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NL2015805A - An Undulator - Google Patents

An Undulator Download PDF

Info

Publication number
NL2015805A
NL2015805A NL2015805A NL2015805A NL2015805A NL 2015805 A NL2015805 A NL 2015805A NL 2015805 A NL2015805 A NL 2015805A NL 2015805 A NL2015805 A NL 2015805A NL 2015805 A NL2015805 A NL 2015805A
Authority
NL
Netherlands
Prior art keywords
magnetic field
undulator module
undulator
field sensor
magnetic
Prior art date
Application number
NL2015805A
Other languages
English (en)
Dutch (nl)
Inventor
Alexandrovich Nikipelov Andrey
Yevgenyevich Banine Vadim
Roelof Loopstra Erik
Michaël Kelgtermans Alphonsus
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of NL2015805A publication Critical patent/NL2015805A/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • H05H2007/041—Magnet systems, e.g. undulators, wigglers; Energisation thereof for beam bunching, e.g. undulators

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
NL2015805A 2015-02-02 2015-11-18 An Undulator NL2015805A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15153438 2015-02-02

Publications (1)

Publication Number Publication Date
NL2015805A true NL2015805A (en) 2016-09-29

Family

ID=52432741

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2015805A NL2015805A (en) 2015-02-02 2015-11-18 An Undulator

Country Status (3)

Country Link
NL (1) NL2015805A (zh)
TW (1) TWI706695B (zh)
WO (1) WO2016124269A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI702629B (zh) * 2019-05-03 2020-08-21 財團法人國家同步輻射研究中心 快速切換聚頻磁鐵及電子束極化方法
US10908231B2 (en) 2019-05-08 2021-02-02 Uchicago Argonne, Llc Small bore magnetic measurement system, method for measuring small bore magnets
JP7467396B2 (ja) * 2021-08-06 2024-04-15 株式会社東芝 電磁波発生装置
CN119697857B (zh) * 2024-11-12 2025-09-30 中国科学技术大学 基于波荡器辐射产生圆偏振轴上高次谐波的方法及装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013211830A1 (de) * 2013-06-21 2014-06-12 Carl Zeiss Smt Gmbh EUV-Lithographieanlage mit Freie-Elektronen-Laser-Einheit

Also Published As

Publication number Publication date
TW201639418A (zh) 2016-11-01
WO2016124269A1 (en) 2016-08-11
TWI706695B (zh) 2020-10-01

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