NL7808162A - Elektronenbundelinrichting. - Google Patents

Elektronenbundelinrichting.

Info

Publication number: NL7808162A
Authority: NL; Netherlands
Prior art keywords: electron beam; beam device; electron
Prior art date: 1977-08-10

Application number

NL787808162A

Other languages

English (en)

Dutch (nl)

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-08-10

Filing date

1978-08-03

Publication date

1979-02-13

1978-08-03 Application filed by Ibm filed Critical Ibm

1979-02-13 Publication of NL7808162A publication Critical patent/NL7808162A/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)
Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

NL787808162A 1977-08-10 1978-08-03 Elektronenbundelinrichting. NL7808162A (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US82335277A	1977-08-10	1977-08-10

Publications (1)

Publication Number	Publication Date
NL7808162A true NL7808162A (nl)	1979-02-13

Family

ID=25238513

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL787808162A NL7808162A (nl)	1977-08-10	1978-08-03	Elektronenbundelinrichting.

Country Status (9)

Country	Link
JP (1)	JPS5429981A (it)
BR (1)	BR7804994A (it)
CH (1)	CH631574A5 (it)
DE (1)	DE2834391C2 (it)
FR (1)	FR2400256A1 (it)
GB (1)	GB1598219A (it)
IT (1)	IT1112285B (it)
NL (1)	NL7808162A (it)
SE (1)	SE425838B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5435173U (it) *	1977-08-12	1979-03-07
JPS5463681A (en) *	1977-10-29	1979-05-22	Nippon Aviotronics Kk	Electron beam exposure device
FR2488043A1 (fr) *	1980-07-30	1982-02-05	Le N Proizv	Dispositif a optique electronique pour l'etude d'echantillons
JPS57206173A (en) *	1981-06-15	1982-12-17	Nippon Telegr & Teleph Corp <Ntt>	Focusing deflecting device for charged corpuscule beam
JPS61183926A (ja) *	1985-02-08	1986-08-16	Toshiba Corp	荷電ビ−ム照射装置
JPS62206828A (ja) *	1986-03-06	1987-09-11	Nec Corp	荷電粒子線描画装置
JPH02246318A (ja) *	1989-03-20	1990-10-02	Fujitsu Ltd	荷電粒子ビーム露光装置
JP2746098B2 (ja) *	1994-01-19	1998-04-28	日本電気株式会社	電子ビーム描画用アパーチャおよび電子ビーム描画方法
JP3206448B2 (ja)	1996-08-30	2001-09-10	日本電気株式会社	電子ビーム描画装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3644700A (en) *	1969-12-15	1972-02-22	Ibm	Method and apparatus for controlling an electron beam
DE2460716C2 (de) *	1974-12-19	1976-12-30	Siemens Ag	Korpuskularstrahloptisches geraet zur korpuskelbestrahlung eines praeparats
US3956635A (en) *	1975-06-13	1976-05-11	International Business Machines Corporation	Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS5251871A (en) *	1975-10-23	1977-04-26	Rikagaku Kenkyusho	Projecting method for charge particle beams
JPS5283177A (en) *	1975-12-31	1977-07-11	Fujitsu Ltd	Electron beam exposure device
GB1557924A (en) *	1976-02-05	1979-12-19	Western Electric Co	Irradiation apparatus and methods
FR2351497A1 (fr) *	1976-05-14	1977-12-09	Thomson Csf	Dispositif permettant le trace programme de figures de formes differentes
JPS5357764A (en) *	1976-11-04	1978-05-25	Fujitsu Ltd	Electron beam exposure apparatus
CA1166766A (en) *	1977-02-23	1984-05-01	Hans C. Pfeiffer	Method and apparatus for forming a variable size electron beam
US4182958A (en) *	1977-05-31	1980-01-08	Rikagaku Kenkyusho	Method and apparatus for projecting a beam of electrically charged particles

1978
- 1978-05-10 GB GB18816/78A patent/GB1598219A/en not_active Expired
- 1978-06-29 FR FR7820120A patent/FR2400256A1/fr active Granted
- 1978-07-07 CH CH740878A patent/CH631574A5/de not_active IP Right Cessation
- 1978-07-12 JP JP8411578A patent/JPS5429981A/ja active Granted
- 1978-07-26 IT IT26097/78A patent/IT1112285B/it active
- 1978-08-02 SE SE7808326A patent/SE425838B/sv not_active IP Right Cessation
- 1978-08-03 BR BR7804994A patent/BR7804994A/pt unknown
- 1978-08-03 NL NL787808162A patent/NL7808162A/xx not_active Application Discontinuation
- 1978-08-05 DE DE2834391A patent/DE2834391C2/de not_active Expired

Also Published As

Publication number	Publication date
BR7804994A (pt)	1979-04-17
FR2400256B1 (it)	1982-02-05
SE425838B (sv)	1982-11-15
DE2834391C2 (de)	1986-04-17
GB1598219A (en)	1981-09-16
JPS5438035B2 (it)	1979-11-19
SE7808326L (sv)	1979-02-11
FR2400256A1 (fr)	1979-03-09
IT7826097A0 (it)	1978-07-26
DE2834391A1 (de)	1979-02-22
JPS5429981A (en)	1979-03-06
IT1112285B (it)	1986-01-13
CH631574A5 (en)	1982-08-13

Publication	Publication Date	Title
BE865203A (fr)	1978-09-22	Hogedruk-kwikdampontladingslamp.
NL7810782A (nl)	1979-05-02	Vliegtuig.
NL7805121A (nl)	1978-11-15	Gesubstitueerde fenylaminocarbonylbenzamiden.
NL7811716A (nl)	1979-06-06	Elektronenmicroscoop.
NO144379C (no)	1981-08-19	Sugeanker.
NL7810809A (nl)	1979-05-03	Electronenbundelbelichtingsinrichting.
NL7804145A (nl)	1978-10-20	Gesubstitueerde octanen.
NL7802346A (nl)	1978-12-12	Basnoot-generatie-inrichting.
NL7712216A (nl)	1979-05-09	Monopulsradarapparaat.
NL7800100A (nl)	1978-07-11	Radarinrichting.
NL7807754A (nl)	1979-01-23	Elektronenbuis.
NL7808162A (nl)	1979-02-13	Elektronenbundelinrichting.
NO783145L (no)	1979-03-20	Bjelkebeslag.
NL7800467A (nl)	1978-06-30	Elektronenradiografisch apparaat.
FI803979A7 (fi)	1981-06-28	Elektronisuihkuun vaikuttava laite.
IT7825454A0 (it)	1978-07-07	Anodo.
NL7710481A (nl)	1978-03-29	Ligger.
NL175496C (nl)	1984-11-16	Bestralingsinrichting.
NO781576L (no)	1978-11-10	Anode.
NL7604112A (nl)	1976-10-19	Elektronenbundelinrichting.
NL7809703A (nl)	1979-03-27	Bestralingsapparaat.
NL7807161A (nl)	1979-04-27	Elektronenradiografisch apparaat.
NL7713096A (nl)	1978-08-21	Gesubstitueerde alaninen.
ES231268Y (es)	1978-05-16	Viga semirresistente metalica.
ES226954Y (es)	1977-08-16	Viga perfeccionada.

Legal Events

Date	Code	Title
1981-03-25	BA	A request for search or an international-type search has been filed
1981-03-25	BB	A search report has been drawn up
1985-01-01	A85	Still pending on 85-01-01
1985-10-01	BV	The patent application has lapsed