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MX2017010824A - Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada. - Google Patents

Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada.

Info

Publication number
MX2017010824A
MX2017010824A MX2017010824A MX2017010824A MX2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A MX 2017010824 A MX2017010824 A MX 2017010824A
Authority
MX
Mexico
Prior art keywords
membrane
localizing
electrical
laser illumination
illumination during
Prior art date
Application number
MX2017010824A
Other languages
English (en)
Other versions
MX392389B (es
Inventor
Vincent Tabard-Cossa
Bustamante Jose
briggs Kyle
Original Assignee
Univ Ottawa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Ottawa filed Critical Univ Ottawa
Publication of MX2017010824A publication Critical patent/MX2017010824A/es
Publication of MX392389B publication Critical patent/MX392389B/es

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002Organic membrane manufacture
    • B01D67/0023Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0032Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0053Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/021Carbon
    • B01D71/0211Graphene or derivates thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/0215Silicon carbide; Silicon nitride; Silicon oxycarbide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/384Removing material by boring or cutting by boring of specially shaped holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00Devices without movable or flexible elements, e.g. microcapillary devices
    • B81B1/002Holes characterised by their shape, in either longitudinal or sectional plane
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/34Use of radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/35Use of magnetic or electrical fields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0283Pore size
    • B01D2325/028321-10 nm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/26Electrical properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Laser Beam Processing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

Un método para fabricar un nanoporo en una localización particular en una membrana incluye controlar una rigidez dieléctrica de la membrana en una localización particular en la membrana mientras se aplica uno de un potencial eléctrico o una corriente eléctrica a la membrana, monitorear una propiedad eléctrica a través de la membrana mientras se aplica uno del potencial eléctrico o la corriente eléctrica a través de la membrana, detectar un cambio brusco en la propiedad eléctrica a través de la membrana mientras se aplica uno del potencial eléctrico o la corriente eléctrica a través de la membrana; y retirar el potencial eléctrico o la corriente eléctrica de la membrana en respuesta a la detección del cambio brusco en la propiedad eléctrica.
MX2017010824A 2015-02-24 2016-02-24 Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada. MX392389B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562120054P 2015-02-24 2015-02-24
PCT/IB2016/051017 WO2016135656A1 (en) 2015-02-24 2016-02-24 Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown

Publications (2)

Publication Number Publication Date
MX2017010824A true MX2017010824A (es) 2018-05-28
MX392389B MX392389B (es) 2025-03-24

Family

ID=56788090

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017010824A MX392389B (es) 2015-02-24 2016-02-24 Localizacion de fabricacion de nanoporo en una membrana mediante iluminacion laser durante ruptura controlada.

Country Status (12)

Country Link
US (1) US10753009B2 (es)
EP (1) EP3261753B1 (es)
JP (1) JP7071825B2 (es)
KR (1) KR102444998B1 (es)
CN (1) CN107530638B (es)
AU (1) AU2016224950B2 (es)
BR (1) BR112017018197A2 (es)
CA (1) CA2976313C (es)
ES (1) ES2804175T3 (es)
MX (1) MX392389B (es)
SG (1) SG11201706587TA (es)
WO (1) WO2016135656A1 (es)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL269706B2 (en) * 2017-03-31 2025-08-01 Nielson Scient Llc 3D semiconductor fabrication
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
EP3776080A1 (en) * 2018-03-29 2021-02-17 Northeastern University Nanoscale etching of light absorbing materials using light and an electron donor solvent
US11313857B2 (en) 2018-04-06 2022-04-26 Northeastern University System and method for identifying and quantifying species with nanopores, using complexes of nanoparticles with carrier particles
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
CN109632899B (zh) * 2018-11-02 2021-03-30 广东工业大学 一种精确可控的纳米孔制造方法
EP3947730A4 (en) * 2019-03-25 2023-02-08 Technion Research & Development Foundation Limited Nanopore fabrication
US12168265B2 (en) 2019-03-25 2024-12-17 Technion Research & Development Foundation Limited Nanopore fabrication
CN110120248B (zh) * 2019-04-08 2020-12-25 中国科学院合肥物质科学研究院 模拟纳米晶金属累积离位损伤的方法
US11703476B2 (en) 2019-10-28 2023-07-18 Northeastern University Method and apparatus for sensing a molecule
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP7543174B2 (ja) * 2021-03-03 2024-09-02 株式会社日立製作所 ポア形成方法、およびポア形成装置

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JPH0674899B2 (ja) * 1987-07-20 1994-09-21 リンナイ株式会社 厨房家具
JPH0674899A (ja) * 1992-08-31 1994-03-18 Matsushita Electric Ind Co Ltd 試料表面の測定方法と装置及び試料表面の微細加工方法と装置
JP2004148458A (ja) * 2002-10-31 2004-05-27 Sony Corp 微細加工装置および微細加工方法
WO2005017025A2 (en) * 2003-08-15 2005-02-24 The President And Fellows Of Harvard College Study of polymer molecules and conformations with a nanopore
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
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CN105821435B (zh) * 2010-01-27 2018-10-16 耶鲁大学 用于GaN装置的基于导电性的选择性蚀刻和其应用
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices
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CA2872602C (en) 2012-05-07 2020-08-25 The University Of Ottawa Fabrication of nanopores using high electric fields
WO2014153047A1 (en) * 2013-03-14 2014-09-25 The Trustees Of Boston University Optoelectronic control of solid-state nanopores
US9656293B2 (en) * 2013-03-15 2017-05-23 President And Fellows Of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing
US9046511B2 (en) * 2013-04-18 2015-06-02 International Business Machines Corporation Fabrication of tunneling junction for nanopore DNA sequencing
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置

Also Published As

Publication number Publication date
US10753009B2 (en) 2020-08-25
JP2018513774A (ja) 2018-05-31
CA2976313C (en) 2024-01-16
EP3261753A1 (en) 2018-01-03
WO2016135656A1 (en) 2016-09-01
SG11201706587TA (en) 2017-09-28
US20180043310A1 (en) 2018-02-15
CA2976313A1 (en) 2016-09-01
CN107530638A (zh) 2018-01-02
KR102444998B1 (ko) 2022-09-19
AU2016224950A1 (en) 2017-09-14
EP3261753B1 (en) 2020-04-08
EP3261753A4 (en) 2018-10-10
ES2804175T3 (es) 2021-02-04
MX392389B (es) 2025-03-24
CN107530638B (zh) 2021-03-09
AU2016224950B2 (en) 2021-01-28
JP7071825B2 (ja) 2022-05-19
KR20170119704A (ko) 2017-10-27
BR112017018197A2 (pt) 2018-04-10

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