NO20080929L - Anordning for elektromagnetisk silisiumstoping og fremgangsmate for a drifte denne anordning - Google Patents
Anordning for elektromagnetisk silisiumstoping og fremgangsmate for a drifte denne anordningInfo
- Publication number
- NO20080929L NO20080929L NO20080929A NO20080929A NO20080929L NO 20080929 L NO20080929 L NO 20080929L NO 20080929 A NO20080929 A NO 20080929A NO 20080929 A NO20080929 A NO 20080929A NO 20080929 L NO20080929 L NO 20080929L
- Authority
- NO
- Norway
- Prior art keywords
- induction
- silicon
- power source
- frequency
- electromagnetic
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 4
- 229910052710 silicon Inorganic materials 0.000 title abstract 4
- 239000010703 silicon Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 2
- 230000006698 induction Effects 0.000 abstract 5
- 238000005266 casting Methods 0.000 abstract 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 238000009749 continuous casting Methods 0.000 abstract 1
- 230000001276 controlling effect Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/01—Continuous casting of metals, i.e. casting in indefinite lengths without moulds, e.g. on molten surfaces
- B22D11/015—Continuous casting of metals, i.e. casting in indefinite lengths without moulds, e.g. on molten surfaces using magnetic field for conformation, i.e. the metal is not in contact with a mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/001—Continuous casting of metals, i.e. casting in indefinite lengths of specific alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
- B22D11/16—Controlling or regulating processes or operations
- B22D11/18—Controlling or regulating processes or operations for pouring
- B22D11/181—Controlling or regulating processes or operations for pouring responsive to molten metal level or slag level
- B22D11/182—Controlling or regulating processes or operations for pouring responsive to molten metal level or slag level by measuring temperature
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/001—Continuous growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
En fremgangsmåte for å drifte en elektromagnetisk støpeanordning for silisium tar i betraktning: målinger av overflatetemperaturen til støpeblokken og temperaturen til varmeovnen; regulering av induksjonsfrekvensen for den elektromagnetiske støpeprosessen; regulering av utgangseffekten for kraftkilden til oppvarmingsanordningen basert på den målte overflatetemperaturen til det størknede silisiumet; og regulering av induksjonsfrekvensen for induksjonskraftkilden basert på den målte induksjonsfrekvensen til kraftkilden til induksjonsspolen; følgelig er det mulig å sikre en bemerkelsesverdig sikkerhet og produktivitet ved kontinuerlig støping av silisiumblokken, og dermed gjøre det mulig å lette produksjon av en polykrystallinsk silisiumhalvlederblokk, som har bred anvendelse for sikker drift.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2005/015132 WO2007020706A1 (ja) | 2005-08-19 | 2005-08-19 | シリコン電磁鋳造装置およびその操作方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO20080929L true NO20080929L (no) | 2008-03-13 |
Family
ID=37757378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20080929A NO20080929L (no) | 2005-08-19 | 2008-02-25 | Anordning for elektromagnetisk silisiumstoping og fremgangsmate for a drifte denne anordning |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090321996A1 (no) |
| EP (1) | EP1930483A4 (no) |
| JP (1) | JP4317575B2 (no) |
| NO (1) | NO20080929L (no) |
| WO (1) | WO2007020706A1 (no) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101530106B1 (ko) * | 2007-10-12 | 2015-06-18 | 아작스 토코 마그네서믹 코포레이션 | 반액상 금속 처리 및 감지 장치, 이의 이용 방법 |
| US20100148403A1 (en) * | 2008-12-16 | 2010-06-17 | Bp Corporation North America Inc. | Systems and Methods For Manufacturing Cast Silicon |
| US7888158B1 (en) | 2009-07-21 | 2011-02-15 | Sears Jr James B | System and method for making a photovoltaic unit |
| UA95131C2 (uk) * | 2009-08-25 | 2011-07-11 | Частное Акционерное Общество «Пиллар» | Спосіб одержання зливків мультикристалічного кремнію індукційним методом |
| CA2779659C (en) | 2009-11-20 | 2020-05-05 | Kyojiro Kaneko | Silicon electromagnetic casting apparatus |
| JP2011173775A (ja) * | 2010-02-25 | 2011-09-08 | Sumco Corp | シリコンインゴットの連続鋳造方法 |
| CN101829767B (zh) * | 2010-05-26 | 2013-10-09 | 丽达科技有限公司 | 硅电磁铸造装置 |
| JP2012025600A (ja) * | 2010-07-21 | 2012-02-09 | Sumco Corp | シリコンインゴットの電磁鋳造装置 |
| CN102021645B (zh) * | 2010-12-28 | 2012-07-04 | 哈尔滨工业大学 | 一种具有定向凝固组织多晶硅锭的制备方法 |
| CN102094233B (zh) * | 2010-12-28 | 2012-07-04 | 哈尔滨工业大学 | 一种具有定向凝固组织多晶硅锭的制备装置 |
| CN102286778B (zh) * | 2011-08-08 | 2014-02-19 | 宁夏日晶新能源装备股份有限公司 | 多晶炉红外测温装置及采用多晶炉红外测温装置的多晶炉 |
| CN102286780B (zh) * | 2011-08-30 | 2014-04-16 | 宁夏日晶新能源装备股份有限公司 | 多晶炉红外控温装置及采用多晶炉红外控温装置的多晶炉 |
| CN102677165A (zh) * | 2012-04-13 | 2012-09-19 | 浙江精功科技股份有限公司 | 多晶硅铸锭炉铸锭熔化状态检测方法及相应的检测装置 |
| US9315917B2 (en) | 2012-07-30 | 2016-04-19 | Solar World Industries America Inc. | Apparatus and method for the production of ingots |
| CN102797039A (zh) * | 2012-08-21 | 2012-11-28 | 北京科技大学 | 一种利用电磁法生产超纯多晶硅锭的装置及方法 |
| WO2019070699A1 (en) | 2017-10-05 | 2019-04-11 | Lam Research Corporation | ELECTROMAGNETIC CASTING SYSTEMS COMPRISING FURNACES AND MOLDS FOR PRODUCING SILICON TUBES |
| JP6607652B1 (ja) | 2018-03-29 | 2019-11-20 | 株式会社クリスタルシステム | 単結晶製造装置 |
| CN110546314B (zh) * | 2018-03-29 | 2021-04-02 | 株式会社水晶系统 | 单晶制造装置 |
| US11856678B2 (en) * | 2019-10-29 | 2023-12-26 | Senic Inc. | Method of measuring a graphite article, apparatus for a measurement, and ingot growing system |
| JP2023122837A (ja) * | 2022-02-24 | 2023-09-05 | 国立大学法人東北大学 | 結晶成長方法および装置 |
| CN119772141B (zh) * | 2024-12-23 | 2025-11-18 | 深圳市鸿富诚新材料股份有限公司 | 一种精准控温液态金属散热垫片高效制备方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4446562A (en) * | 1981-10-13 | 1984-05-01 | Electric Power Rsearch Institute, Inc. | Method and apparatus for measuring crucible level of molten metal |
| KR870000714B1 (ko) * | 1981-11-18 | 1987-04-09 | 하세가와 겐고오 | 수평 연속 주조방법 |
| DE68913237T2 (de) * | 1988-07-05 | 1994-09-29 | Osaka Titanium | Siliciumgiessvorrichtung. |
| JP2660225B2 (ja) * | 1988-08-11 | 1997-10-08 | 住友シチックス株式会社 | シリコン鋳造装置 |
| JPH0365588A (ja) * | 1989-08-02 | 1991-03-20 | Komatsu Denshi Kinzoku Kk | 単結晶成長制御方法及び該制御方法を用いた単結晶製造方法 |
| US5528620A (en) * | 1993-10-06 | 1996-06-18 | Fuji Electric Co., Ltd. | Levitating and melting apparatus and method of operating the same |
| EP0821082B1 (en) * | 1996-06-27 | 1999-01-20 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Process and apparatus for controlling the growth of a crystal |
| JP3523986B2 (ja) * | 1997-07-02 | 2004-04-26 | シャープ株式会社 | 多結晶半導体の製造方法および製造装置 |
| JP2000264775A (ja) * | 1999-03-23 | 2000-09-26 | Sumitomo Sitix Amagasaki:Kk | 電磁誘導鋳造装置 |
| EP1254861B1 (en) * | 2000-12-28 | 2008-01-30 | Sumco Corporation | Silicon continuous casting method |
-
2005
- 2005-08-19 EP EP05780341A patent/EP1930483A4/en not_active Withdrawn
- 2005-08-19 US US11/990,487 patent/US20090321996A1/en not_active Abandoned
- 2005-08-19 WO PCT/JP2005/015132 patent/WO2007020706A1/ja not_active Ceased
- 2005-08-19 JP JP2007530888A patent/JP4317575B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-25 NO NO20080929A patent/NO20080929L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JP4317575B2 (ja) | 2009-08-19 |
| EP1930483A1 (en) | 2008-06-11 |
| US20090321996A1 (en) | 2009-12-31 |
| EP1930483A4 (en) | 2011-10-19 |
| JPWO2007020706A1 (ja) | 2009-02-19 |
| WO2007020706A1 (ja) | 2007-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| NO20080929L (no) | Anordning for elektromagnetisk silisiumstoping og fremgangsmate for a drifte denne anordning | |
| WO2009133283A3 (fr) | Procede d'auto-equilibrage d'un dispositif de chauffage | |
| MY205221A (en) | Aerosol-generating device and method for controlling a heater of an aerosol-generating device | |
| TW200608178A (en) | Method of auto-regulating rotational speed of a fan | |
| WO2011140491A3 (en) | Circuit for controlling temperature and enabling testing of a semiconductor chip | |
| TW200736847A (en) | Lithographic apparatus and device manufacturing method | |
| BR0212482A (pt) | Método para produzir uma tira de aço elétrico de grão orientado | |
| TW200627513A (en) | Control process, temperature control process, temperature regulator, heat treatment, program and recordable medium | |
| TW200734149A (en) | Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control | |
| MX2009011979A (es) | Metodo de descoquificacion de serpentin radiante de horno de etileno. | |
| TW201129728A (en) | High-temperature process improvements using helium under regulated pressure | |
| DE60210667D1 (de) | Methode und vorrichtung zur regelung der temperatur von elektrischen komponenten und der stromverbrauchsrate durch busweitenrekonfiguration | |
| WO2010088338A3 (en) | Rapid cooling of a substrate by motion | |
| CN103397171A (zh) | 一种确定钢坯加热炉炉温设定值的方法 | |
| MX2023007642A (es) | Dispositivo generador de aerosol y sistema que comprende un dispositivo de calentamiento inductivo y metodo de operacion del mismo. | |
| TW200705543A (en) | Controlling system for gate formation of semiconductor devices | |
| MX2009011417A (es) | Metodo y aparato para tratar materiales utilizando lamparas sin electrodo. | |
| MY166009A (en) | Method and apparatus for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber | |
| GB201207548D0 (en) | Hair styling appliance | |
| AU2016265016A8 (en) | Boron nitride nanotube synthesis via direct induction | |
| WO2012041469A3 (de) | Vorrichtung und verfahren zur aufstellung eines regelorgans des gasdruckes einer koksofenkammer ohne dehnungsbedingte abweichung der regelanordnung | |
| IL156179A0 (en) | Method for thermally treating substrates | |
| MX2015002419A (es) | Procedimiento de descarboxilacion de derivados de acido 3,5-bis(haloalquil)-pirazol-4-carboxilico. | |
| TW200715086A (en) | Apparatus for controlling fluid temperature and method thereof | |
| WO2012144740A3 (ko) | 온도 자가조절형 면상발열체를 적용한 전기레인지 및 그 제조방법 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FC2A | Withdrawal, rejection or dismissal of laid open patent application | ||
| ERR | Erratum |
Free format text: I PATENTTIDENDE NR. 14/09 BLE PATENTSOKNAD NR. 20080929 FEILAKTIG KUNNGJORT HENLAGT. SOKNADEN ER FORTSATT UNDER BEHANDLING. |
|
| FC2A | Withdrawal, rejection or dismissal of laid open patent application |