NL2018351A - Radiation System - Google Patents
Radiation System Download PDFInfo
- Publication number
- NL2018351A NL2018351A NL2018351A NL2018351A NL2018351A NL 2018351 A NL2018351 A NL 2018351A NL 2018351 A NL2018351 A NL 2018351A NL 2018351 A NL2018351 A NL 2018351A NL 2018351 A NL2018351 A NL 2018351A
- Authority
- NL
- Netherlands
- Prior art keywords
- polarization
- radiation beam
- radiation
- polarization state
- adjustment apparatus
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 319
- 239000000758 substrate Substances 0.000 claims description 22
- 238000005286 illumination Methods 0.000 claims description 21
- 238000000059 patterning Methods 0.000 claims description 10
- 238000001459 lithography Methods 0.000 claims description 4
- 230000010287 polarization Effects 0.000 abstract description 324
- 238000009304 pastoral farming Methods 0.000 description 43
- 230000008859 change Effects 0.000 description 33
- 239000003574 free electron Substances 0.000 description 31
- 238000010894 electron beam technology Methods 0.000 description 18
- 230000005684 electric field Effects 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000000737 periodic effect Effects 0.000 description 7
- 238000000576 coating method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 210000001747 pupil Anatomy 0.000 description 5
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002901 radioactive waste Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
1. Een lithografieinrichting omvattende: een belichtinginrichting ingericht voor het leveren van een stralingsbundel; een drager geconstrueerd voor het dragen van een patroneerinrichting, welke patroneerinrichting in staat is een patroon aan te brengen in een doorsnede van de stralingsbundel ter vorming van een gepatroneerde stralingsbundel; een substraattafel geconstrueerd om een substraat te dragen; en een projectieinrichting ingericht voor het projecteren van de gepatroneerde stralingsbundel op een doelgebied van het substraat, met het kenmerk, dat de substraattafel is ingericht voor het positioneren van het doelgebied van het substraat in een brandpuntsvlak van de projectieinrichting.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16159763 | 2016-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2018351A true NL2018351A (en) | 2017-09-19 |
Family
ID=55532162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2018351A NL2018351A (en) | 2016-03-11 | 2017-02-10 | Radiation System |
Country Status (1)
| Country | Link |
|---|---|
| NL (1) | NL2018351A (nl) |
-
2017
- 2017-02-10 NL NL2018351A patent/NL2018351A/en unknown
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