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NL2034478B1 - An aberration compensating unit and method, and a light optical device comprising such a unit. - Google Patents

An aberration compensating unit and method, and a light optical device comprising such a unit. Download PDF

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Publication number
NL2034478B1
NL2034478B1 NL2034478A NL2034478A NL2034478B1 NL 2034478 B1 NL2034478 B1 NL 2034478B1 NL 2034478 A NL2034478 A NL 2034478A NL 2034478 A NL2034478 A NL 2034478A NL 2034478 B1 NL2034478 B1 NL 2034478B1
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NL
Netherlands
Prior art keywords
spatial light
light modulator
compensation unit
aberration compensation
light
Prior art date
Application number
NL2034478A
Other languages
Dutch (nl)
Inventor
Micha Vellekoop Ivo
Wang Tzu-Lun
Gintoli Michele
Original Assignee
Univ Twente
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Filing date
Publication date
Application filed by Univ Twente filed Critical Univ Twente
Priority to NL2034478A priority Critical patent/NL2034478B1/en
Priority to PCT/NL2024/050151 priority patent/WO2024205405A1/en
Application granted granted Critical
Publication of NL2034478B1 publication Critical patent/NL2034478B1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/004—Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)

Abstract

The invention relates to an aberration compensating unit, a light optical device comprising such an aberration compensating unit, and a method for providing an. aberration. compensation. or correction. in such. a light 5 optical device. The aberration compensating unit comprises a series arrangement of a spatial light modulator, and a multi—focus element. The multi—focus element is configured to focus light from. the spatial light :modulator‘ into an arrangement of multiple foci distributed over a focus plane 10 of the Hmlti—focus element. In the light optical device, the aberration compensating unit is arranged in an optical path of the light optical device between a light source and an objective lens. Both the spatial light modulator and the multi—focus element are configured for providing an at 15 least partial compensation or correction of one or more of the optical components in the light optical device.

Description

No. P141871NL01
An aberration compensating unit and method, and a light optical device comprising such a unit.
BACKGROUND
The invention relates to an aberration compensating unit for use in a light optical device, a method for aberration compensation in a light optical device, and a light optical device comprising such an aberration compensating unit. In particular, the invention relates to a light optical device comprising, inter alia, an illumination system, more in particular for use in industrial applications, such as laser drilling, 3D laser writing and 3D printing, and/or imaging systems, such as inspection systems or microscope systems.
For both the illumination systems and the imaging systems, there is a drive to develop systems with a higher throughput. One possibility for obtaining a higher throughput is to develop systems with a larger Field Of
View (FOV), while maintaining a resolution on the micrometer scale or smaller.
In known light optical systems, a strong focusing of light at positions spaced apart from the optical axis is impeded by optical aberrations. In addition, the frequent need to focus light of more than one wavelength, further adds chromatic aberrations to the optical aberrations.
The current strategy to achieve strong focusing is to use an assembly of multiple lenses, which required a highly accurate and lengthy design and manufacturing processes. The end result is usually a bulky assembly, where lenses, made in different sizes and from different glass-materials, are positioned in series, with tight tolerances in spacing and centering. Following this strategy to design a light optical system with a FOV in a range of millimeters will result in lens assemblies tens of centimeters large, with weights in the range of kilos, and prices in the range of tens of thousands of euros or more.
These figures are likely to increase more than quadratically for a light optical system with a FOV in a range of centimeters.
SUMMARY OF THE INVENTION
It is an object of the present invention to at least partially solve at least one of the above mentioned problems.
It is a further object to provide an aberration compensating unit to provide at least a partial compensation or correction of optical aberrations of the optical components in the light optical device at positions in the FOV which are spaced apart from the optical axis of the light optical device.
According to a first aspect, the present invention pertains to an aberration compensating unit for use in a light optical device, wherein the aberration compensating unit comprises a series arrangement of a spatial light modulator, and a multi-focus element, wherein the multi-focus element is configured to focus light from the spatial light modulator into an arrangement of multiple foci distributed over a focus plane of the multi-focus element.
On the one hand, the multi-focus element provides an arrangement of foci, which can be distributed over the whole desired FOV. Accordingly, the multi-focus element focusses the light on multiple positions in the FOV which are spaced apart from the optical axis of the light optical device. Furthermore, each individual focusing part of the multi-focus element has individual free-form surfaces and/or structures, which can be tailored to at least partially compensate for the aberration(s) at the corresponding position in the FOV.
On the other hand, the multi-focus element focusses the light from the spatial light modulator.
Accordingly, regions on the spatial light modulator are relayed onto individual focusing parts of the multi-focus element, and these regions of the spatial light modulator can be configured to provide a further compensation of aberrations which have not been, or which will not be compensated by the {focusing parts of the multi-focus element at the corresponding positions in the FOV.
Accordingly, by combining the multi-focus element to provide an arrangement of foci, which can be distributed over the whole desired FOV, an at least partial aberration compensation or correction by the multi-focus element, and a further at least partial aberration compensation or correction by the spatial light modulator, the aberration compensating unit of the present invention provides the means for compensating or correcting of optical aberrations of the optical components in the light optical device at least at the multiple positions of the foci in the desired FOV which are spaced apart from the optical axis of the light optical device, and for obtaining a high resolution in the micrometer scale or lower at least at each focus of the arrangement of foci.
It is noted that the multi-focus element of the present invention is configured to provide multiple foci in parallel and distributed over a focus plane which extends in a direction with a (large) component perpendicular to the optical axis of the multi-focus element, or substantially perpendicular to the optical axis of the multi-focus element. This is different from a multi-focal element, which is known in the art, which multi-focal element provides multiple foci in series along the optical axis of the multi-focal element.
It is further noted that the arrangement of foci refers to the distribution of the individual focal point in the focus plane. This distribution may be a regular arrangement in an array or grid, but it may also be a circular or even a pseudo random pattern.
In an embodiment, the aberration compensating unit further comprises relay optics, wherein the relay optics are arranged in between the spatial light modulator and the multi-focus element. Due to the relay optics, regions on the spatial light modulator are accurately relayed onto individual focusing parts of the multi-focus element.
In an embodiment, the spatial light modulator and multi-focus element are arranged in conjugated planes of the relay optics. In this configuration, non-overlapping regions on the spatial light modulator are imaged onto the individual focusing parts of the multi-focus element, and due to the different non-overlapping regions of the spatial light modulator, each one of said regions can be controlled to provide a compensation or correction of aberrations for the corresponding focusing part of the multi-focus element only. Accordingly, an aberration correction or compensation by the spatial light modulator for one focusing part of the multi-focus element can be made independent from an aberration correction or compensation by the spatial light modulator for another {focusing part of the multi-focus element. The spatial separation of the regions on the spatial light modulator also allows to use wavefront shaping procedure to be performed simultaneously on all the beamlets created by the multi-focus element.
It is noted that when a transmissive spatial light modulator is used, the relay optics may be omitted and the multi-focus element can be placed directly behind the spatial light modulator
It is further noted that the multi-focus element may comprise a diffractive element, a refractive element, or a reflective element. An example of a diffractive element is an optical element with diffractive structures
(which may even overlap) which diffract the incoming light and focusses this light in an arrangement of multiple foci in a focus plane. An example of a refractive element is an optical element comprising an array of micro-lenses, 5 wherein each micro-lens focuses the light in one of the multiple foci of the arrangement of multiple foci. An example of a reflective element is an optical element with multiple curved mirrors, wherein each curved mirror focuses the light in one of the multiple foci of the arrangement of multiple foci.
In a preferred embodiment, the multi-focus element comprises a micro-lens array, wherein said micro- lens array comprises an array of micro-lenses. Each micro- lens of the micro-lens array provides one focus of the arrangement of foci and as such provides an individual focusing part of the multi-focus element.
It is noted that in a more elaborate embodiment, the multi-focus element may also comprise a phase plate or grating arrangement, configured for providing a desired arrangement of foci in a focus plane. In these type of diffractive elements, the grating or phase plate structures in the diffractive element of providing different foci, may at least partially overlap, as long as the imprinted phase pattern in the grating or phase plate structure replicates the interference pattern between the desired wavefronts, with respect to the phase and/or amplitude of the wavefronts, to provide the desired arrangement of foci in the {focus plane. When using a micro-lens array, the individual micro-lens surfaces usually do not overlap and each micro-lens usually has its own aperture, which usually does not overlap with an aperture of another one of the micro-lenses of the micro-lens array.
In an embodiment, said array of micro-lenses are arranged on a non-flat substrate. Such a micro-lens array provides a grid of foci, wherein the foci are arranged on a non-flat surface, which allows to compensate or correct for field curvature in a light optical device. In particular when the light optical device comprises a relatively simple objective lens with a large FOV, the focus plane of the objective lens is likely to be curved. In order to compensate for this none-flat focus plane, also denoted herein as field curvature, the substrate of the micro-lens array 1s configured to introduce a compensating field curvature in a plane, preferably a conjugate plane, upstream of the objective lens, wherein the compensating field curvature is configured to produce a substantially flat focus plane of the objective lens over the FOV.
In an embodiment, the spatial light modulator is a reflective spatial light modulator. Such a spatial light modulator may comprise a liquid crystal device, a Digital
Micromirror Device (DMD), or a Membrane-based Deformable
Mirror (MDM), for example.
In an embodiment, the aberration compensating unit comprises an optical input element which is configured for directing an incoming optical beam towards the spatial light modulator, wherein the optical input element is arranged at a side of the spatial light modulator that is facing the multi-focus element, and wherein the optical input element is preferably arranged at a position spaced apart from a center line between the spatial light modulator and the multi-focus element, in particular between a center of the spatial light modulator and a center of the multi-focus element. By using an optical input element at a position spaced apart from the center line between the spatial light modulator and the multi- focus element, the optical input element can be arranged such that it does not interfere with and/or partially obstructs the light optical beam from the spatial light modulator to the multi-focus element.
In an embodiment, the optical input element comprises a reflective element, preferably a mirror.
In an embodiment, the reflective spatial light modulator comprises an array of reflective elements which are configured for generating a blazed phase pattern or a
: blazed optical phase difference pattern for providing an optimized reflection efficiency in a first diffraction order and/or in a direction substantially parallel to the center line between the spatial light modulator and the multi-focus element. Accordingly, the spatial light modulator is configured to maximize the optical power in the diffraction order that is directed towards the multi- focus element, while the residual power in the other orders, in particular the zeroth order, is minimized.
In an embodiment, the aberration compensating unit comprises a beam stop which is configured for blocking the zeroth order reflected light from the reflective spatial light modulator, wherein the beam stop is preferably arranged at a position spaced apart from the center line between the spatial light modulator and the multi-focus element. By using the beam stop for blocking the zeroth order reflected light from the spatial light modulator, an interference of the zeroth order light with the correction pattern directed to the multi-focus element can be substantially prevented.
In an embodiment, the beam stop and the optical input element are arranged at opposite sides of the center line between the spatial light modulator and the multi- focus element.
In an embodiment, the relay optics comprises a first relay lens and a second relay lens arranged on the center line between the spatial light modulator and the multi-focus element, wherein in between the first and second relay lenses a focal point of the first relay lens substantially coincides with a focal point of the second relay lens. This intermediate focal point can be used for positioning a spatial filter and/or an aperture at or near this intermediate focal point for further preventing that light from other diffraction orders than the desired order comprising the correction pattern is transmitted towards the multi-focus element. In addition, the intermediate focal point allows to place the optical input element and/or the beams stop close to, but still spaced apart from, the center line between the spatial light modulator and the multi-focus element. Accordingly, in an embodiment, the optical input element and/or the beam stop are arranged in or near a focal plane and spaced apart from the focal point of the first relay lens in between the first and second relay lenses.
In an embodiment, the optical input element is configured to direct an incoming optical beam towards the spatial light modulator via the first relay lens, wherein the aberration compensating unit further comprises an input lens which is arranged such that a focal point of the input lens is arranged in a focal plane of the first relay lens.
In an embodiment, the optical input element is arranged between the input lens and the first relay lens.
Accordingly, the light optical input beam which, in use, impinges on the spatial light modulator is a collimated light beam, non-perpendicular to a reflective surface of the spatial light modulator.
According to a second aspect, the present invention pertains to a light optical device comprising an aberration compensating unit as described above. By providing the light optical device with an aberration compensating unit, or an embodiment thereof, as described above, the light optical device is configured to deliver an arrangement of foci in its image or focus plane which are preferably distributed over the whole FOV and which are provided with an aberration compensation in order to obtain a high resolution in the micrometer scale or lower at least at each focus of said arrangement of foci. Preferably, the multi-focus element is configured to provide a correction or compensation for most aberrations and for the field curvature of the optics of the light optical device, whereas the spatial light modular is configured to provide additional corrections for, for example, manufacturing tolerances of the multi-focus element, chromatic corrections and/or sample induced aberrations.
In an embodiment, said light optical device comprises a light source and an objective lens, wherein the aberration compensating unit is arranged in an optical path of the light optical device between the light source and the objective lens.
In an embodiment, the light optical device is configured for imaging the arrangement of multiple foci distributed over the focus plane of the multi-focus element in an image plane of the objective lens.
In an embodiment, said light optical device comprises a scanning element, wherein the scanning element is arranged in the optical path of the light optical device between the aberration compensating unit and the objective lens. This embodiment allows to scan the arrangement of foci in the image plane of the objective lens in order to effectively irradiate each point in the desired FOV in the image plane, in particular with the high resolution defined by each of the foci in the arrangement of multiple foci.
In an embodiment, the arrangement of foci is configured such that the separation between individual foci of said arrangement of foci is equal or shorter than an isoplanatic patch diameter of the optical device. When the scanning element operates with a simple objective lens of the light optical device, the FOV is likely to be affected by spatially variable aberrations. A correction matching the aberrations at a specific position can be provided, but this match will only be valid within a limited region, known as the isoplanatic patch. Beyond this region, the aberration type and strength will change to a point where the resulting focus is not diffraction-limited anymore. By configuring the arrangement of foci with a separation equal or shorter than the isoplanatic patch diameter, parallel wave front shaping can be used to provide diffraction- limited focusing at every position in the FOV. As the beamlets will now be scanned within the isoplanatic patch, the corrections provided by the aberration compensating unit will always match the aberrations across the scanning area.
According to a third aspect, the present invention pertains to a method for providing an aberration compensation or correction in a light optical device, wherein the method comprises the steps of: providing the light optical device, wherein the light optical device comprises an arrangement of optical components which comprises a light source, an aberration compensating unit and an objective lens, wherein the aberration compensating unit is arranged in an optical path of the light optical device between the light source and the objective lens, wherein the aberration compensating unit comprises a series arrangement of a spatial light modulator and a multi-focus element, wherein the multi- focus element is configured to focus light from the spatial light modulator into an arrangement of multiple foci distributed over a focus plane of the multi-focus element, in particular distributed over a desired field of view; directing a light beam from the light source to the spatial light modulator, wherein at least a part of the light beam is directed from the spatial light modulator towards the multi-focus element, and wherein the multi- focus element focusses said at least a part of the incoming light beam into the arrangement of multiple foci; controlling the spatial light modulator for providing an aberration compensation and/or correction for each focus of said arrangement of multiple foci in order to at least partially compensate and/or correct for aberrations of one or more of the optical components of the light optical device.
It is noted that the spatial light modulator can also be used for changing the depth of each individual focus of the arrangement of multiple foci, or for introducing aberrations or deformations of the focus on purpose, for instance by controlling the spatial light modulator such that at least a part of the spatial light modulator acts as a helical wave plate to produce a
‘doughnut’ -shaped beam and a ring-shaped focus, instead of a sharp point-like focus.
In an embodiment, non-overlapping regions on the spatial light modulator are imaged onto apertures of focusing parts of the multi-focus element, preferably by providing relay optics in between the spatial light modulator and the multi-focus element.
In an embodiment, the aberration compensating unit further comprises a beam stop, wherein the spatial light modulator is furthermore configured for switching the light from one or more of the non-overlapping regions on the spatial light modulator from a first direction towards the multi-focus element, to a second direction towards the beams stop, or vice versa. Accordingly the light from the one or more non-overlapping regions can be controlled for: directing light from one or more of the non- overlapping regions from the spatial light modulator towards corresponding aperture of the multi-focus element, or directing light from one or more of the non- overlapping regions towards the beam stop for preventing that light from one or more of the non-overlapping regions reaches the corresponding aperture of the multi-focus element. Accordingly, the spatial light modulator can be used for blanking the light passing through one or more individual apertures of the multi-focus element, and thereby preventing the light from said one or more individual apertures to exit the aberration compensating unit.
The various aspects and features described and shown in the specification can be applied, individually, wherever possible. These individual aspects, in particular the aspects and {features described in the attached dependent claims, can be made subject of divisional patent applications.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will be elucidated on the basis of an exemplary embodiment shown in the attached drawings, in which:
Figure 1 shows a schematic setup of a first example of a light optical device with an aberration compensating unit according to the invention;
Figure 2 schematically shows an example of the aberration compensating unit of figure 1 in more detail;
Figures 3A, 3B and 3C schematically show an example of a micro-lens array comprising an array of micro- lenses which are arranged on a non-flat substrate;
Figure 4A and 4B schematically show examples of the effect of an aberration compensation or correction by the aberration compensating unit, without (4A) and with {4B) corrections by the spatial light modulator;
Figure 5 schematically shows a transmission light optical microscope comprising an aberration compensating unit according to the invention;
Figure 6 schematically shows a reflection light optical microscope comprising an aberration compensating unit according to the invention;
Figure 7 schematically shows a laser scanning system comprising an aberration compensating unit according to the invention; and
Figure 8 schematically shows a laser scanning system comprising a compact aberration compensating unit according to the invention.
It is noted that the same or comparable features in different examples shown in different figures are preferably provided with the same reference numbers.
DETAILED DESCRIPTION OF THE INVENTION
Figure 1 shows a schematic setup of a first example of a light optical device 1 with an aberration compensating unit 2 according to the invention. The light optical device 1 comprises a light source 3 and an objective lens 4 for illuminating a sample 5. The aberration compensating unit 2 is arranged in an optical path 11 of the light optical device 1 between the light source 3 and the objective lens 4.
As schematically shown in figure 1, light 6 from the light source 3 is directed by means of several optical steering components 7, for example mirrors or right angle prisms, towards the aberration compensating unit 2. In the optical path 11 between the light source 3 and the aberration compensating unit 2, a power modulating unit 8 might be provided which, for example, comprises a half wave plate 9 and a polarizing beam splitter 10, wherein the half wave plate 9 and the polarizing beam splitter 10 are rotatable with respect to each other in a direction around the optical beam path 11.
The aberration compensating unit 2 comprises a series arrangement of a spatial light modulator 12, relay optics comprising a first relay lens 13 and a second relay lens 14, and a micro-lens array 15. The relay lenses 13, 14 are arranged in between the spatial light modulator 12 and the micro-lens array 15. In addition, the compensating unit 2 comprises an input lens 16, an optical input element 17, and a beam stop 18. The details of the compensating unit 2 will be described in more detail below with reference to figure 2.
The micro-lens array 15 is an example of a multi- focus element and is arranged to focus the light beam coming from the spatial light modulator 12 into a grid of foci. The light optical device 1 comprises further optical components for directing the light from the micro-lens array 15 towards the objective lens 4, such that the grid of foci from the micro-lens array 15 are imaged in an image plane of the objective lens 4. Said further optical components may comprise, for example, one or more lenses 19 and mirrors 20. In use, the sample 5 is arranged such that its part of interest, for example its upper surface 21, is arranged to coincide with the image plane of the objective lens 4, such that an image of the grid of foci from the micro-lens array is projected onto the sample 5.
Figure 2 schematically shows an example of the aberration compensating unit 2 of figure 1 in more detail.
In the example of figures 1 and 2, the spatial light modulator 12 is a reflective spatial light modulator. As schematically shown in figure 2, light 6 from the light source is focused by the input lens 16 in a focal point 22, and is subsequently directed by the optical input element 17 towards the first relay lens 13. In this example, the optical input element 17 comprises a mirror.
It is noted that the focal point 22 is arranged in a focal plane of the first relay lens 13. Accordingly, the incoming light beam is converted to a substantially parallel beam 23. The optical input element 17 is arranged to direct the incoming light beam towards the first relay lens 13 in a direction substantially parallel to the center line 28 between a center of the spatial light modulator 12 and a center of the micro-lens array 15. Furthermore, the incoming light beam is arranged spaced apart {from the center line 28, and the spatial light modulator 12 is arranged in a focal point of the first relay lens 13.
Accordingly, the substantially parallel beam 23 is therefor directed towards the center of the spatial light modulator 12, and the spatial light modulator 12 receives a collimated beam 23 non-perpendicular to the surface of the spatial light modulator 12.
As schematically shown in figure 2, a zeroth order reflection 24 from the incoming parallel beam 23 is directed to the beam stop 18 in order to prevent interference with the correction pattern. A first diffraction order beam 25 (which might be a +1 or a -1 diffraction order) comprising the compensating or correcting patterns generated by the spatial light modulator 12, is directed parallel to the center line 28 and is focused by the first relay lens 13 in its focal point 26. One of the focal points of the second relay lens 14 coincides with the focal point 26. Accordingly the first diffraction order beam 25 is converted to a parallel beam 29, which impinges on the micro-lens array 15 to convert the parallel beam 29 into a grid of foci 27.
It is noted that the focus point 26 in between the first relay lens 13 and second relay lens 14 allows to position the optical input element 17 and the beam stop 18 relatively close to the center line 28 without interfering and/or blocking the first diffraction order beam 25.
It is further noted that the spatial light modulator 12 and micro-lens array 15 are arranged in conjugated planes of the combined first 13 and second 14 relay lenses. In this configuration, non-overlapping regions on the spatial light modulator 12 are imaged onto the apertures of the micro-lenses of the micro-lens array 15, and due to the different non-overlapping regions of the spatial light modulator 12, each one of said regions can be controlled to provide a compensation or correction of aberrations for the corresponding micro-lens only.
Accordingly, an aberration correction or compensation by the spatial light modulator 12 for one micro-lens of the micro-lens array 15 can be made independent from an aberration correction or compensation by the spatial light modulator 12 for another micro-lens of the micro-lens array 15. The spatial separation of the regions on the spatial light modulator 12 also allows to use a wavefront shaping procedure simultaneously on all the beamlets created by the micro-lens array 15.
Figure 3A schematically shows a top view of an example of a micro-lens array 30 comprising an array of micro-lenses 31, Figure 3B schematically shows a perspective view of the micro-lens array 30, and figure 3C schematically shows a cross-section view of the micro-lens array 30. The micro-lens array 30 provides a grid of foci 33 which can be distributed over area of the micro-lens array 30, which is configured to substantially cover a desired FOV of a light optical device in which the aberration compensating unit is to be used. Accordingly, the micro-lenses 31 of the micro-lens array 30 focusses the light on multiple positions on a focus plane 33, which is imaged in a image plane of an objective lens of the light optical device in which the aberration compensating unit is to be used.
The individual micro-lenses 31 of the micro-lens array 30 have individual free-form surfaces, which can be tailored for at least partially correcting aberrations which originate from the optical components between the light source and the aberration compensating unit, and/or for at least partially compensating for aberrations which originate from the optical components between the aberration compensating unit and the objective lens, and from the objective lens itself. Even field curvature can be compensated for by the micro-lens array 30, by arranging the micro-lenses 31 on a non-flat surface 34. This results in an array of foci 33 which are arranged on a non-flat focal plane 35.
Accordingly, the micro-lens array 30 is preferably designed for correcting and/or compensating most of the optical aberrations in a specific light optical device. On top of this, the spatial light modulator can provide a further correction and/or compensation of optical aberrations such as aberrations due to manufacturing tolerances of the micro-lens array 30, chromatic aberrations, and/or sample induces aberrations, for example.
Such micro-lens arrays can provide relatively strong focusing and phase modulation over a wide surface (FOV) due to a large number of lenticular segments.
Preferably, such micro-lens arrays are produced using additive manufacturing. By using additive manufacturing for producing the micro-lens arrays, it is possible to control the shape and position of each micro-lens, at relatively low prices. The limitations of the micro-lens arrays are mostly related to their static nature: - Once the fabrication process is concluded, they cannot be reconfigured, = Any mismatch between the design and the actual shapes cannot be corrected, and/or - Any limits of the manufacturing methods can translate to design limitation.
According to the present invention, one or more of these limitations of the micro-lens array can be compensated or corrected by an appropriate control of the spatial light modulator, resulting in an optical performance of light optical device comparable to a light optical device comprising high-end optical components, in particular a high-end objective.
Figure 4A schematically shows an example of the effect of an aberration compensation or correction by the aberration compensating unit, without corrections by the spatial light modulator 12’. In particular, figure 4A shows a schematic cross-section of the foci 27’ in the focus plane 35’ of the objective lens of a light optical device (reference number 4 in figure 1 for example). Any field curvature and distortion is mostly compensated by a non- flat substrate and by a non-linear grid spacing of the micro-lens array, as schematically shown in figure 4A. Any residual aberrations can be corrected by appropriate controlling the spatial light modulator. Figure 1B schematically shows an examples of the effect of an aberration compensation or correction by the aberration compensating unit with corrections by the spatial light modulator 127. In particular, figure 4B shows a schematic cross-section of the foci 27” in the focus plane 35” of the objective lens of a light optical device (reference number 4 in figure 1 for example). Clearly, the spatial light modulator provides a further correction for all the foci 27% simultaneously by properly controlling of the beamlet phase profiles for each beamlet.
Figure 5 schematically shows an example of a transmission light optical microscope 50 comprising an aberration compensating unit 2 according to the invention.
This example differs from the previous example in figure 1, in that the transmission light optical microscope 50 is provided with a scanning system comprising a scan mirror 51 and a scan lens 52 to provide a lateral scanning motion of the foci in the focus plane of the objective lens 4. It is noted that this focus plane of the objective lens 4 is usually the position where a sample for inspection is arranged. The light that passes through such a sample is collected by an optical arrangement 53 comprising a regular microscope objective (for example 20x), a 165 mm focal length tube lens 55 comprising two achromatic doublets, and a pixelated or segmented camera 56 for collecting an image of the sample. Such a pixelated or segmented camera comprises for example a CCD, sCMOS or SPAD array detector.
Figure 6 schematically shows an example of a reflection light optical microscope 60 comprising an aberration compensating unit 2 according to the invention.
This example differs from the previous example in figure 1, in that the reflection light optical microscope 60 is provided with a scanning system comprising a scan mirror 61 and a scan lens 62 to provide a lateral scanning motion of the foci in the focus plane of the objective lens 4. It is noted that this focus plane of the objective lens 4 is usually the position where a sample for inspection is arranged. In this reflection light optical microscope 60 the mirror 66 comprises a dichroic mirror which is configured for reflecting the light from the light source 3, in this case a substantially monochromatic light source, for example a laser, and which is configured for transmitting light from the sample with a wavelength that differs from the wavelength of the light from the substantially monochromatic light source, for example fluorescent light emitted by the sample when illuminated by the substantially monochromatic light. The light that is reflected back from a sample is collected by the objective lens 4, and is at least partially transmitted through the mirror 66 an towards an optical arrangement 63 comprising a tube lens 64, and a CCD camera 65 for collecting an image of the sample, for example a fluorescence image.
It is noted, that both the transmission light optical microscope 50 and the reflection light optical microscope 60 can, inter alia, be used for two photon detection microscopy and/or second harmonic generation microscopy, when using a laser as the light source 3. A suitable laser is, for example, a femtosecond laser with 160 fs pulse duration and 70Mhz repetition rate.
Figure 7 schematically shows a laser scanning system 70 comprising an aberration compensating unit 71 according to the invention. This example differs from the previous example in figure 1, in that the aberration compensating unit 71 comprises a transmissive spatial light modulator 72. In addition the laser scanning system 70 is provided with a scanning system comprising a scan mirror 73 and a scan lens 74 to provide a lateral scanning motion of the foci in the focus plane of the objective lens 4. It is noted that this focus plane of the objective lens 4 is usually the position where a sample 5 for inspection is arranged, or where the product for additive manufacturing, such as 3D laser-writing or 3D metal-printing (for example powder bed printing), is formed.
Figure 8 schematically shows a laser scanning system 80 comprising a compact aberration compensating unit 81 comprising a transmissive spatial light modulator 82 which is arranged adjacent and/or bonded to a multi-focus element 83. Accordingly, there is no need for relay optics and the aberration compensating unit 81 can be made very compact and robust. In addition, the aberration compensating unit 81 is easier to align.
It is noted, that the laser scanning systems 70, 80 as shown in figures 7 and 8 use a light source 3, which emits a single light beam along the optical path 11 between the light source 3 and the aberration compensating unit 71, 81. In an alternative example, the light source 3 can be configured to emit multiple laser beams in parallel, or the laser scanning system 70, 80 can be provided with multiple light sources configured to provide multiple laser beams in parallel, preferably one laser beam for each one of the focusing areas of the multi-focus element 83, or when the multi-focus element comprises a micro-lens array, one laser beam for each micro-lens of the micro-lens array 15. This is schematically indicated in figure 8 by the dashed lines.
In particular the use of multiple lasers makes the optical system more scalable to high powers and/or larger fields of view.
In summary, the invention relates to an aberration compensating unit, a light optical device comprising such an aberration compensating unit, and a method for providing an aberration compensation or correction in such a light optical device. The aberration compensating unit comprises a series arrangement of a spatial light modulator, and a multi-focus element. The multi-focus element is configured to focus light from the spatial light modulator into an arrangement of multiple foci distributed over a focus plane of the multi-focus element. In the light optical device, the aberration compensating unit is arranged in an optical path of the light optical device between a light source and an objective lens. Both the spatial light modulator and the multi-focus element are configured for providing an at least partial compensation or correction of one or more of the optical components in the light optical device.
It is to be understood that the above description is included to illustrate the operation of the preferred embodiments and is not meant to limit the scope of the invention. From the above discussion, many variations will be apparent to one skilled in the art that would yet be encompassed by the scope of the present invention.

Claims (20)

CONCLUSIESCONCLUSIONS 1. Een aberratie-compensatie-eenheid voor gebruik in een licht-optische-inrichting, waarbij de aberratie-compensatie-eenheid een samenstel in serie omvat van een ruimtelijke-lichtmodulator (spatial light modulator), en een multi-focus-element, waarbij het multi- focus-element geconfigureerd is om licht afkomstig van de ruimtelijke-lichtmodulator te focusseren in een samenstel van meerdere foci die over een focusvlak van het multi- focus-element verdeeld zijn.1. An aberration compensation unit for use in a light-optical device, the aberration compensation unit comprising an array of a spatial light modulator and a multi-focus element in series, the multi-focus element being configured to focus light from the spatial light modulator into an array of multiple foci distributed over a focal plane of the multi-focus element. 2. De aberratie-compensatie-eenheid volgens conclusie 1, waarbij de aberratie-compensatie-eenheid verder doorgeef-optiek omvat, waarbij de doorgeef-optiek tussen de ruimtelijke-lichtmodulator en het multi-focus- element geplaatst is.2. The aberration compensation unit according to claim 1, wherein the aberration compensation unit further comprises pass-through optics, the pass-through optics being disposed between the spatial light modulator and the multi-focus element. 3. De aberratie-compensatie-eenheid volgens conclusie 2, waarbij de ruimtelijke-lichtmodulator en het multi-focus-element in geconjugeerde vlakken van de doorgeef-optiek geplaatst zijn.3. The aberration compensation unit according to claim 2, wherein the spatial light modulator and the multi-focus element are disposed in conjugate planes of the pass-through optics. 4. De aberratie-compensatie-eenheid volgens conclusie 1, 2 of 3, waarbij het multi-focus-element een micro-lens-array omvat dat een matrix van micro-lenzen omvat.4. The aberration compensation unit according to claim 1, 2 or 3, wherein the multi-focus element comprises a micro-lens array comprising a matrix of micro-lenses. 5. De aberratie-compensatie-eenheid volgens conclusie 4, waarbij de matrix van micro-lenzen geplaatst is op een niet-vlak substraat.5. The aberration compensation unit according to claim 4, wherein the array of micro-lenses is disposed on a non-planar substrate. 6. De aberratie-compensatie-eenheid volgens een van de conclusies 1 - 5, waarbij de ruimtelijke- lichtmodulator een reflectieve ruimtelijke-lichtmodulator is,6. The aberration compensation unit according to any one of claims 1 to 5, wherein the spatial light modulator is a reflective spatial light modulator, 7. De aberratie-compensatie-eenheid volgens conclusie 6, waarbij de aberratie-compensatie-eenheid een optisch invoer-element omvat dat geconfigureerd is voor het richten van een inkomende lichtbundel naar de ruimtelijke- lichtmodulator, waarbij het optisch invoer-element geplaatst is aan een zijde van de ruimtelijke- lichtmodulator die naar het multi-focus-element gekeerd is, en waarbij het optisch invoer-element bij voorkeur geplaatst is op een positie die op afstand geplaatst is van een hartlijn tussen de ruimtelijke-lichtmodulator en het multi-focus-element.7. The aberration compensation unit according to claim 6, wherein the aberration compensation unit comprises an input optical element configured to direct an incoming light beam toward the spatial light modulator, the input optical element being disposed on a side of the spatial light modulator facing the multi-focus element, and the input optical element being preferably disposed at a position spaced apart from a centerline between the spatial light modulator and the multi-focus element. 8. De aberratie-compensatie-eenheid volgens conclusie 7, waarbij het optisch invoer-element een reflectief element omvat, bij voorkeur een spiegel.8. The aberration compensation unit according to claim 7, wherein the input optical element comprises a reflective element, preferably a mirror. 9. De aberratie-compensatie-eenheid volgens conclusie 6, 7 of 8, waarbij de reflectieve ruimtelijke- lichtmodulator een reeks van reflectieve elementen omvat die geconfigureerd zijn voor het genereren van een fase- patroon met een Blaze-hoek of een optische faseverschil- patroon met een Blaze-hoek voor het verschaffen van een geoptimaliseerde reflectie-efficiëntie in een eerste diffractie-orde en/of in een richting in hoofdzaak parallel aan de hartlijn tussen de ruimtelijke-lichtmodulator en het multi-focus-element.9. The aberration compensation unit according to claim 6, 7 or 8, wherein the reflective spatial light modulator comprises an array of reflective elements configured to generate a phase pattern with a Blaze angle or an optical phase difference pattern with a Blaze angle to provide an optimized reflection efficiency in a first diffraction order and/or in a direction substantially parallel to the centerline between the spatial light modulator and the multi-focus element. 10. De aberratie-compensatie-eenheid volgens een van de conclusies 6 - 9, waarbij de aberratie-compensatie- eenheid een bundel-blokkeer-orgaan omvat dat geconfigureerd is voor het blokkeren van het nulde orde gereflecteerd licht afkomstig van de reflectieve ruimtelijke- lichtmodulator, waarbij het bundel-blokkeer-orgaan bij voorkeur geplaatst is op een positie die op afstand gelegen is van de hartlijn tussen de ruimtelijke-lichtmodulator en het multi-focus-element.10. The aberration compensation unit according to any one of claims 6 to 9, wherein the aberration compensation unit comprises a beam blocking member configured to block the zero-order reflected light from the reflective spatial light modulator, the beam blocking member preferably being disposed at a position spaced from the centerline between the spatial light modulator and the multi-focus element. 11. De aberratie-compensatie-eenheid volgens conclusie 10, wanneer afhankelijk van conclusie 7, waarbij het bundel-blokkeer-orgaan en het optisch invoer-element geplaatst zijn op tegenover elkaar gelegen zijde van de hartlijn tussen de ruimtelijke-lichtmodulator en het multi- focus-element.11. The aberration compensation unit according to claim 10 when dependent on claim 7, wherein the beam blocking member and the input optical element are disposed on opposite sides of the center line between the spatial light modulator and the multi-focus element. 12. De aberratie-compensatie-eenheid volgens een van de conclusies 1 - 8, wanneer afhankelijk van conclusie 2, waarbij de doorgeef-optiek een eerste doorgeef-lens en een tweede doorgeef-lens omvat die op een hartlijn tussen de ruimtelijke-lichtmodulator en het multi-focus-element geplaatst zijn, waarbij tussen de eerste en tweede doorgeef-lenzen een focuspunt van de eerste doorgeef-lens in hoofdzaak samenvalt met een focuspunt van de tweede doorgeef-lens.12. The aberration compensation unit according to any one of claims 1 to 8 when dependent on claim 2, wherein the pass-through optics comprises a first pass-through lens and a second pass-through lens disposed on a center line between the spatial light modulator and the multi-focus element, wherein between the first and second pass-through lenses a focal point of the first pass-through lens substantially coincides with a focal point of the second pass-through lens. 13. De aberratie-compensatie-eenheid volgens conclusie 12, wanneer afhankelijk van conclusie 11, waarbij het optisch invoer-element en/of het bundel- blokkeer-orgaan geplaatst zijn in of nabij een focusvlak van de eerste doorgeef-lens tussen de eerste en tweede doorgeeflenzen, en op afstand geplaatst zijn van het focuspunt van de eerste doorgeef-lens.13. The aberration compensation unit according to claim 12 when dependent on claim 11, wherein the input optical element and/or the beam blocking member are disposed in or near a focal plane of the first pass lens between the first and second pass lenses, and are spaced from the focal point of the first pass lens. 14. De aberratie-compensatie-eenheid volgens conclusies 12 of 13, wanneer afhankelijk van conclusie 7, waarbij het optisch invoer-element geconfigureerd is om een inkomende optische bundel via de eerste doorgeef-lens naar de ruimtelijke-lichtmodulator te richten, waarbij de aberratie-compensatie-eenheid verder een invoerlens omvat die zodanig ingericht is dat een focuspunt van de invoerlens geplaatst is in een focus-vlak van de eerste doorgeef-lens, bij voorkeur waarbij het optisch invoer- element geplaatst is tussen de invoerlens en de eerste doorgeef-lens.14. The aberration compensation unit according to claims 12 or 13 when dependent on claim 7, wherein the input optical element is configured to direct an incoming optical beam through the first pass lens to the spatial light modulator, the aberration compensation unit further comprising an input lens arranged such that a focal point of the input lens is disposed in a focal plane of the first pass lens, preferably wherein the input optical element is disposed between the input lens and the first pass lens. 15. Een licht-optisch-apparaat omvattend een aberratie-compensatie-eenheid volgens een van de conclusies 1 - 14, waarbij het licht-optisch-apparaat een lichtbron en een objectief-lens omvat, waarbij de aberratie-compensatie- eenheid geplaatst is in een optisch pad van het licht- optisch-apparaat tussen de lichtbron en de objectief-lens.15. A light-optical apparatus comprising an aberration compensation unit according to any one of claims 1 to 14, wherein the light-optical apparatus comprises a light source and an objective lens, the aberration compensation unit being disposed in an optical path of the light-optical apparatus between the light source and the objective lens. 16. Het licht-optisch-apparaat volgens conclusie 15, waarbij het licht-optisch-apparaat geconfigureerd is voor het afbeelden van het samenstel van meerdere foci die over het focusvlak van het multi-focus-element verdeeld zijn in een beeldvlak van de objectief-lens.16. The light-optical device according to claim 15, wherein the light-optical device is configured to image the assembly of a plurality of foci distributed over the focal plane of the multi-focus element in an image plane of the objective lens. 17. Het licht-optisch-apparaat volgens conclusie 15 of 16, waarbij het licht-optisch-apparaat een aftast-element omvat, waarbij het aftast-element geplaatst is in het optische pad van het licht-optisch-apparaat tussen de aberratie-compensatie-eenheid en de objectief- lens.17. The light-optical device according to claim 15 or 16, wherein the light-optical device comprises a scanning element, the scanning element being disposed in the optical path of the light-optical device between the aberration compensation unit and the objective lens. 18. Een werkwijze voor het verschaffen van een aberratie-compensatie of correctie in een licht-optisch- apparaat, waarbij de werkwijze de stappen omvat van: het verschaffen van het licht-optisch-apparaat, waarbij het licht-optisch-apparaat een samenstel van optische componenten omvat omvattende een lichtbron, een aberratie-compensatie-eenheid en een objectief-lens, waarbij de aberratie-compensatie-eenheid in een optisch pad van het licht-optische-apparaat geplaatst is tussen de lichtbron en de objectief-lens, waarbij de aberratie- compensatie-eenheid een samenstel in serie omvat van een ruimtelijke-lichtmodulator (spatial light modulator), en een multi-focus-element, waarbij het multi-focus-element geconfigureerd is om licht afkomstig van de ruimtelijke- lichtmodulator te focusseren in een samenstel van meerdere foci die over een focusvlak van het multi-focus-element verdeeld zijn, in het bijzonder verdeeld over een gewenst gezichtsveld; het richten van een lichtbundel van de lichtbron naar de ruimtelijke-lichtmodulator, waarbij ten minste een deel van de lichtbundel gericht wordt van de ruimtelijk- lichtmodulator naar het multi-focus-element, en waarbij het multi-focus-element het ten minste ene deel van de inkomende lichtbundel focusseert in het samenstel van meerdere foci; het besturen van de ruimtelijke-lichtmodulator voor het verschaffen van een aberratie-compensatie en/of correctie voor elke focus van het samenstel van foci teneinde ten minste gedeeltelijk te compenseren voor aberraties van een of meer van de optische componenten van het licht-optisch-apparaat.18. A method of providing aberration compensation or correction in a light-optical device, the method comprising the steps of: providing the light-optical device, the light-optical device comprising an assembly of optical components including a light source, an aberration compensation unit and an objective lens, the aberration compensation unit being disposed in an optical path of the light-optical device between the light source and the objective lens, the aberration compensation unit comprising an assembly in series of a spatial light modulator and a multi-focus element, the multi-focus element being configured to focus light from the spatial light modulator into an assembly of a plurality of foci distributed over a focal plane of the multi-focus element, in particular distributed over a desired field of view; directing a light beam from the light source to the spatial light modulator, at least a portion of the light beam being directed from the spatial light modulator to the multi-focus element, and the multi-focus element focusing the at least a portion of the incoming light beam into the plurality of foci; controlling the spatial light modulator to provide aberration compensation and/or correction for each focus of the plurality of foci to at least partially compensate for aberrations of one or more of the optical components of the light-optical device. 19. De werkwijze volgens conclusie 18, waarbij niet-overlappende gebieden op de ruimtelijke-lichtmodulator gericht zijn op de aperturen van focusserende delen van het multi-focus-element.19. The method of claim 18, wherein non-overlapping regions on the spatial light modulator are aligned with the apertures of focusing portions of the multi-focus element. 20. De werkwijze volgens conclusie 19, waarbij de aberratie-compensatie-eenheid verder een bundel- blokkeer-orgaan omvat, waarbij de ruimtelijke- lichtmodulator verder geconfigureerd is voor het schakelen van het licht van een of meer van de niet-overlappende gebieden op de ruimtelijke-lichtmodulator van een eerste richting naar het multi-focus-element, maar een tweede richting naar het bundel-blokkeer-orgaan, of vice versa. -0-0-0-0-0-0-0-0-20. The method of claim 19, wherein the aberration compensation unit further comprises a beam blocking member, the spatial light modulator further configured to switch the light from one or more of the non-overlapping regions on the spatial light modulator from a first direction toward the multi-focus element but a second direction toward the beam blocking member, or vice versa. -0-0-0-0-0-0-0-0-
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006081031A2 (en) * 2005-01-27 2006-08-03 Rensselaer Polytechnic Institute Adaptive scanning optical microscope
US20130242373A1 (en) * 2008-12-25 2013-09-19 Hamamatsu Photonics K.K. Light control device and light control method
US20140151837A1 (en) * 2010-09-30 2014-06-05 Samsung Electronics Co., Ltd. Image sensor
US20150185523A1 (en) * 2012-07-26 2015-07-02 Hamamatsu Photonics K.K. Light modulation method, light modulation program, light modulation device, and illumination device
US20160124222A1 (en) * 2013-06-06 2016-05-05 Hamamatsu Photonics K.K. Correspondence relation specifying method for adaptive optics system, wavefront distortion compensation method, adaptive optics system, and storage medium storing program for adaptive optics system
US20210165200A1 (en) * 2019-12-02 2021-06-03 Carl Zeiss Microscopy Gmbh Method and apparatus for imaging samples by means of manipulated excitation radiation
WO2022192054A1 (en) * 2021-03-09 2022-09-15 Arizona Boards Of Regents On Behalf Of The University Of Arizona Devices and methods for enhancing the performance of integral imaging based light field displays using time-multiplexing schemes

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006081031A2 (en) * 2005-01-27 2006-08-03 Rensselaer Polytechnic Institute Adaptive scanning optical microscope
US20130242373A1 (en) * 2008-12-25 2013-09-19 Hamamatsu Photonics K.K. Light control device and light control method
US20140151837A1 (en) * 2010-09-30 2014-06-05 Samsung Electronics Co., Ltd. Image sensor
US20150185523A1 (en) * 2012-07-26 2015-07-02 Hamamatsu Photonics K.K. Light modulation method, light modulation program, light modulation device, and illumination device
US20160124222A1 (en) * 2013-06-06 2016-05-05 Hamamatsu Photonics K.K. Correspondence relation specifying method for adaptive optics system, wavefront distortion compensation method, adaptive optics system, and storage medium storing program for adaptive optics system
US20210165200A1 (en) * 2019-12-02 2021-06-03 Carl Zeiss Microscopy Gmbh Method and apparatus for imaging samples by means of manipulated excitation radiation
WO2022192054A1 (en) * 2021-03-09 2022-09-15 Arizona Boards Of Regents On Behalf Of The University Of Arizona Devices and methods for enhancing the performance of integral imaging based light field displays using time-multiplexing schemes

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