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NL149946B - Elektronenkanon van het veldemissietype. - Google Patents

Elektronenkanon van het veldemissietype.

Info

Publication number
NL149946B
NL149946B NL7104277A NL7104277A NL149946B NL 149946 B NL149946 B NL 149946B NL 7104277 A NL7104277 A NL 7104277A NL 7104277 A NL7104277 A NL 7104277A NL 149946 B NL149946 B NL 149946B
Authority
NL
Netherlands
Prior art keywords
field emission
emission type
electronic gun
gun
electronic
Prior art date
Application number
NL7104277A
Other languages
English (en)
Other versions
NL7104277A (nl
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of NL7104277A publication Critical patent/NL7104277A/xx
Publication of NL149946B publication Critical patent/NL149946B/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7104277A 1970-04-01 1971-03-31 Elektronenkanon van het veldemissietype. NL149946B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2702270A JPS5318861B1 (nl) 1970-04-01 1970-04-01

Publications (2)

Publication Number Publication Date
NL7104277A NL7104277A (nl) 1971-10-05
NL149946B true NL149946B (nl) 1976-06-15

Family

ID=12209447

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7104277A NL149946B (nl) 1970-04-01 1971-03-31 Elektronenkanon van het veldemissietype.

Country Status (3)

Country Link
JP (1) JPS5318861B1 (nl)
GB (1) GB1326677A (nl)
NL (1) NL149946B (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3391969B1 (de) 2017-04-18 2019-05-29 Willy A. Bachofen AG Formstabiles ringelement für einen wärmetauschmantel

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1207118A (en) * 1968-07-12 1970-09-30 Jeol Ltd An electric gun

Also Published As

Publication number Publication date
NL7104277A (nl) 1971-10-05
DE2116014B2 (de) 1977-01-27
DE2116014A1 (de) 1971-11-18
JPS5318861B1 (nl) 1978-06-17
GB1326677A (en) 1973-08-15

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Legal Events

Date Code Title Description
NL80 Abbreviated name of patent owner mentioned of already nullified patent

Owner name: HITACHI

V4 Lapsed because of reaching the maxim lifetime of a patent