[go: up one dir, main page]

ATE364478T1 - Polierverfahren - Google Patents

Polierverfahren

Info

Publication number
ATE364478T1
ATE364478T1 AT02008298T AT02008298T ATE364478T1 AT E364478 T1 ATE364478 T1 AT E364478T1 AT 02008298 T AT02008298 T AT 02008298T AT 02008298 T AT02008298 T AT 02008298T AT E364478 T1 ATE364478 T1 AT E364478T1
Authority
AT
Austria
Prior art keywords
polishing process
substrate
grinding
polishing
diamond
Prior art date
Application number
AT02008298T
Other languages
English (en)
Inventor
Hisao Yamamoto
Fumiaki Saito
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Application granted granted Critical
Publication of ATE364478T1 publication Critical patent/ATE364478T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B24D13/145—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face having a brush-like working surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/10—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
AT02008298T 2001-04-25 2002-04-23 Polierverfahren ATE364478T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001127978 2001-04-25

Publications (1)

Publication Number Publication Date
ATE364478T1 true ATE364478T1 (de) 2007-07-15

Family

ID=18976756

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02008298T ATE364478T1 (de) 2001-04-25 2002-04-23 Polierverfahren

Country Status (4)

Country Link
US (1) US6811469B2 (de)
EP (1) EP1260316B1 (de)
AT (1) ATE364478T1 (de)
DE (1) DE60220583T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002270614A (ja) * 2001-03-12 2002-09-20 Canon Inc Ｓｏｉ基体、その熱処理方法、それを有する半導体装置およびその製造方法
US7081047B2 (en) * 2004-05-21 2006-07-25 Epoxi-Tech, Inc. Bristle brush for concrete sanding
US7988539B2 (en) * 2004-05-21 2011-08-02 Epoxi-Tech, Inc. Abrasive cleaning device
ITPC20060042A1 (it) * 2006-09-29 2008-03-30 Tecnosint Srl Utensile da utilizzare su macchine per la lucidatura di piastrelle, marmi o simili
US7690970B2 (en) * 2007-01-19 2010-04-06 Epoxy-Tech, Inc. Abrasive preparation device with an improved abrasion element assembly
CA2871241A1 (en) * 2008-04-03 2009-10-08 Caesarstone Sdot-Yam Ltd. Patterned artificial marble slab
DE102008063228A1 (de) * 2008-12-22 2010-06-24 Peter Wolters Gmbh Vorrichtung zur beidseitigen schleifenden Bearbeitung flacher Werkstücke
TWM417989U (en) * 2011-01-28 2011-12-11 Green Energy Technology Inc Grinding mechanism
US9266220B2 (en) 2011-12-30 2016-02-23 Saint-Gobain Abrasives, Inc. Abrasive articles and method of forming same
USD699037S1 (en) * 2013-03-22 2014-02-11 Cheneta Morrison Scrub brush
CN103551973A (zh) * 2013-11-08 2014-02-05 谢泽 一种含纤维绳和热膨胀树脂空心微球的抛光轮
WO2021034790A1 (en) 2019-08-19 2021-02-25 Diamabrush Llc Floor polishing apparatus
CN120395705B (zh) * 2025-04-29 2025-12-05 山东大学 一种基于仿仙人掌导润微结构的自润滑砂轮及制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561214A (en) * 1978-10-12 1985-12-31 Inoue-Japax Research Incorporated Abrading tool
USRE31745E (en) * 1980-02-04 1984-11-27 Flo-Pac Corporation Composite brush
US5903951A (en) * 1995-11-16 1999-05-18 Minnesota Mining And Manufacturing Company Molded brush segment
US5895612A (en) * 1996-01-11 1999-04-20 Jason Incorporated Method of making abrading tools
TW362057B (en) * 1996-08-05 1999-06-21 Hh Patent As Method for the deburring of items
JPH11126755A (ja) * 1997-10-22 1999-05-11 Sumitomo Metal Ind Ltd 半導体熱処理用ボートの製造方法
JP2000119079A (ja) 1998-08-11 2000-04-25 Toshiba Ceramics Co Ltd 半導体熱処理用Ｓｉ−ＳｉＣ製部材およびその製造方法
JP2000124143A (ja) 1998-10-20 2000-04-28 Tokyo Electron Ltd 熱処理装置
JP2000263447A (ja) * 1999-01-14 2000-09-26 Taimei Chemicals Co Ltd 研磨材
US6190769B1 (en) * 1999-02-19 2001-02-20 E. I. Du Pont De Nemours And Company Abrasive filaments of plasticized polyamides
JP4065078B2 (ja) * 1999-05-13 2008-03-19 不二越機械工業株式会社 ディスク鏡面面取り装置

Also Published As

Publication number Publication date
DE60220583T2 (de) 2008-02-14
EP1260316A1 (de) 2002-11-27
US6811469B2 (en) 2004-11-02
DE60220583D1 (de) 2007-07-26
EP1260316B1 (de) 2007-06-13
US20020182983A1 (en) 2002-12-05

Similar Documents

Publication Publication Date Title
ATE355933T1 (de) Schleifartikel zur modifizierung einer halbleiterscheibe
DE60220583D1 (de) Polierverfahren
DE50205791D1 (de) Schleifscheibe mit Schleifsegmenten
ATE311958T1 (de) Artikel mit flixiertem schleifmittel zum verändern einer halbleiterscheibe
BR0211633A (pt) Pluralidade de partìculas abrasivas, método para fabricar partìculas abrasivas, artigo abrasivo, e, método para abradar uma superfìcie
DE60225956D1 (de) Schleifmittelzusammensetzung und Polierverfahren unter Verwendung derselben
DE60003015D1 (de) Schleifartikel, verfahren zur herstellung desselben, und schleifvorrichtung
ZA200805902B (en) Methods and tool for maintenance of hard surfaces, and a method for manufacturing such a tool
DE60130578D1 (de) Schleifstoff und polierverfahren
MXPA03008728A (es) Composicion limpiadora que incluye un blanqueador y para utilizarse en superficies duras.
MY133452A (en) Polishing method for wafer and holding plate
ATE353739T1 (de) Werkzeugträger
ITRM20010677A1 (it) Levigatrice per incavi di estremita' di pezzi tubolari utilizzabile per la generica smerigliatura.
ITTO990169A1 (it) Attrezzo per molatura, pulitura o lucidatura azionato in rotazione.
BR0113393A (pt) Ferramenta de polimento
WO2005035194A3 (en) Stacked pad and method of use
SG83757A1 (en) Powder composition and method for polishing stone
ITFI20000013A0 (it) Macchina per calibrare, levigare, lucidare graniti ed altre pietre, con piu' utensili singolarmente azionati
FR2803788B1 (fr) Article abrasif, notamment pour le meulage, le brossage, le polissage, le lavage et/ou le nettoyage, et procede de fabrication d'un tel article
DE10082744D2 (de) Antriebseinrichtung für einen Schleif-, Läpp- oder Polier-Werkzeugkörper
FR2676019B3 (fr) Ponceuse portative, notamment destinee au poncage de pieces en bois.
TW448812U (en) Device for polishing, grinding and washing the surface of a filament
IT1311106B1 (it) Manicotto di nastro abrasivo per macchine smerigliatrici .
ITBO990223A0 (it) Manicotto di nastro abrasivo per macchine smerigliatrici .
IT237846Y1 (it) Utensile da lavoro applicabile su levigatrici,smerigliatrici osimili,atto particolarmente all'abrasione di superfici

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties