordinate three-dimensional surface imaging
US7545512B2 (en) 2006-01-26 2009-06-09 Koh Young Technology Inc. Method for automated measurement of three-dimensional shape of circuit boards
WO2008033329A2 (en) * 2006-09-15 2008-03-20 Sciammarella Cesar A System and method for analyzing displacements and contouring of surfaces
US20080117438A1 (en) * 2006-11-16 2008-05-22 Solvision Inc. System and method for object inspection using relief determination
KR101078876B1 (en) 2009-02-18 2011-11-01 연세대학교 산학협력단 Apparatus for measuring three-dimensional shape
KR101078877B1 (en) 2009-02-18 2011-11-01 연세대학교 산학협력단 Apparatus for measuring three-dimensional shape
US20100292955A1 (en) * 2009-05-15 2010-11-18 University Of Delaware Method and Apparatus for Measuring Microrelief of an Object
DE102010064593A1 (en) * 2009-05-21 2015-07-30 Koh Young Technology Inc. Form measuring device and method
EP2270424B1 (en) * 2009-07-02 2011-05-25 Sick Ag Opto-electronic sensor and monitoring method
JP4685971B2 (en) * 2009-09-24 2011-05-18 株式会社ケー・デー・イー Inspection system and inspection method
US8690063B2 (en) * 2012-05-01 2014-04-08 Symbol Technologies, Inc. Apparatus for and method of electro-optically reading direct part marking indicia by image capture
KR101308433B1 (en) * 2012-07-04 2013-09-12 한국광기술원 Method of dividing light source spectorum and processing its phase signal for enhancement of axial measurment range of optical-phase imaging system
CN102980511B (en) * 2012-08-23 2016-05-25 杭州先临三维科技股份有限公司 A kind of 3 D scanning system and scan method thereof that scans dynamic object
DE102013002399B4 (en) * 2013-02-13 2016-12-22 Chromasens Gmbh Device for generating light patterns with a one-dimensionally focused illumination device
EP2799810A1 (en) * 2013-04-30 2014-11-05 Aimess Services GmbH Apparatus and method for simultaneous three-dimensional measuring of surfaces with multiple wavelengths
JP2015114309A (en) * 2013-12-16 2015-06-22 株式会社オプトン Measuring device
WO2015175702A1 (en) 2014-05-14 2015-11-19 Kla-Tencor Corporation Image acquisition system, image acquisition method, and inspection system
KR101610148B1 (en) * 2014-11-17 2016-04-08 현대자동차 주식회사 System for inspecting vehicle body and method thereof
US10368720B2 (en) * 2014-11-20 2019-08-06 The Johns Hopkins University System for stereo reconstruction from monoscopic endoscope images
CN105043300A (en) * 2015-05-27 2015-11-11 东莞市盟拓光电科技有限公司 A 3D measurement system capable of simultaneously projecting the measured object from multiple directions
US9597839B2 (en) 2015-06-16 2017-03-21 Xerox Corporation System for adjusting operation of a printer during three-dimensional object printing to compensate for errors in object formation
WO2017060014A1 (en) * 2015-10-08 2017-04-13 Asml Netherlands B.V. Topography measurement system
CN105806253B (en) * 2016-04-18 2018-10-09 国家电网公司 A kind of detection method of settled date mirror surface-shaped
US10277842B1 (en) 2016-11-29 2019-04-30 X Development Llc Dynamic range for depth sensing
US20200080838A1 (en) * 2017-01-20 2020-03-12 Intekplus Co.,Ltd. Apparatus and method for measuring three-dimensional shape
US10036630B1 (en) 2017-05-22 2018-07-31 Asm Technology Singapore Pte Ltd Three-dimensional imaging using a multi-phase projector
TWI639829B (en) * 2017-06-21 2018-11-01 致茂電子股份有限公司 Solar cell detection method and detection system
CN112930468B (en) * 2018-11-08 2022-11-18 成都频泰鼎丰企业管理中心（有限合伙） Three-dimensional measuring device
US11450083B2 (en) * 2019-09-27 2022-09-20 Honeywell International Inc. Dual-pattern optical 3D dimensioning
US11639846B2 (en) 2019-09-27 2023-05-02 Honeywell International Inc. Dual-pattern optical 3D dimensioning
CN112113511B (en) * 2020-08-17 2021-11-23 上海交通大学 Method, system and terminal for extracting surface contour line of semitransparent object
CN112666698B (en) * 2021-01-27 2022-11-22 之江实验室 Dispersive super-surface-based fiber bundle multi-azimuth three-dimensional confocal imaging device and method
WO2022178678A1 (en) * 2021-02-23 2022-09-01 华为技术有限公司 Optical system, apparatus, and terminal

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821558A (en) * 1972-08-09 1974-06-28 Fleet Electronics Ltd Determination or monitoring of the distances of surfaces from reference positions
US3943278A (en) * 1974-08-22 1976-03-09 Stanford Research Institute Surface deformation gauging system by moire interferometry
DE2501015C2 (en) * 1975-01-13 1976-08-19 Siemens Ag Non-contact thickness measurement method
US4053234A (en) * 1975-02-18 1977-10-11 United Biscuits Limited Thickness measurement
US4192612A (en) * 1976-01-09 1980-03-11 Siemens Aktiengesellschaft Device for contact-free thickness measurement
US4051483A (en) * 1976-09-03 1977-09-27 Fuji Photo Optical Co., Ltd. System for measuring and recording three dimensional configuration of object
SE412286B (en) * 1978-07-10 1980-02-25 Saab Scania Ab SET AND DEVICE FOR PHOTOELECTRIC DIMENSION OF WIDES OR SIMILAR GEOMETRICALLY DETERMINED FORMS
DD151902A1 (en) * 1980-06-09 1981-11-11 Frank Schumann METHOD FOR DETERMINING THICKNESS OF ADHESIVE LAYERS ON BOOK BLOCK BACKS
EP0076866B1 (en) * 1981-10-09 1985-05-02 Ibm Deutschland Gmbh Interpolating light section process
US4525858A (en) * 1983-01-03 1985-06-25 General Electric Company Method and apparatus for reconstruction of three-dimensional surfaces from interference fringes
DE3338802A1 (en) * 1983-10-26 1985-05-09 Feldmühle AG, 4000 Düsseldorf DEVICE AND METHOD FOR TESTING MATERIAL LEVELS
JPH0820230B2 (en) * 1984-06-08 1996-03-04 オリンパス光学工業株式会社 Measuring endoscope
US4657394A (en) * 1984-09-14 1987-04-14 New York Institute Of Technology Apparatus and method for obtaining three dimensional surface contours
EP0214954A3 (en) * 1985-09-11 1989-03-22 RSF-Elektronik Gesellschaft m.b.H. Device to determine measures without touching by shadow-casting
JPS62239005A (en) * 1986-04-11 1987-10-19 Fuji Photo Film Co Ltd Surface shape inspecting instrument
US4796997A (en) * 1986-05-27 1989-01-10 Synthetic Vision Systems, Inc. Method and system for high-speed, 3-D imaging of an object at a vision station
US4736108A (en) * 1986-07-29 1988-04-05 Santana Engineering Systems Apparatus and method for testing coplanarity of semiconductor components
US4794550A (en) 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
US5085502A (en) * 1987-04-30 1992-02-04 Eastman Kodak Company Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions
US4803371A (en) * 1987-09-30 1989-02-07 The Coe Manufacturing Company Optical scanning method and apparatus useful for determining the configuration of an object
DE3803353A1 (en) * 1988-02-05 1989-08-17 Truetzschler & Co DEVICE FOR OBTAINING MEASURING SIZES THAT THE THICKNESS OF FIBER PROPERTIES PREPARED IN SPINNING PREPARATION, e.g. CARDBANDS OR THE LIKE CORRESPOND
DE3817559C1 (en) * 1988-05-24 1989-12-07 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
JPH0224502A (en) * 1988-07-12 1990-01-26 Dainippon Screen Mfg Co Ltd Film-thickness measuring method
JPH0641851B2 (en) * 1989-04-05 1994-06-01 日本鋼管株式会社 Measuring device for three-dimensional curved surface
US4959898A (en) * 1990-05-22 1990-10-02 Emhart Industries, Inc. Surface mount machine with lead coplanarity verifier
JP2949853B2 (en) * 1990-12-21 1999-09-20 株式会社ニコン Sample thickness measuring device
US5133601A (en) * 1991-06-12 1992-07-28 Wyko Corporation Rough surface profiler and method
DE4130237A1 (en) * 1991-09-11 1993-03-18 Zeiss Carl Fa METHOD AND DEVICE FOR THE THREE-DIMENSIONAL OPTICAL MEASUREMENT OF OBJECT SURFACES
US5175601A (en) * 1991-10-15 1992-12-29 Electro-Optical Information Systems High-speed 3-D surface measurement surface inspection and reverse-CAD system
US5327082A (en) * 1992-01-13 1994-07-05 Valmet Automation (Canada) Ltd. On line electromagnetic web thickness measuring apparatus incorporating a servomechanism with optical distance measuring
CA2067400A1 (en) * 1992-04-28 1993-10-29 Robert E. Bredberg Laser thickness gauge
EP0578207B1 (en) * 1992-07-06 1999-12-01 Microsoft Corporation Method for naming and binding objects
US5319445A (en) * 1992-09-08 1994-06-07 Fitts John M Hidden change distribution grating and use in 3D moire measurement sensors and CMM applications
WO1994014115A2 (en) * 1992-12-01 1994-06-23 Microsoft Corporation A method and system for in-place interaction with embedded objects
US5396332A (en) * 1993-02-08 1995-03-07 Ciszek; Theodoer F. Apparatus and method for measuring the thickness of a semiconductor wafer
DE59403176D1 (en) * 1993-10-29 1997-07-24 Ferag Ag Method and device for measuring the thickness of printed matter such as newspapers, magazines and parts thereof
US5668631A (en) * 1993-12-20 1997-09-16 Minolta Co., Ltd. Measuring system with improved method of reading image data of an object
US5608529A (en) * 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
JPH07218232A (en) * 1994-01-31 1995-08-18 Nikon Corp Optical three-dimensional shape measuring device
US5608259A (en) * 1994-03-02 1997-03-04 Deshazo; Thomas R. Reverse current flow prevention in a diffused resistor
US5465152A (en) * 1994-06-03 1995-11-07 Robotic Vision Systems, Inc. Method for coplanarity inspection of package or substrate warpage for ball grid arrays, column arrays, and similar structures
US5473432A (en) * 1994-09-12 1995-12-05 Hewlett-Packard Company Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens
US5592622A (en) * 1995-05-10 1997-01-07 3Com Corporation Network intermediate system with message passing architecture
US5909270A (en) * 1996-05-10 1999-06-01 California Institute Of Technology Conoscopic system for real-time corneal topography
JPH11513119A (en) 1996-07-12 1999-11-09 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ Method and apparatus for inspecting PCB
WO1998055826A2 (en) 1997-06-05 1998-12-10 Electronic Packaging Services, Ltd. Co. Measuring surface flatness using shadow moire technology and phase-stepping image processing
GB2326228B (en) * 1997-06-10 2000-05-24 British Aerospace Non-contact deformation measurement
US6573998B2 (en) * 1997-11-06 2003-06-03 Cynovad, Inc. Optoelectronic system using spatiochromatic triangulation
JPH11257930A (en) * 1998-03-13 1999-09-24 Nidek Co Ltd Three-dimensional shape measuring apparatus
CN1093935C (en) 1998-12-30 2002-11-06 西安交通大学 Three-dimensional contour phase measuring method and device for fast projection structure beam
CA2277855A1 (en) 1999-07-14 2001-01-14 Solvision Method and system of measuring the height of weld beads in a printed circuit
US6788210B1 (en) * 1999-09-16 2004-09-07 The Research Foundation Of State University Of New York Method and apparatus for three dimensional surface contouring and ranging using a digital video projection system

Also Published As

Publication number Publication date
CN1185464C (en) 2005-01-19
US20020018118A1 (en) 2002-02-14
WO2001071279A1 (en) 2001-09-27
DE60125025D1 (en) 2007-01-18
ATE347682T1 (en) 2006-12-15
CN1419647A (en) 2003-05-21
DE60125025T2 (en) 2007-07-05
US20070146727A1 (en) 2007-06-28
CA2301822A1 (en) 2001-09-24
TW571072B (en) 2004-01-11
KR20030009403A (en) 2003-01-29
IL151528A0 (en) 2003-04-10
US7079666B2 (en) 2006-07-18
US7403650B2 (en) 2008-07-22
EP1266187B1 (en) 2006-12-06
KR100815283B1 (en) 2008-03-19
EP1266187A1 (en) 2002-12-18
JP2003528303A (en) 2003-09-24

Similar Documents

Publication Publication Date Title
AU2001242179A1 (en) System for simultaneous projections of multiple phase-shifted patterns for the three-dimensional inspection of an object
WO1991006034A3 (en) Illumination system for a film scanner
US20040125205A1 (en) System and a method for high speed three-dimensional imaging
EP0496891A4 (en) Method and device for optical exposure
WO2002031575A3 (en) Method and apparatus for reducing laser speckle
CA2111744A1 (en) Illumination and imaging subsystems for a lens inspection system
GB2338858B (en) Microscopy imaging apparatus and method
EP0825472A3 (en) Projection-type display apparatus
DE69926908D1 (en) SYSTEM FOR CONTRASTING AND DECORATIVE IMAGE CAPTION
CA2370156A1 (en) Method for optically detecting the shape of objects
JPS6489430A (en) Position aligning method
ATE465403T1 (en) DEVICE FOR CALIBRATING IMAGING SYSTEMS FOR ANALYZING AGGLUTINATION REACTIONS
EP0763945A3 (en) Illumination optical system, projection optical system and display apparatus using the same
AU2003205981A1 (en) Microscopy imaging apparatus and mehod for generating an image
EP1293834A3 (en) Illumination apparatus
AU2897800A (en) Measuring positions or coplanarity of contact elements of an electronic component with a flat illumination and two cameras
EP1164386A3 (en) Method and apparatus for a color scannerless range imaging system
EP1065521A3 (en) Optoelectronic surveillance system
RU2447471C2 (en) Colour successive flash for obtaining digital images
CN117750167A (en) Image acquisition apparatus and method
TW429329B (en) An illumination and image acquisition system and a method for providing light generally at a constant level of luminance
IE20000838A1 (en) Machine vision
WO2019057879A1 (en) Photometric stereo system and method for inspecting objects with a one-shot camera and a computer program
MX9703033A (en) Center masking illumination system and method.
EP1014159A3 (en) Illumination apparatus and projection apparatus