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NL151138B - EVAPORATOR. - Google Patents

EVAPORATOR.

Info

Publication number
NL151138B
NL151138B NL727201042A NL7201042A NL151138B NL 151138 B NL151138 B NL 151138B NL 727201042 A NL727201042 A NL 727201042A NL 7201042 A NL7201042 A NL 7201042A NL 151138 B NL151138 B NL 151138B
Authority
NL
Netherlands
Prior art keywords
evaporator
Prior art date
Application number
NL727201042A
Other languages
Dutch (nl)
Other versions
NL7201042A (en
Original Assignee
Bekaert Sa Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Sa Nv filed Critical Bekaert Sa Nv
Publication of NL7201042A publication Critical patent/NL7201042A/xx
Publication of NL151138B publication Critical patent/NL151138B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL727201042A 1971-02-09 1972-01-26 EVAPORATOR. NL151138B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE762681A BE762681A (en) 1971-02-09 1971-02-09 DEVICE FOR VAPORIZING A METAL COATING ON AN ELONGATED SUBSTRATE USING AT LEAST ONE ELECTRONIC GUN.

Publications (2)

Publication Number Publication Date
NL7201042A NL7201042A (en) 1972-08-11
NL151138B true NL151138B (en) 1976-10-15

Family

ID=3857695

Family Applications (1)

Application Number Title Priority Date Filing Date
NL727201042A NL151138B (en) 1971-02-09 1972-01-26 EVAPORATOR.

Country Status (9)

Country Link
US (1) US3777704A (en)
JP (1) JPS5019519B1 (en)
BE (1) BE762681A (en)
DE (1) DE2204467A1 (en)
FR (1) FR2124467B1 (en)
GB (1) GB1344432A (en)
IT (1) IT948377B (en)
LU (1) LU64738A1 (en)
NL (1) NL151138B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153005A (en) * 1977-07-06 1979-05-08 United Technologies Corporation Multiple electron beam vacuum vapor deposition apparatus
EP0241721B1 (en) * 1986-03-18 1992-09-23 Sumitomo Electric Industries, Ltd. Conductor and method of producing the same
DE3634598C2 (en) * 1986-10-10 1994-06-16 Leybold Ag Method and device for reactive vapor deposition of metal compounds
ES2085269T3 (en) * 1989-04-14 1996-06-01 Katayama Tokushu Kogyo Kk PROCEDURE TO MANUFACTURE A POROUS METAL SHEET.
JPH089774B2 (en) * 1990-06-25 1996-01-31 三菱電機株式会社 Thin film forming equipment
AT400040B (en) * 1993-06-02 1995-09-25 Andritz Patentverwaltung METHOD AND DEVICE FOR COATING METAL SUBSTRATES, IN PARTICULAR STEEL OR ALUMINUM SHEETS IN STRIP SHAPE
DE102013104086B3 (en) * 2013-04-23 2014-10-23 Von Ardenne Anlagentechnik Gmbh Electron beam evaporation assembly and method of electron beam evaporation
DE102013107454B4 (en) * 2013-07-15 2020-02-06 VON ARDENNE Asset GmbH & Co. KG Electron beam process arrangement, mobile evaluation device, method for operating an electron beam evaporator; and method for calibrating an electron beam process assembly
JP7058499B2 (en) * 2017-12-08 2022-04-22 住友化学株式会社 Manufacturing method of thin-film deposition source, electron beam vacuum-film deposition equipment and electronic devices

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3432335A (en) * 1966-03-15 1969-03-11 Lokomotivbau Elektrotech Cyclically moving electron beam for uniform vapor deposited coating
US3502499A (en) * 1967-05-22 1970-03-24 Texas Instruments Inc Cladding method and apparatus
US3576670A (en) * 1969-02-19 1971-04-27 Gulf Energy & Environ Systems Method for making a superconducting material

Also Published As

Publication number Publication date
FR2124467A1 (en) 1972-09-22
JPS5019519B1 (en) 1975-07-08
DE2204467A1 (en) 1972-09-14
GB1344432A (en) 1974-01-23
US3777704A (en) 1973-12-11
BE762681A (en) 1971-07-16
LU64738A1 (en) 1972-07-03
NL7201042A (en) 1972-08-11
IT948377B (en) 1973-05-30
FR2124467B1 (en) 1977-04-01

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