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MX2017007254A - Componente electrico sencillo de producir y metodo para producir un componente electrico. - Google Patents

Componente electrico sencillo de producir y metodo para producir un componente electrico.

Info

Publication number
MX2017007254A
MX2017007254A MX2017007254A MX2017007254A MX2017007254A MX 2017007254 A MX2017007254 A MX 2017007254A MX 2017007254 A MX2017007254 A MX 2017007254A MX 2017007254 A MX2017007254 A MX 2017007254A MX 2017007254 A MX2017007254 A MX 2017007254A
Authority
MX
Mexico
Prior art keywords
electric component
producing
produce electric
produce
component
Prior art date
Application number
MX2017007254A
Other languages
English (en)
Other versions
MX380533B (es
Inventor
KRÜGER Hans
Portmann Jurgen
Stelzl Alois
Pahl Wolfgang
Bauer Christian
Original Assignee
Snaptrack Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Snaptrack Inc filed Critical Snaptrack Inc
Publication of MX2017007254A publication Critical patent/MX2017007254A/es
Publication of MX380533B publication Critical patent/MX380533B/es

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/20Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/222Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only  for microphones
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0061Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00222Integrating an electronic processing unit with a micromechanical structure
    • B81C1/0023Packaging together an electronic processing unit die and a micromechanical structure die
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/0504Holders or supports for bulk acoustic wave devices
    • H03H9/0514Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0523Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps for flip-chip mounting
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/058Holders or supports for surface acoustic wave devices
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/02Casings; Cabinets ; Supports therefor; Mountings therein
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/06Arranging circuit leads; Relieving strain on circuit leads
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/005Electrostatic transducers using semiconductor materials
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/02Transducers using more than one principle simultaneously
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00Circuits for transducers, loudspeakers or microphones
    • H04R3/007Protection circuits for transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H10W70/09
    • H10W70/60
    • H10W72/0198
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/02Sensors
    • B81B2201/0257Microphones or microspeakers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00Microstructural systems or auxiliary parts thereof
    • B81B2207/01Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/012Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00Microstructural systems or auxiliary parts thereof
    • B81B2207/09Packages
    • B81B2207/091Arrangements for connecting external electrical signals to mechanical structures inside the package
    • B81B2207/098Arrangements not provided for in groups B81B2207/092 - B81B2207/097
    • H10W72/853
    • H10W72/9413
    • H10W74/019
    • H10W90/00
    • H10W90/10

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Otolaryngology (AREA)
  • Health & Medical Sciences (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Combinations Of Printed Boards (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Abstract

La invención se refiere a un componente eléctrico sencillo de producir para los microcircuitos con estructuras de componentes sensibles. Dicho componente comprende una estructura de conexión, y una estructura de conmutación en el lado inferior del microcircuito y un sustrato de soporte con al menos una capa de polímero.
MX2017007254A 2014-12-09 2015-10-19 Componente eléctrico sencillo de producir y método para producir un componente eléctrico. MX380533B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014118214.6A DE102014118214B4 (de) 2014-12-09 2014-12-09 Einfach herstellbares elektrisches Bauelement und Verfahren zur Herstellung eines elektrischen Bauelements
PCT/EP2015/074148 WO2016091438A1 (de) 2014-12-09 2015-10-19 Einfach herstellbares elektrisches bauelement und verfahren zur herstellung eines elektrischen bauelements

Publications (2)

Publication Number Publication Date
MX2017007254A true MX2017007254A (es) 2017-10-16
MX380533B MX380533B (es) 2025-03-12

Family

ID=54330770

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017007254A MX380533B (es) 2014-12-09 2015-10-19 Componente eléctrico sencillo de producir y método para producir un componente eléctrico.

Country Status (10)

Country Link
US (1) US11245977B2 (es)
EP (1) EP3231010B1 (es)
JP (1) JP6672301B2 (es)
KR (1) KR102561741B1 (es)
CN (1) CN107004664B (es)
BR (1) BR112017012118A2 (es)
DE (1) DE102014118214B4 (es)
ES (1) ES2873364T3 (es)
MX (1) MX380533B (es)
WO (1) WO2016091438A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067768B2 (en) * 2017-11-16 2021-07-20 Tdk Taiwan Corp. Optical member driving mechanism
CN111003682A (zh) * 2018-10-08 2020-04-14 凤凰先驱股份有限公司 电子封装件及其制法
CN111821567A (zh) * 2019-03-30 2020-10-27 深圳硅基仿生科技有限公司 电子封装体及植入式器件
CN111422821A (zh) * 2020-03-13 2020-07-17 清华大学 微系统封装方法

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US7434305B2 (en) * 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
DE10164494B9 (de) * 2001-12-28 2014-08-21 Epcos Ag Verkapseltes Bauelement mit geringer Bauhöhe sowie Verfahren zur Herstellung
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
JP4484544B2 (ja) 2004-02-25 2010-06-16 京セラ株式会社 高周波モジュールの製造方法
US7323675B2 (en) * 2005-09-21 2008-01-29 Sigurd Microelectronics Corp. Packaging structure of a light-sensing device with a spacer wall
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
JP2008091639A (ja) * 2006-10-02 2008-04-17 Nec Electronics Corp 電子装置およびその製造方法
JP4903540B2 (ja) 2006-11-29 2012-03-28 京セラ株式会社 微小電子機械部品封止用基板及び複数個取り形態の微小電子機械部品封止用基板、並びに微小電子機械装置及び微小電子機械装置の製造方法
KR100826394B1 (ko) * 2007-05-17 2008-05-02 삼성전기주식회사 반도체 패키지 제조방법
CN101325823B (zh) 2007-06-11 2011-08-17 美律实业股份有限公司 硅晶麦克风的封装构造
TWI348872B (en) 2007-10-17 2011-09-11 Ind Tech Res Inst Electro-acoustic sensing device
US8900931B2 (en) * 2007-12-26 2014-12-02 Skyworks Solutions, Inc. In-situ cavity integrated circuit package
DE102009019446B4 (de) 2009-04-29 2014-11-13 Epcos Ag MEMS Mikrofon
US8227904B2 (en) 2009-06-24 2012-07-24 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US8428286B2 (en) 2009-11-30 2013-04-23 Infineon Technologies Ag MEMS microphone packaging and MEMS microphone module
TWI451538B (zh) * 2010-01-19 2014-09-01 通用微機電系統公司 微機電系統(mems)麥克風封裝體及其製造方法
DE102010006132B4 (de) 2010-01-29 2013-05-08 Epcos Ag Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC
EP2420470B1 (en) 2010-08-18 2015-10-14 Nxp B.V. MEMS Microphone
US9239386B2 (en) * 2011-10-05 2016-01-19 Infineon Technologies Ag Sonic sensors and packages
US9210516B2 (en) * 2012-04-23 2015-12-08 Infineon Technologies Ag Packaged MEMS device and method of calibrating a packaged MEMS device
JP5565544B2 (ja) * 2012-08-01 2014-08-06 株式会社村田製作所 電子部品及び電子部品モジュール
CN102917303B (zh) 2012-10-30 2015-03-18 无锡芯奥微传感技术有限公司 塑料壳封装麦克风
US9040349B2 (en) * 2012-11-15 2015-05-26 Amkor Technology, Inc. Method and system for a semiconductor device package with a die to interposer wafer first bond
DE102012112058B4 (de) * 2012-12-11 2020-02-27 Snaptrack, Inc. MEMS-Bauelement und Verfahren zur Verkapselung von MEMS-Bauelementen
CN103491490B (zh) 2013-08-16 2019-03-19 上海集成电路研发中心有限公司 一种mems麦克风结构及其制造方法
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Also Published As

Publication number Publication date
JP2018506171A (ja) 2018-03-01
WO2016091438A1 (de) 2016-06-16
EP3231010A1 (de) 2017-10-18
US11245977B2 (en) 2022-02-08
US20170272855A1 (en) 2017-09-21
DE102014118214A1 (de) 2016-06-09
MX380533B (es) 2025-03-12
DE102014118214B4 (de) 2024-02-22
JP6672301B2 (ja) 2020-03-25
BR112017012118A2 (pt) 2018-01-02
KR102561741B1 (ko) 2023-07-28
KR20170094143A (ko) 2017-08-17
CN107004664A (zh) 2017-08-01
CN107004664B (zh) 2021-02-05
EP3231010B1 (de) 2021-03-03
ES2873364T3 (es) 2021-11-03

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