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NL7514325A - GUIDE SYSTEM FOR INTEGRATED CIRCUITS OF THE THIN FILM AND HYBRID TYPE. - Google Patents

GUIDE SYSTEM FOR INTEGRATED CIRCUITS OF THE THIN FILM AND HYBRID TYPE.

Info

Publication number
NL7514325A
NL7514325A NL7514325A NL7514325A NL7514325A NL 7514325 A NL7514325 A NL 7514325A NL 7514325 A NL7514325 A NL 7514325A NL 7514325 A NL7514325 A NL 7514325A NL 7514325 A NL7514325 A NL 7514325A
Authority
NL
Netherlands
Prior art keywords
thin film
integrated circuits
guide system
hybrid type
hybrid
Prior art date
Application number
NL7514325A
Other languages
Dutch (nl)
Other versions
NL185249B (en
NL185249C (en
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/531,430 external-priority patent/US4068022A/en
Priority claimed from US05/576,711 external-priority patent/US4016050A/en
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of NL7514325A publication Critical patent/NL7514325A/en
Publication of NL185249B publication Critical patent/NL185249B/en
Application granted granted Critical
Publication of NL185249C publication Critical patent/NL185249C/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/623Porosity of the layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/244Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components
    • H10W70/05
    • H10W70/66
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0364Conductor shape
    • H05K2201/0367Metallic bump or raised conductor not used as solder bump
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/062Etching masks consisting of metals or alloys or metallic inorganic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating Methods And Accessories (AREA)
NLAANVRAGE7514325,A 1974-12-10 1975-12-09 METHOD FOR MANUFACTURING ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATE NL185249C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/531,430 US4068022A (en) 1974-12-10 1974-12-10 Methods of strengthening bonds
US05/576,711 US4016050A (en) 1975-05-12 1975-05-12 Conduction system for thin film and hybrid integrated circuits

Publications (3)

Publication Number Publication Date
NL7514325A true NL7514325A (en) 1976-06-14
NL185249B NL185249B (en) 1989-09-18
NL185249C NL185249C (en) 1990-02-16

Family

ID=27063541

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7514325,A NL185249C (en) 1974-12-10 1975-12-09 METHOD FOR MANUFACTURING ELECTRICAL CONDUCTORS ON AN INSULATING SUBSTRATE

Country Status (8)

Country Link
JP (1) JPS6032311B2 (en)
DE (1) DE2554691C2 (en)
ES (1) ES443346A1 (en)
FR (1) FR2294610A1 (en)
GB (1) GB1527108A (en)
IT (1) IT1051461B (en)
NL (1) NL185249C (en)
SE (1) SE427400B (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153518A (en) * 1977-11-18 1979-05-08 Tektronix, Inc. Method of making a metalized substrate having a thin film barrier layer
JPS54127572A (en) * 1978-03-28 1979-10-03 Oki Electric Ind Co Ltd Thin film circuit
DE2833919C2 (en) * 1978-08-02 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Process for the production of electrical layer circuits on plastic foils
JPS5559795A (en) * 1978-10-30 1980-05-06 Nippon Electric Co Printed circuit board and method of manufacturing same
DE2965814D1 (en) * 1979-03-21 1983-08-11 Bbc Brown Boveri & Cie Thin film resistor having a high temperature coefficient and method of manufacturing the same
FR2476913B1 (en) * 1980-02-25 1985-09-13 Nippon Electric Co MULTI-LAYERED CIRCUIT FOR LARGE-SCALE INTEGRATION AND METHOD FOR MANUFACTURING THE SAME
DE3029382A1 (en) * 1980-08-01 1982-03-04 Siemens AG, 1000 Berlin und 8000 München Conductor pattern for semiconductor device on insulating substrate - where multilayer pattern includes palladium covered by palladium oxide and then gold
DE3029277C2 (en) * 1980-08-01 1983-10-20 Siemens AG, 1000 Berlin und 8000 München Build-up of metal layers
DE3107943A1 (en) * 1981-03-02 1982-09-16 Siemens AG, 1000 Berlin und 8000 München METHOD FOR THE PRODUCTION OF SOLDERABLE AND TEMPERATURE-ENDED METAL-FREE THICK-LAYER CONDUCTORS
JPS57198696A (en) * 1981-06-01 1982-12-06 Shimada Rika Kogyo Kk Method of producing thin film circuit
DE3207659A1 (en) * 1982-03-03 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Thin-film circuits with through-contact holes
US4463059A (en) * 1982-06-30 1984-07-31 International Business Machines Corporation Layered metal film structures for LSI chip carriers adapted for solder bonding and wire bonding
JPS59167096A (en) * 1983-03-11 1984-09-20 日本電気株式会社 Circuit board
JPS60140897A (en) * 1983-12-28 1985-07-25 日本電気株式会社 Resin insulated multilayer board
DE3433251A1 (en) * 1984-08-16 1986-02-27 Robert Bosch Gmbh, 7000 Stuttgart METHOD FOR PRODUCING GALVANIC SOLDER LAYERS ON INORGANIC SUBSTRATES
US4808274A (en) * 1986-09-10 1989-02-28 Engelhard Corporation Metallized substrates and process for producing
DE3785720T2 (en) * 1986-09-25 1993-08-12 Toshiba Kawasaki Kk METHOD FOR PRODUCING A FILM CARRIER.
JPH03108797A (en) * 1989-09-22 1991-05-08 Ngk Spark Plug Co Ltd Multilayer wiring board and manufacture thereof
DE4017181C2 (en) * 1990-05-29 1998-08-27 Daimler Benz Aerospace Ag Electrical component
WO1992015117A1 (en) * 1991-02-25 1992-09-03 Sumitomo Electric Industries, Ltd. Wiring board
US5449955A (en) * 1994-04-01 1995-09-12 At&T Corp. Film circuit metal system for use with bumped IC packages
DE10004453B4 (en) * 2000-02-03 2009-08-13 Ust Umweltsensortechnik Gmbh Electric fuse and method for its manufacture
JP2003101222A (en) * 2001-09-21 2003-04-04 Sony Corp Thin film circuit board device and method of manufacturing the same
CN116093573A (en) * 2022-12-14 2023-05-09 北京航天微电科技有限公司 Microstrip circuit preparation method and microstrip ring spacer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7106898U (en) * 1970-03-06 1971-05-27 Motorola Inc Integrated hybrid circuit

Also Published As

Publication number Publication date
JPS6032311B2 (en) 1985-07-27
JPS51101864A (en) 1976-09-08
NL185249B (en) 1989-09-18
SE427400B (en) 1983-03-28
DE2554691C2 (en) 1982-11-18
ES443346A1 (en) 1977-08-16
SE7513853L (en) 1976-06-11
FR2294610B1 (en) 1980-03-21
NL185249C (en) 1990-02-16
DE2554691A1 (en) 1976-06-16
GB1527108A (en) 1978-10-04
IT1051461B (en) 1981-04-21
FR2294610A1 (en) 1976-07-09

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V4 Discontinued because of reaching the maximum lifetime of a patent

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