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NO985623L - Tynnfilmtransistor og fremgangsmÕte for fremstilling av samme - Google Patents

Tynnfilmtransistor og fremgangsmÕte for fremstilling av samme

Info

Publication number
NO985623L
NO985623L NO985623A NO985623A NO985623L NO 985623 L NO985623 L NO 985623L NO 985623 A NO985623 A NO 985623A NO 985623 A NO985623 A NO 985623A NO 985623 L NO985623 L NO 985623L
Authority
NO
Norway
Prior art keywords
thin film
film transistor
making same
making
same
Prior art date
Application number
NO985623A
Other languages
English (en)
Other versions
NO985623D0 (no
Inventor
Hitoshi Oka
Yutaka Ito
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Publication of NO985623D0 publication Critical patent/NO985623D0/no
Publication of NO985623L publication Critical patent/NO985623L/no

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0314Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral top-gate TFTs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
NO985623A 1997-12-04 1998-12-02 Tynnfilmtransistor og fremgangsmÕte for fremstilling av samme NO985623L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9333883A JPH11168216A (ja) 1997-12-04 1997-12-04 薄膜トランジスタおよびその製造方法

Publications (2)

Publication Number Publication Date
NO985623D0 NO985623D0 (no) 1998-12-02
NO985623L true NO985623L (no) 1999-06-07

Family

ID=18271027

Family Applications (1)

Application Number Title Priority Date Filing Date
NO985623A NO985623L (no) 1997-12-04 1998-12-02 Tynnfilmtransistor og fremgangsmÕte for fremstilling av samme

Country Status (4)

Country Link
US (1) US6184541B1 (no)
EP (1) EP0921576A3 (no)
JP (1) JPH11168216A (no)
NO (1) NO985623L (no)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020060322A1 (en) * 2000-11-20 2002-05-23 Hiroshi Tanabe Thin film transistor having high mobility and high on-current and method for manufacturing the same
KR100483985B1 (ko) * 2001-11-27 2005-04-15 삼성에스디아이 주식회사 박막 트랜지스터용 다결정 실리콘 박막 및 이를 사용한디바이스
KR100501700B1 (ko) 2002-12-16 2005-07-18 삼성에스디아이 주식회사 엘디디/오프셋 구조를 구비하고 있는 박막 트랜지스터
TW200537573A (en) * 2004-04-23 2005-11-16 Ulvac Inc Thin-film transistor and production method thereof
KR102044667B1 (ko) * 2013-05-28 2019-11-14 엘지디스플레이 주식회사 산화물 박막 트랜지스터를 구비한 평판표시장치 및 그의 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05308081A (ja) 1992-04-30 1993-11-19 Toshiba Corp 多結晶シリコン薄膜トランジスタおよびその製造方法
JPH098314A (ja) 1995-06-26 1997-01-10 Sharp Corp 薄膜トランジスタ

Also Published As

Publication number Publication date
US6184541B1 (en) 2001-02-06
NO985623D0 (no) 1998-12-02
JPH11168216A (ja) 1999-06-22
EP0921576A2 (en) 1999-06-09
EP0921576A3 (en) 1999-11-03

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Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application