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MX2017008140A - Sistema de interferometria y metodos asociados. - Google Patents

Sistema de interferometria y metodos asociados.

Info

Publication number
MX2017008140A
MX2017008140A MX2017008140A MX2017008140A MX2017008140A MX 2017008140 A MX2017008140 A MX 2017008140A MX 2017008140 A MX2017008140 A MX 2017008140A MX 2017008140 A MX2017008140 A MX 2017008140A MX 2017008140 A MX2017008140 A MX 2017008140A
Authority
MX
Mexico
Prior art keywords
associated methods
interferometry system
methods
interferometry
distances
Prior art date
Application number
MX2017008140A
Other languages
English (en)
Inventor
C Williams Clayton
Original Assignee
Univ Utah Res Found
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Utah Res Found filed Critical Univ Utah Res Found
Publication of MX2017008140A publication Critical patent/MX2017008140A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

Se divulgan y describen dispositivos, sistemas, y métodos para determinar una distancia entre al menos dos puntos, en donde la tecnología de interferometría es utilizada para determinar dichas distancias.
MX2017008140A 2014-12-19 2015-12-21 Sistema de interferometria y metodos asociados. MX2017008140A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462094875P 2014-12-19 2014-12-19
PCT/US2015/067226 WO2016100986A1 (en) 2014-12-19 2015-12-21 Interferometry system and associated methods

Publications (1)

Publication Number Publication Date
MX2017008140A true MX2017008140A (es) 2018-01-30

Family

ID=56127769

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017008140A MX2017008140A (es) 2014-12-19 2015-12-21 Sistema de interferometria y metodos asociados.

Country Status (6)

Country Link
US (2) US10422630B2 (es)
EP (1) EP3234500A4 (es)
JP (1) JP2018503813A (es)
CN (1) CN107209002A (es)
MX (1) MX2017008140A (es)
WO (1) WO2016100986A1 (es)

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* Cited by examiner, † Cited by third party
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CN107209002A (zh) 2014-12-19 2017-09-26 犹他大学研究基金会 干扰量度系统以及相关方法
WO2017223542A1 (en) 2016-06-23 2017-12-28 University Of Utah Research Foundation Interferometry system and associated methods
US11162781B2 (en) 2016-06-23 2021-11-02 University Of Utah Research Foundation Interferometry systems and methods
WO2025182892A1 (ja) * 2024-02-27 2025-09-04 国立大学法人 東京大学 変位計測装置、変位計測方法及びスケールピッチ測定装置

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Also Published As

Publication number Publication date
EP3234500A4 (en) 2018-07-04
US20190353474A1 (en) 2019-11-21
JP2018503813A (ja) 2018-02-08
EP3234500A1 (en) 2017-10-25
US10422630B2 (en) 2019-09-24
US20180051980A1 (en) 2018-02-22
CN107209002A (zh) 2017-09-26
US11009341B2 (en) 2021-05-18
WO2016100986A1 (en) 2016-06-23

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