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AU2001241499A1 - Methods and apparatus for a vertically-integrated sensor structure - Google Patents

Methods and apparatus for a vertically-integrated sensor structure

Info

Publication number
AU2001241499A1
AU2001241499A1 AU2001241499A AU4149901A AU2001241499A1 AU 2001241499 A1 AU2001241499 A1 AU 2001241499A1 AU 2001241499 A AU2001241499 A AU 2001241499A AU 4149901 A AU4149901 A AU 4149901A AU 2001241499 A1 AU2001241499 A1 AU 2001241499A1
Authority
AU
Australia
Prior art keywords
methods
sensor structure
integrated sensor
integrated
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001241499A
Inventor
William G. Mcdonald
David J. Monk
Mark Layne Shaw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of AU2001241499A1 publication Critical patent/AU2001241499A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0077—Other packages not provided for in groups B81B7/0035 - B81B7/0074
    • H10W72/5473—
    • H10W72/884—
    • H10W90/732—
    • H10W90/756—

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
AU2001241499A 2000-02-18 2001-02-15 Methods and apparatus for a vertically-integrated sensor structure Abandoned AU2001241499A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US50728000A 2000-02-18 2000-02-18
US09507280 2000-02-18
PCT/US2001/004850 WO2001060736A2 (en) 2000-02-18 2001-02-15 Methods and apparatus for a vertically-integrated sensor structure

Publications (1)

Publication Number Publication Date
AU2001241499A1 true AU2001241499A1 (en) 2001-08-27

Family

ID=24017988

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001241499A Abandoned AU2001241499A1 (en) 2000-02-18 2001-02-15 Methods and apparatus for a vertically-integrated sensor structure

Country Status (2)

Country Link
AU (1) AU2001241499A1 (en)
WO (1) WO2001060736A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006052468A1 (en) * 2006-11-07 2008-05-08 Robert Bosch Gmbh Micromechanical sensor with integrated chip capacitor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600071A (en) * 1995-09-05 1997-02-04 Motorola, Inc. Vertically integrated sensor structure and method
EP0793103A3 (en) * 1996-02-27 1998-10-07 Seiko Instruments R&D Center Inc. Semiconductor acceleration sensor
US6140144A (en) * 1996-08-08 2000-10-31 Integrated Sensing Systems, Inc. Method for packaging microsensors
JP3103526B2 (en) * 1998-03-20 2000-10-30 北陸電気工業株式会社 Pressure sensor and method of manufacturing the same
DE19830538A1 (en) * 1998-07-08 2000-01-20 Siemens Ag Pressure sensor arrangement, in particular for pressure detection in an oil-loaded pressure area of a motor vehicle transmission

Also Published As

Publication number Publication date
WO2001060736A2 (en) 2001-08-23
WO2001060736A3 (en) 2002-03-21

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