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MX2016015360A - Deposicion de elementos informaticos integrados (ice) mediante una etapa de traslacion. - Google Patents

Deposicion de elementos informaticos integrados (ice) mediante una etapa de traslacion.

Info

Publication number
MX2016015360A
MX2016015360A MX2016015360A MX2016015360A MX2016015360A MX 2016015360 A MX2016015360 A MX 2016015360A MX 2016015360 A MX2016015360 A MX 2016015360A MX 2016015360 A MX2016015360 A MX 2016015360A MX 2016015360 A MX2016015360 A MX 2016015360A
Authority
MX
Mexico
Prior art keywords
ice
thermal component
substrate holder
deposition
integrated computational
Prior art date
Application number
MX2016015360A
Other languages
English (en)
Inventor
michael jones Christopher
l perkins David
Paul Freese Robert
Neal Gardner Richard
Original Assignee
Halliburton Energy Services Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halliburton Energy Services Inc filed Critical Halliburton Energy Services Inc
Publication of MX2016015360A publication Critical patent/MX2016015360A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B47/00—Survey of boreholes or wells
    • E21B47/12—Means for transmitting measuring-signals or control signals from the well to the surface, or from the surface to the well, e.g. for logging while drilling
    • E21B47/13—Means for transmitting measuring-signals or control signals from the well to the surface, or from the surface to the well, e.g. for logging while drilling by electromagnetic energy, e.g. radio frequency
    • E21B47/135—Means for transmitting measuring-signals or control signals from the well to the surface, or from the surface to the well, e.g. for logging while drilling by electromagnetic energy, e.g. radio frequency using light waves, e.g. infrared or ultraviolet waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Geology (AREA)
  • Mining & Mineral Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Fluid Mechanics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geophysics (AREA)
  • Electromagnetism (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Las modalidades descritas incluyen un sistema y método para fabricar un núcleo de elemento informático integrado (ICE). El método comprende alterar una distancia entre un componente térmico y un portador de sustrato que porta al menos un sustrato durante un proceso de deposición de películas delgadas para mejorar la uniformidad del núcleo de ICE. En una modalidad, la alteración de la distancia entre el componente térmico y el portador de sustrato que porta al menos un sustrato incluye mover al menos una parte del portador de sustrato en al menos una dirección en relación con el componente térmico y también mover el componente térmico en al menos un sentido en relación con el portador de sustrato durante el proceso de deposición de películas delgadas.
MX2016015360A 2014-06-30 2014-06-30 Deposicion de elementos informaticos integrados (ice) mediante una etapa de traslacion. MX2016015360A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2014/044818 WO2016003401A1 (en) 2014-06-30 2014-06-30 Deposition of integrated computational elements (ice) using a translation stage

Publications (1)

Publication Number Publication Date
MX2016015360A true MX2016015360A (es) 2017-03-03

Family

ID=55019757

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2016015360A MX2016015360A (es) 2014-06-30 2014-06-30 Deposicion de elementos informaticos integrados (ice) mediante una etapa de traslacion.

Country Status (6)

Country Link
US (1) US10316405B2 (es)
EP (2) EP3129521A4 (es)
BR (1) BR112016026909B1 (es)
MX (1) MX2016015360A (es)
SA (1) SA516380347B1 (es)
WO (1) WO2016003401A1 (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017204861A1 (de) * 2017-03-23 2018-09-27 Carl Zeiss Smt Gmbh Verfahren zum Bestimmen eines Materialabtrags und Vorrichtung zur Strahlbearbeitung eines Werkstücks
US20210080380A1 (en) * 2019-09-16 2021-03-18 Halliburton Energy Services, Inc. Customized Thin Film Optical Element Fabrication System and Method
US20220298622A1 (en) * 2021-03-16 2022-09-22 University Of Rochester Electron-Beam Deposition of Striated Composite Layers for High-Fluence Laser Coatings

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133286A (en) * 1989-04-14 1992-07-28 Samsung Electro-Mechanics Co., Ltd. Substrate-heating device and boat structure for a vacuum-depositing apparatus
GB9225270D0 (en) * 1992-12-03 1993-01-27 Gec Ferranti Defence Syst Depositing different materials on a substrate
US7195797B2 (en) * 2000-07-10 2007-03-27 Atomic Telecom High throughput high-yield vacuum deposition system
US7138156B1 (en) * 2000-09-26 2006-11-21 Myrick Michael L Filter design algorithm for multi-variate optical computing
AU2002216615A1 (en) * 2000-10-05 2002-04-15 Opnetics Corporation In-situ thickness and refractive index monitoring and control system for thin film deposition
US20030168613A1 (en) * 2002-03-08 2003-09-11 Cheng-Chung Lee And Ycl Optcom Co., Ltd. Multi-layer optical interference filter deposited by using only one starting coating material
JP4418926B2 (ja) 2003-10-17 2010-02-24 株式会社昭和真空 光学薄膜形成用装置及び方法
WO2010018639A1 (ja) * 2008-08-15 2010-02-18 株式会社シンクロン 蒸着装置及び薄膜デバイスの製造方法
US8879053B2 (en) * 2012-04-26 2014-11-04 Halliburton Energy Services, Inc. Devices having an integrated computational element and a proximal interferent monitor and methods for determining a characteristic of a sample therewith
WO2015163853A1 (en) 2014-04-22 2015-10-29 Halliburton Energy Services, Inc. Systems and methods for analyzing contaminants in flowing bulk powder compositions

Also Published As

Publication number Publication date
BR112016026909A2 (pt) 2017-08-15
US20170029939A1 (en) 2017-02-02
SA516380347B1 (ar) 2020-06-19
EP4219788A1 (en) 2023-08-02
WO2016003401A1 (en) 2016-01-07
EP3129521A1 (en) 2017-02-15
EP3129521A4 (en) 2017-12-27
US10316405B2 (en) 2019-06-11
BR112016026909B1 (pt) 2021-12-07

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