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NL1023024A1 - Method for manufacturing a layer of a metallic substrate. - Google Patents

Method for manufacturing a layer of a metallic substrate.

Info

Publication number
NL1023024A1
NL1023024A1 NL1023024A NL1023024A NL1023024A1 NL 1023024 A1 NL1023024 A1 NL 1023024A1 NL 1023024 A NL1023024 A NL 1023024A NL 1023024 A NL1023024 A NL 1023024A NL 1023024 A1 NL1023024 A1 NL 1023024A1
Authority
NL
Netherlands
Prior art keywords
manufacturing
layer
metallic substrate
metallic
substrate
Prior art date
Application number
NL1023024A
Other languages
Dutch (nl)
Other versions
NL1023024C2 (en
Inventor
Christian Bayer
Alexander Von Stockhausen
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of NL1023024A1 publication Critical patent/NL1023024A1/en
Application granted granted Critical
Publication of NL1023024C2 publication Critical patent/NL1023024C2/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0236Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0272Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029Graded interfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
NL1023024A 2002-03-27 2003-03-26 Method for manufacturing a layer of a metallic substrate. NL1023024C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002113661 DE10213661A1 (en) 2002-03-27 2002-03-27 Process for producing a coating of a metallic substrate
DE10213661 2002-03-27

Publications (2)

Publication Number Publication Date
NL1023024A1 true NL1023024A1 (en) 2003-09-30
NL1023024C2 NL1023024C2 (en) 2004-11-24

Family

ID=27815978

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1023024A NL1023024C2 (en) 2002-03-27 2003-03-26 Method for manufacturing a layer of a metallic substrate.

Country Status (4)

Country Link
CH (1) CH696336A5 (en)
DE (1) DE10213661A1 (en)
FR (1) FR2837839B1 (en)
NL (1) NL1023024C2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045473A1 (en) * 2004-09-20 2006-03-23 Franz Xaver Meiller Fahrzeug- Und Maschinenfabrik - Gmbh & Co Kg Load transport container and method for producing loading space limiting plates for load transport containers
JP4066440B2 (en) * 2006-05-17 2008-03-26 トーヨーエイテック株式会社 MEDICAL DEVICE WITH DIAMOND-LIKE THIN FILM AND MANUFACTURING METHOD THEREOF
DE102007047629A1 (en) * 2007-04-13 2008-10-16 Stein, Ralf Method of applying a high-strength coating to workpieces and / or materials
TWI399451B (en) * 2008-09-05 2013-06-21 Yu Hsueh Lin Method for plating film on surface of transmission mechanism
JP5741891B2 (en) * 2009-06-19 2015-07-01 株式会社ジェイテクト DLC film forming method
JP5661632B2 (en) 2009-08-17 2015-01-28 川澄化学工業株式会社 Medical instruments and metal products
AT510420B1 (en) * 2011-04-08 2012-04-15 Bosch Gmbh Robert METHOD FOR GASNITRATING HIGH-PRESSURE COMPONENTS
DE102019206420A1 (en) 2019-05-03 2020-11-05 Robert Bosch Gmbh Process for coating a mechanically highly stressed surface of a component as well as the coated component itself
US20250075335A1 (en) * 2023-08-30 2025-03-06 Ii-Vi Delaware, Inc. Method and System for Co-Deposited Diamond-Like Carbon Coatings

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE1006711A3 (en) * 1992-12-02 1994-11-22 Vito METHOD FOR APPLYING A diamond-like carbon coating on steel, iron or alloys thereof.
US5643637A (en) * 1994-03-18 1997-07-01 General Electric Company Method of grading the electric field of an electrode
US5840427A (en) * 1996-05-21 1998-11-24 Teledyne Industries Incorporated Method for making corrosion resistant electrical components
GB2313533A (en) * 1996-05-22 1997-12-03 Vitek Research Corp Coated fishing fly
EP0856592A1 (en) * 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
DE19709673C2 (en) * 1997-03-11 2001-01-04 Heraeus Kulzer Gmbh & Co Kg Surface treatment processes
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
EP1086260A1 (en) * 1998-05-12 2001-03-28 Applied Materials, Inc. Oxygen-argon gas mixture for precleaning in vacuum processing system
US6280834B1 (en) * 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate

Also Published As

Publication number Publication date
DE10213661A1 (en) 2003-10-16
FR2837839A1 (en) 2003-10-03
FR2837839B1 (en) 2006-10-20
NL1023024C2 (en) 2004-11-24
CH696336A5 (en) 2007-04-30

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20040921

PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20131001