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AR088019A1 - METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL - Google Patents

METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL

Info

Publication number
AR088019A1
AR088019A1 ARP110102121A AR088019A1 AR 088019 A1 AR088019 A1 AR 088019A1 AR P110102121 A ARP110102121 A AR P110102121A AR 088019 A1 AR088019 A1 AR 088019A1
Authority
AR
Argentina
Prior art keywords
protuberance
heating
curvature
magnitude
coefficient
Prior art date
Application number
Other languages
Spanish (es)
Inventor
Eduardo Martinez Oscar
Mingolo Nelida
Original Assignee
Consejo Nac Invest Cient Tec
Tolket S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Nac Invest Cient Tec, Tolket S R L filed Critical Consejo Nac Invest Cient Tec
Priority to ARP110102121 priority Critical patent/AR088019A1/en
Priority to PCT/IB2012/053043 priority patent/WO2012172524A1/en
Publication of AR088019A1 publication Critical patent/AR088019A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Se irradia el material bajo ensayo con un haz de calentamiento de modo de deformar la superficie del material formando una protuberancia sobre la misma. Al mismo tiempo se hace incidir un haz de medición sobre la superficie de modo que es reflejada por la protuberancia, produciendo un haz dispersado por la curvatura de la protuberancia que es detectado mediante una abertura pequeña a modo de filtro espacial ubicada en un punto más cerca o más lejos que la distancia confocal. La transmisión del haz a través de la abertura disfocal varía en función de la curvatura de la protuberancia inducida por calentamiento. La señal de transmisión permite determinar la magnitud de la dilatación inducida. Dicha magnitud y su dependencia con la frecuencia de la modulación permite determinar propiedades físicas como el coeficiente de dilatación o el de difusividad térmica, el espesor de la película de recubrimiento o el coeficiente de absorción de la luz incidente en el haz de calentamiento. Variando la longitud de onda de la radiación incidente es posible determinar el espectro de absorción de la muestra aún para partículas de muy pequeño tamaño en que la fracción de energía absorbida es minúscula.The material under test is irradiated with a heating beam so as to deform the surface of the material forming a protuberance thereon. At the same time, a measuring beam is incised on the surface so that it is reflected by the protuberance, producing a beam dispersed by the curvature of the protuberance that is detected by a small opening as a spatial filter located at a closer point. or farther than the confocal distance. The transmission of the beam through the disfocal opening varies depending on the curvature of the heating-induced protuberance. The transmission signal allows to determine the magnitude of the induced dilation. Said magnitude and its dependence with the frequency of the modulation allows to determine physical properties such as the coefficient of expansion or thermal diffusivity, the thickness of the coating film or the coefficient of absorption of the light incident in the heating beam. By varying the wavelength of the incident radiation it is possible to determine the absorption spectrum of the sample even for very small particles in which the fraction of absorbed energy is tiny.

ARP110102121 2011-06-17 2011-06-17 METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL AR088019A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ARP110102121 AR088019A1 (en) 2011-06-17 2011-06-17 METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL
PCT/IB2012/053043 WO2012172524A1 (en) 2011-06-17 2012-06-15 Method and photothermal apparatus for contactless determination of thermal and optical properties of material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ARP110102121 AR088019A1 (en) 2011-06-17 2011-06-17 METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL

Publications (1)

Publication Number Publication Date
AR088019A1 true AR088019A1 (en) 2014-05-07

Family

ID=46601860

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP110102121 AR088019A1 (en) 2011-06-17 2011-06-17 METHOD AND PHOTOTHERMAL DEVICE FOR THE NON-CONTACT DETERMINATION OF THERMAL AND OPTICAL PROPERTIES OF A MATERIAL

Country Status (2)

Country Link
AR (1) AR088019A1 (en)
WO (1) WO2012172524A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10751832B2 (en) * 2017-07-18 2020-08-25 Jtekt Corporation Optical non-destructive inspection method and optical non-destructive inspection apparatus
CN111818434B (en) * 2020-06-30 2022-03-25 歌尔微电子有限公司 MEMS sensor and electronic device
CN120102492B (en) * 2025-05-12 2025-07-29 北京特思迪半导体设备有限公司 Method and device for determining absorbance of light-transmitting flat piece

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4522510A (en) * 1982-07-26 1985-06-11 Therma-Wave, Inc. Thin film thickness measurement with thermal waves
US5377006A (en) * 1991-05-20 1994-12-27 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
US5645351A (en) * 1992-05-20 1997-07-08 Hitachi, Ltd. Temperature measuring method using thermal expansion and an apparatus for carrying out the same
CA2126481C (en) 1994-06-22 2001-03-27 Andreas Mandelis Non-contact photothermal method for measuring thermal diffusivity and electronic defect properties of solids
DE10013172C2 (en) 2000-03-17 2002-05-16 Wagner Internat Ag Altstaetten Method and device for the photothermal analysis of a material layer, in particular for measuring the layer thickness
US20020011852A1 (en) 2000-03-21 2002-01-31 Andreas Mandelis Non-contact photothermal radiometric metrologies and instrumentation for characterization of semiconductor wafers, devices and non electronic materials
US7230708B2 (en) 2000-12-28 2007-06-12 Dmitri Olegovich Lapotko Method and device for photothermal examination of microinhomogeneities
US20020094580A1 (en) 2001-01-16 2002-07-18 Jorgenson James W. Photothermal absorbance detection apparatus and method of using same
US6917039B2 (en) 2002-02-13 2005-07-12 Therma-Wave, Inc. Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system
US6965434B2 (en) 2002-09-13 2005-11-15 Centre National De La Recherche Scientifiques (C.N.R.S.) Method and device for photothermal imaging tiny metal particles immersed in a given medium
US6756591B1 (en) 2003-03-14 2004-06-29 Centre National De La Recherche Method and device for photothermal imaging tiny particles immersed in a given medium
US7075058B2 (en) 2003-03-28 2006-07-11 The United States Of America As Represented By The United States Department Of Energy Photothermal imaging scanning microscopy
AR070418A1 (en) * 2009-02-12 2010-04-07 Consejo Nac Invest Cient Tec METHOD AND APPLIANCE TO DETERMINE THE EXPANSION OF A MATERIAL THROUGH A FOCUS ERROR SENSOR DEVICE

Also Published As

Publication number Publication date
WO2012172524A1 (en) 2012-12-20

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Legal Events

Date Code Title Description
FG Grant, registration
FD Application declared void or lapsed, e.g., due to non-payment of fee