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NO20020936D0 - Fremgangsmåte for fremstilling av rotasjonssymmetrisk kvartssmeltedigel og anordning for utföring av fremgangsmåten - Google Patents

Fremgangsmåte for fremstilling av rotasjonssymmetrisk kvartssmeltedigel og anordning for utföring av fremgangsmåten

Info

Publication number
NO20020936D0
NO20020936D0 NO20020936A NO20020936A NO20020936D0 NO 20020936 D0 NO20020936 D0 NO 20020936D0 NO 20020936 A NO20020936 A NO 20020936A NO 20020936 A NO20020936 A NO 20020936A NO 20020936 D0 NO20020936 D0 NO 20020936D0
Authority
NO
Norway
Prior art keywords
carrying
rotationally symmetrical
quartz crucible
producing rotationally
symmetrical quartz
Prior art date
Application number
NO20020936A
Other languages
English (en)
Other versions
NO20020936L (no
Inventor
Johann Leist
Rolf Goebel
Helmut Fritz
Original Assignee
Heraeus Quarzglas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas filed Critical Heraeus Quarzglas
Publication of NO20020936L publication Critical patent/NO20020936L/no
Publication of NO20020936D0 publication Critical patent/NO20020936D0/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Discharge Heating (AREA)
NO20020936A 2000-07-11 2002-02-26 Fremgangsmåte for fremstilling av rotasjonssymmetrisk kvartssmeltedigel og anordning for utföring av fremgangsmåten NO20020936D0 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10033632A DE10033632C1 (de) 2000-07-11 2000-07-11 Vorrichtung zur Herstellung rotationssymmetrischer Quarzglastiegel
PCT/EP2001/007858 WO2002004368A1 (de) 2000-07-11 2001-07-09 Verfahren und vorrichtung zur herstellung rotationssymmetrischer quarzglastiegel

Publications (2)

Publication Number Publication Date
NO20020936L NO20020936L (no) 2002-02-26
NO20020936D0 true NO20020936D0 (no) 2002-02-26

Family

ID=7648526

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20020936A NO20020936D0 (no) 2000-07-11 2002-02-26 Fremgangsmåte for fremstilling av rotasjonssymmetrisk kvartssmeltedigel og anordning for utföring av fremgangsmåten

Country Status (8)

Country Link
US (1) US7350378B2 (no)
EP (1) EP1299316B1 (no)
JP (1) JP4758597B2 (no)
KR (1) KR20020029786A (no)
CN (1) CN1204069C (no)
DE (2) DE10033632C1 (no)
NO (1) NO20020936D0 (no)
WO (1) WO2002004368A1 (no)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4300333B2 (ja) * 2002-03-14 2009-07-22 ジャパンスーパークォーツ株式会社 リング状アークによる石英ガラスルツボの製造方法と装置およびその石英ガラスルツボ
EP2226300B1 (en) * 2007-11-30 2016-11-09 Japan Super Quartz Corporation Method for manufacturing quartz glass crucible
JP5562518B2 (ja) * 2007-12-28 2014-07-30 株式会社Ｓｕｍｃｏ 石英ガラスルツボ製造装置の電極構造
JP4879220B2 (ja) * 2008-05-28 2012-02-22 ジャパンスーパークォーツ株式会社 石英ガラスルツボとその製造方法
KR101156965B1 (ko) * 2008-07-03 2012-06-20 쟈판 스파 쿼츠 가부시키가이샤 석영 유리 도가니의 제조 방법, 그에 의해 제조된 석영유리 도가니 및, 그의 제조 장치
CN101618941B (zh) * 2008-07-04 2012-04-11 日本超精石英株式会社 石英玻璃坩埚的制造方法、石英玻璃坩埚以及石英玻璃坩埚的制造装置
EP2141130B1 (en) * 2008-07-04 2011-09-28 Japan Super Quartz Corporation Method for producing vitreous silica crucible
US20100000465A1 (en) * 2008-07-07 2010-01-07 Japan Super Quartz Corporation Method for producing vitreous silica crucible
JP5142912B2 (ja) * 2008-09-22 2013-02-13 ジャパンスーパークォーツ株式会社 アーク放電方法、アーク放電装置、石英ガラスルツボ製造装置
US8240169B2 (en) * 2009-01-08 2012-08-14 Japan Super Quartz Corporation Vitreous silica crucible manufacturing apparatus
US8739573B2 (en) * 2009-08-12 2014-06-03 Japan Super Quartz Corporation Apparatus and method for manufacturing vitreous silica crucible
JP5453679B2 (ja) * 2009-10-02 2014-03-26 株式会社Ｓｕｍｃｏ シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
JP5397857B2 (ja) * 2009-10-20 2014-01-22 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法および製造装置
JP5605903B2 (ja) * 2010-12-02 2014-10-15 株式会社Ｓｕｍｃｏ シリカガラスルツボ製造装置
US9221709B2 (en) * 2011-03-31 2015-12-29 Raytheon Company Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
US9193620B2 (en) 2011-03-31 2015-11-24 Raytheon Company Fused silica body with vitreous silica inner layer, and method for making same
US8281620B1 (en) * 2011-04-27 2012-10-09 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
US20120272687A1 (en) * 2011-04-27 2012-11-01 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
CN102219360B (zh) * 2011-05-08 2013-01-09 江苏润弛太阳能材料科技有限公司 多晶硅铸锭免喷涂熔融石英坩埚的制造方法
JP6457498B2 (ja) * 2013-05-23 2019-01-23 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 半導体処理チャンバ用の被覆されたライナーアセンブリ
JP7157932B2 (ja) * 2019-01-11 2022-10-21 株式会社Sumco シリカガラスルツボの製造装置および製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
JP4285788B2 (ja) * 1996-03-14 2009-06-24 信越石英株式会社 単結晶引き上げ用大口径石英るつぼの製造方法
JP3764776B2 (ja) 1996-03-18 2006-04-12 信越石英株式会社 単結晶引き上げ用石英ガラスるつぼ及びその製造方法
EP0911429A1 (en) 1997-09-30 1999-04-28 Heraeus Quarzglas GmbH Quartz glass crucible for producing silicon single crystal and method for producing the crucible
JP4140868B2 (ja) * 1998-08-31 2008-08-27 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
US6143073A (en) * 1998-11-19 2000-11-07 Heraeus Shin-Etsu America Methods and apparatus for minimizing white point defects in quartz glass crucibles
DE19962452B4 (de) * 1999-12-22 2004-03-18 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung von opakem Quarzglas
US20040118156A1 (en) * 2001-03-08 2004-06-24 Gabriele Korus Method of producing a quartz glass crucible
JP4300333B2 (ja) * 2002-03-14 2009-07-22 ジャパンスーパークォーツ株式会社 リング状アークによる石英ガラスルツボの製造方法と装置およびその石英ガラスルツボ

Also Published As

Publication number Publication date
CN1386111A (zh) 2002-12-18
EP1299316A1 (de) 2003-04-09
WO2002004368A1 (de) 2002-01-17
US7350378B2 (en) 2008-04-01
KR20020029786A (ko) 2002-04-19
NO20020936L (no) 2002-02-26
JP2004502630A (ja) 2004-01-29
DE10033632C1 (de) 2002-01-03
US20020170316A1 (en) 2002-11-21
JP4758597B2 (ja) 2011-08-31
DE50100807D1 (de) 2003-11-20
CN1204069C (zh) 2005-06-01
EP1299316B1 (de) 2003-10-15

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